[Scan]
initial_time=2015-12-22T17:01:09
final_time=2015-12-22T17:01:28
ip_count=19
run=1021
dataset=2
scan=74
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.0873E-4
ql1_vset=
ql1_vmon=-8.16607E-1
ql1_imon=1.3659E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=2.00634E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=2.61438E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=5.78046E-11
mult1=-9.47571E-9
mult2=-2.4822E-9
rf_tmon=-5.90164E-3
rf_agc=3.27664E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=1.73954E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6556E0
bslens_imon=3.2299E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21818E1
lens5a_imon=1.99819E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12387E2
lens4a_imon=2.04021E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=2.82737E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04571E2
lens23_imon=1.02606E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.06439E1
cs_ea1_imon=2.62679E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37256E0
lens1_imon=1.89201E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02528E1
cs_ea2_imon=1.49595E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=2.92143E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.30625E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=4.31256E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16533E1
os_ea1_imon=2.47141E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.34412E0
cs_ionrep_imon=1.16077E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9174E2
cs_nozzle_imon=1.92525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=2.95711E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.28947E-8
tplens_vset=1.4E-1
tplens_vmon=1.52522E0
tplens_imon=1.50618E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2636E1
iondef3_imon=1.54621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26644E1
iondef2_imon=1.50515E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02875E2
lens6_imon=2.98427E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=4.08312E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.40842E0
ionrepsh_imon=1.83963E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33988E1
lens5b_imon=2.11252E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.09875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29752E0
os_ea2_imon=-1.45273E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06177E2
lens4b_imon=2.01232E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06777E0
os_ef2alow_imon=-2.92944E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.63787E-1
os_ef2bup_imon=-5.53511E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.41698E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23178E2
cs_ionfoca_imon=6.30601E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.26263E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7285E1
iondef1_imon=1.01211E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.06719E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=5.5454E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=7.73093E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-1.82663E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47125E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56033E1
einzel_imon=7.5617E-6
window_vset=0.0E0
window_vmon=1.44062E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82599E2
mask1_imon=2.38994E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92556E3
multa_neg_imon=6.92859E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93762E3
defgrida_imon=6.03665E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50171E3
multb_neg_imon=8.23463E-5
defgridb_vset=0.0E0
defgridb_vmon=-4.96068E-1
defgridb_imon=5.16242E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33362E1
os_fil1_imon=9.42781E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06074E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62936E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3099E1
cs_fil1_imon=9.99639E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62444E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64162E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.86336E-2
os_fil2_imon=-2.76207E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.92907E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22452E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=2.46664E-2
chamber_ion_pmon=2.43606E-9
chamber_cvt_pmon=2.52027E-3
foreline_cvt_pmon=2.52027E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.31371E-1
res40_imon=-2.65194E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16774E-1	-7.98535E-1	-9.131E0	-9.14192E0	5.126E-3	9.26256E-2	2.73859E1	-3.28183E1	-3.26785E1	2.68597E1	2.43694E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.47029E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16846E-1	-7.98678E-1	-9.13103E0	-9.14204E0	4.93526E-3	9.32217E-2	2.73081E1	-3.26789E1	-3.2653E1	2.68274E1	2.44021E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.47709E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16989E-1	-7.98535E-1	-9.13134E0	-9.14154E0	5.126E-3	9.30309E-2	2.73207E1	-3.26506E1	-3.2623E1	2.68151E1	2.43492E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.47065E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16751E-1	-7.98678E-1	-9.13155E0	-9.1419E0	5.07832E-3	9.3174E-2	2.72883E1	-3.26711E1	-3.2605E1	2.6814E1	2.43703E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.46636E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16727E-1	-7.98225E-1	-9.13124E0	-9.14202E0	5.07832E-3	9.30309E-2	2.73177E1	-3.26687E1	-3.26398E1	2.68142E1	2.43386E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.46636E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16774E-1	-7.98249E-1	-9.1311E0	-9.14199E0	5.126E-3	9.29594E-2	2.73423E1	-3.26868E1	-3.26272E1	2.68316E1	2.44422E-9	2.51096E-3	2.51096E-3	6.31817E-3	2.47662E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.17132E-1	-7.98345E-1	-9.13136E0	-9.14197E0	4.93526E-3	9.30786E-2	2.73138E1	-3.26649E1	-3.26274E1	2.68059E1	2.43598E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.45994E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.17084E-1	-7.98225E-1	-9.13153E0	-9.14192E0	5.29289E-3	9.28402E-2	2.72953E1	-3.2656E1	-3.26119E1	2.68468E1	2.43979E-9	2.51934E-3	2.51934E-3	6.33665E-3	2.47909E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16727E-1	-7.98225E-1	-9.13131E0	-9.14173E0	5.31673E-3	9.28164E-2	2.73198E1	-3.26679E1	-3.26555E1	2.68226E1	2.43703E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.46207E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.1656E-1	-7.98106E-1	-9.13126E0	-9.14187E0	5.24521E-3	9.29594E-2	2.7291E1	-3.26713E1	-3.26058E1	2.68112E1	2.43492E-9	2.51662E-3	2.51662E-3	6.28552E-3	2.4685E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16798E-1	-7.98154E-1	-9.13129E0	-9.14209E0	5.26905E-3	9.29117E-2	2.72895E1	-3.26711E1	-3.26452E1	2.68202E1	2.43809E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.47709E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16798E-1	-7.9813E-1	-9.1311E0	-9.14183E0	5.38826E-3	9.2864E-2	2.73151E1	-3.26703E1	-3.26366E1	2.68204E1	2.43282E-9	2.51581E-3	2.51581E-3	6.32978E-3	2.45792E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09696E0	-8.16917E-1	-7.98368E-1	-9.13107E0	-9.14197E0	5.26905E-3	9.3174E-2	2.73063E1	-3.26909E1	-3.26488E1	2.68022E1	2.43902E-9	2.50989E-3	2.50989E-3	6.28592E-3	2.47029E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.17037E-1	-7.98178E-1	-9.13112E0	-9.1419E0	5.45979E-3	9.32693E-2	2.73088E1	-3.26542E1	-3.26242E1	2.67907E1	2.43492E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.44715E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09673E0	-8.17084E-1	-7.98202E-1	-9.131E0	-9.14199E0	5.45979E-3	9.31978E-2	2.73293E1	-3.26844E1	-3.26413E1	2.68082E1	2.44021E-9	2.51225E-3	2.51225E-3	6.3074E-3	2.45353E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.16941E-1	-7.97915E-1	-9.13105E0	-9.1419E0	5.67436E-3	9.3174E-2	2.73258E1	-3.26333E1	-3.26031E1	2.67914E1	2.43703E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.4685E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09696E0	-8.17132E-1	-7.9813E-1	-9.13115E0	-9.14195E0	5.26905E-3	9.3174E-2	2.72882E1	-3.26993E1	-3.25864E1	2.68213E1	2.4416E-9	2.51752E-3	2.51752E-3	6.31761E-3	2.46333E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09657E0	-8.17013E-1	-7.97987E-1	-9.131E0	-9.14195E0	5.48363E-3	9.30786E-2	2.72961E1	-3.26759E1	-3.26597E1	2.68376E1	2.44203E-9	2.51557E-3	2.51557E-3	6.31925E-3	2.47916E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09711E0	-8.16989E-1	-7.98202E-1	-9.131E0	-9.14202E0	5.14984E-3	9.30786E-2	2.73201E1	-3.26512E1	-3.262E1	2.68064E1	2.4359E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.46188E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.16607E-1	-7.97939E-1	-9.13112E0	-9.14199E0	5.36442E-3	9.30548E-2	2.7285E1	-3.26644E1	-3.2636E1	2.67908E1	2.43606E-9	2.52027E-3	2.52027E-3	6.31299E-3	2.46664E-2