[Scan]
initial_time=2015-12-22T17:01:35
final_time=2015-12-22T17:01:55
ip_count=19
run=1021
dataset=2
scan=75
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08782E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=1.36655E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.99349E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=2.45643E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=2.20537E-11
mult1=-9.16244E-9
mult2=-2.74456E-9
rf_tmon=-4.38024E-3
rf_agc=3.35559E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=1.74794E-9
bslens_vset=-6.2E0
bslens_vmon=-6.57655E0
bslens_imon=2.22117E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19789E1
lens5a_imon=1.99819E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1259E2
lens4a_imon=2.05146E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53661E1
cs_ef1b_imon=2.83969E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04531E2
lens23_imon=1.01788E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05029E1
cs_ea1_imon=2.60697E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37433E0
lens1_imon=2.41938E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64817E1
os_ef1alow_imon=2.97592E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.50232E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84504E1
cs_ef1a_imon=2.93282E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.30026E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.30416E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14851E1
os_ea1_imon=2.3624E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63676E1
os_ef1bup_imon=3.07114E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28572E0
cs_ionrep_imon=1.21704E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93109E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01914E1
cs_anode1_imon=2.94673E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.27309E-8
tplens_vset=1.4E-1
tplens_vmon=1.54233E0
tplens_imon=-8.26259E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26158E1
iondef3_imon=1.51117E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26765E1
iondef2_imon=1.57736E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98289E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=4.16411E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27687E0
ionrepsh_imon=1.79114E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33516E1
lens5b_imon=2.18826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7475E1
cs_ef2b_imon=3.1052E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43379E0
os_ea2_imon=-8.72271E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06046E2
lens4b_imon=2.0034E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70997E1
cs_ef2a_imon=3.17957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0702E0
os_ef2alow_imon=-2.71359E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78117E-1
os_ef2bup_imon=-5.37564E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11008E1
os_restr2_imon=3.40928E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.29079E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01908E1
cs_anode2_imon=2.25202E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73213E1
iondef1_imon=1.11263E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.08538E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.52155E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.72534E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15215E0
cs_ionaccel_imon=-1.92123E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.4716E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5644E1
einzel_imon=7.59401E-6
window_vset=0.0E0
window_vmon=1.63819E-1
window_imon=-1.11498E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39056E-4
mask2_vset=0.0E0
mask2_vmon=-1.86263E1
mask2_imon=-6.8752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92594E3
multa_neg_imon=7.4595E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=7.10202E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50098E3
multb_neg_imon=6.74808E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.754E0
defgridb_imon=5.76058E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33396E1
os_fil1_imon=9.43266E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06652E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63115E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30927E1
cs_fil1_imon=9.96176E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62812E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63716E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.88869E-2
os_fil2_imon=-2.77344E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82547E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.77974E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34646E-1
cs_fil2_imon=-2.20003E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62454E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22342E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.46188E-2
chamber_ion_pmon=2.4359E-9
chamber_cvt_pmon=2.50561E-3
foreline_cvt_pmon=2.50561E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.7137E-1
res40_imon=-2.56763E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.16679E-1	-7.9813E-1	-9.13105E0	-9.14187E0	5.22137E-3	9.29356E-2	2.73092E1	-3.26549E1	-3.25711E1	2.681E1	2.43694E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.4724E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.16607E-1	-7.97868E-1	-9.1315E0	-9.14178E0	5.6982E-3	9.29594E-2	2.73339E1	-3.26332E1	-3.26296E1	2.68064E1	2.43582E-9	2.52342E-3	2.52342E-3	6.31798E-3	2.4741E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0965E0	-8.16822E-1	-7.97796E-1	-9.13131E0	-9.14183E0	5.55515E-3	9.2864E-2	2.73033E1	-3.26524E1	-3.26675E1	2.68076E1	2.44253E-9	2.52585E-3	2.52585E-3	6.29624E-3	2.46882E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.16655E-1	-7.97939E-1	-9.13138E0	-9.14149E0	5.17368E-3	9.29356E-2	2.7255E1	-3.27021E1	-3.26449E1	2.68157E1	2.43486E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.4724E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.16607E-1	-7.98178E-1	-9.131E0	-9.14156E0	5.45979E-3	9.32217E-2	2.73134E1	-3.26472E1	-3.26354E1	2.68226E1	2.43382E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.46819E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16512E-1	-7.97939E-1	-9.13095E0	-9.14159E0	5.24521E-3	9.3174E-2	2.72913E1	-3.26242E1	-3.26386E1	2.6813E1	2.4365E-9	2.5199E-3	2.5199E-3	6.31563E-3	2.47065E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.16441E-1	-7.98273E-1	-9.13117E0	-9.14183E0	5.07832E-3	9.28879E-2	2.73063E1	-3.26777E1	-3.26062E1	2.68082E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.1656E-1	-7.97915E-1	-9.13088E0	-9.14171E0	5.19753E-3	9.30309E-2	2.72907E1	-3.26639E1	-3.26188E1	2.6804E1	2.44127E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.46957E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16655E-1	-7.97677E-1	-9.13115E0	-9.14183E0	5.24521E-3	9.29117E-2	2.72949E1	-3.26567E1	-3.26116E1	2.68028E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.16822E-1	-7.98368E-1	-9.13105E0	-9.14199E0	5.36442E-3	9.2864E-2	2.7346E1	-3.26266E1	-3.26434E1	2.67938E1	2.43598E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.47065E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.16727E-1	-7.98154E-1	-9.13086E0	-9.14173E0	5.00679E-3	9.27687E-2	2.72949E1	-3.26554E1	-3.2641E1	2.68316E1	2.43598E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.46636E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.16703E-1	-7.98249E-1	-9.13105E0	-9.14199E0	5.00679E-3	9.29832E-2	2.73257E1	-3.26691E1	-3.26272E1	2.67989E1	2.43902E-9	2.52276E-3	2.52276E-3	6.33977E-3	2.45978E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16393E-1	-7.98202E-1	-9.13107E0	-9.14178E0	5.05447E-3	9.29594E-2	2.72696E1	-3.26567E1	-3.26561E1	2.68052E1	2.44127E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.48356E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.1625E-1	-7.98512E-1	-9.13119E0	-9.14171E0	4.93526E-3	9.30309E-2	2.73285E1	-3.26969E1	-3.2599E1	2.68244E1	2.43598E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.47065E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.16011E-1	-7.98535E-1	-9.13148E0	-9.14161E0	5.45979E-3	9.31501E-2	2.73207E1	-3.26819E1	-3.26056E1	2.68217E1	2.44233E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.47494E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16321E-1	-7.98416E-1	-9.13124E0	-9.14207E0	5.19753E-3	9.30071E-2	2.73285E1	-3.26717E1	-3.26158E1	2.681E1	2.44021E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.47709E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.1656E-1	-7.98368E-1	-9.13122E0	-9.14183E0	5.26905E-3	9.29594E-2	2.73314E1	-3.26523E1	-3.26511E1	2.68238E1	2.43492E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.46421E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16488E-1	-7.98273E-1	-9.13131E0	-9.14195E0	5.10216E-3	9.29832E-2	2.73016E1	-3.26897E1	-3.2629E1	2.67908E1	2.44021E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.4685E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.16202E-1	-7.98345E-1	-9.13119E0	-9.14195E0	5.24521E-3	9.32455E-2	2.72985E1	-3.26777E1	-3.26308E1	2.6783E1	2.43809E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.47279E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16345E-1	-7.98321E-1	-9.1311E0	-9.14202E0	5.31673E-3	9.35316E-2	2.73213E1	-3.26765E1	-3.26158E1	2.68136E1	2.4359E-9	2.50561E-3	2.50561E-3	6.31278E-3	2.46188E-2