[Scan]
initial_time=2015-12-22T17:02:02
final_time=2015-12-22T17:02:22
ip_count=19
run=1021
dataset=2
scan=76
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0965E0
qbias_imon=-1.087E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.36608E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=2.00398E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=2.59674E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=2.81453E-11
mult1=-8.80054E-9
mult2=-2.68125E-9
rf_tmon=-5.55004E-3
rf_agc=3.29243E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.73217E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69866E0
bslens_imon=2.65652E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19382E1
lens5a_imon=1.9543E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05164E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53673E1
cs_ef1b_imon=2.84177E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04911E1
cs_ea1_imon=2.55459E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3879E0
lens1_imon=2.38045E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64713E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.56992E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=2.9363E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.28155E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11326E1
os_restr1_imon=4.30659E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15606E1
os_ea1_imon=2.3578E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.06245E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23794E0
cs_ionrep_imon=1.18377E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01804E1
cs_anode1_imon=2.94881E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.27362E-8
tplens_vset=1.4E-1
tplens_vmon=1.63317E0
tplens_imon=-2.88269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.46162E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.57346E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02994E2
lens6_imon=2.98523E-4
ql6_vset=1.0E-1
ql6_vmon=9.27687E-2
ql6_imon=4.06901E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27392E0
ionrepsh_imon=1.77592E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33227E1
lens5b_imon=2.15393E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74744E1
cs_ef2b_imon=3.1191E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46741E0
os_ea2_imon=-5.36028E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00446E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71038E1
cs_ef2a_imon=3.17713E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03371E0
os_ef2alow_imon=-2.81785E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6827E-1
os_ef2bup_imon=-5.50075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10869E1
os_restr2_imon=3.40928E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.283E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01861E1
cs_anode2_imon=2.25689E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73155E1
iondef1_imon=1.08715E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6787E1
iondef4_imon=1.07391E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.47258E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82952E-1
olens1_imon=7.70063E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11798E0
cs_ionaccel_imon=-1.78918E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47115E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56156E1
einzel_imon=7.5384E-6
window_vset=0.0E0
window_vmon=1.33121E-1
window_imon=-1.17753E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82611E2
mask1_imon=2.38969E-4
mask2_vset=0.0E0
mask2_vmon=-1.86257E1
mask2_imon=-7.25748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.64001E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.32335E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=6.90381E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=6.05435E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3335E1
os_fil1_imon=9.41615E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0704E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62898E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30901E1
cs_fil1_imon=9.96796E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62673E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63879E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80005E-2
os_fil2_imon=-2.55914E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83706E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.75569E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36768E-1
cs_fil2_imon=-1.86988E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.52404E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2236E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.47065E-2
chamber_ion_pmon=2.42226E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.06701E-1
res40_imon=-2.63366E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16774E-1	-7.98202E-1	-9.13095E0	-9.14183E0	5.17368E-3	9.3174E-2	2.73375E1	-3.2718E1	-3.26455E1	2.6795E1	2.43915E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.46636E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.17108E-1	-7.98082E-1	-9.13098E0	-9.14197E0	5.126E-3	9.32693E-2	2.72953E1	-3.26707E1	-3.26346E1	2.68188E1	2.43787E-9	2.51919E-3	2.51919E-3	6.30212E-3	2.46376E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.17227E-1	-7.98035E-1	-9.13103E0	-9.14171E0	5.4121E-3	9.29356E-2	2.73387E1	-3.26797E1	-3.26413E1	2.68094E1	2.43504E-9	2.53091E-3	2.53091E-3	6.35883E-3	2.47809E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.16798E-1	-7.98059E-1	-9.13131E0	-9.14185E0	5.34058E-3	9.33647E-2	2.73122E1	-3.26767E1	-3.26219E1	2.68298E1	2.43382E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.45978E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.17013E-1	-7.97963E-1	-9.13129E0	-9.14154E0	5.24521E-3	9.29117E-2	2.7321E1	-3.26778E1	-3.26391E1	2.6825E1	2.4276E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.47451E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16703E-1	-7.97939E-1	-9.13117E0	-9.14176E0	5.26905E-3	9.31263E-2	2.72856E1	-3.26546E1	-3.26364E1	2.68127E1	2.43876E-9	2.51783E-3	2.51783E-3	6.31779E-3	2.47166E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16727E-1	-7.97701E-1	-9.13081E0	-9.14183E0	5.43594E-3	9.31263E-2	2.72997E1	-3.26212E1	-3.26098E1	2.6822E1	2.4452E-9	2.52106E-3	2.52106E-3	6.32483E-3	2.45366E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16655E-1	-7.98082E-1	-9.13091E0	-9.14171E0	5.36442E-3	9.32455E-2	2.73039E1	-3.26726E1	-3.26172E1	2.68279E1	2.43703E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.47065E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.16584E-1	-7.98154E-1	-9.13098E0	-9.1418E0	5.43594E-3	9.32455E-2	2.72877E1	-3.26554E1	-3.26194E1	2.68107E1	2.43862E-9	2.51771E-3	2.51771E-3	6.34312E-3	2.47494E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.16774E-1	-7.98297E-1	-9.13112E0	-9.14202E0	5.34058E-3	9.32932E-2	2.73001E1	-3.26629E1	-3.26425E1	2.68147E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.16464E-1	-7.98202E-1	-9.13143E0	-9.14185E0	5.48363E-3	9.31978E-2	2.73122E1	-3.26786E1	-3.26494E1	2.67959E1	2.43755E-9	2.51423E-3	2.51423E-3	6.32247E-3	2.46901E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16607E-1	-7.98416E-1	-9.13141E0	-9.14183E0	5.26905E-3	9.30786E-2	2.73152E1	-3.26769E1	-3.26215E1	2.6792E1	2.43734E-9	2.52338E-3	2.52338E-3	6.32483E-3	2.46951E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16417E-1	-7.98273E-1	-9.13153E0	-9.1418E0	5.26905E-3	9.31978E-2	2.72733E1	-3.26737E1	-3.25859E1	2.67945E1	2.43765E-9	2.52364E-3	2.52364E-3	6.33297E-3	2.47331E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16488E-1	-7.98416E-1	-9.13107E0	-9.14183E0	5.45979E-3	9.2864E-2	2.72871E1	-3.26687E1	-3.26452E1	2.68262E1	2.43746E-9	2.51911E-3	2.51911E-3	6.31925E-3	2.47451E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16822E-1	-7.98655E-1	-9.13088E0	-9.14185E0	5.24521E-3	9.32455E-2	2.73306E1	-3.26745E1	-3.26404E1	2.68173E1	2.42647E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.47279E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16727E-1	-7.98512E-1	-9.1311E0	-9.14152E0	5.31673E-3	9.29117E-2	2.73099E1	-3.26735E1	-3.26494E1	2.6813E1	2.42605E-9	2.51941E-3	2.51941E-3	6.31851E-3	2.46582E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.16655E-1	-7.98416E-1	-9.13122E0	-9.14164E0	5.07832E-3	9.30309E-2	2.73198E1	-3.26591E1	-3.26352E1	2.68322E1	2.42647E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.47709E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09657E0	-8.1656E-1	-7.98464E-1	-9.13122E0	-9.14209E0	5.6982E-3	9.31263E-2	2.73045E1	-3.26671E1	-3.26376E1	2.68111E1	2.42315E-9	2.51025E-3	2.51025E-3	6.3074E-3	2.47101E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0968E0	-8.1656E-1	-7.98416E-1	-9.13119E0	-9.1418E0	5.38826E-3	9.29356E-2	2.72997E1	-3.26657E1	-3.26278E1	2.681E1	2.42159E-9	2.51709E-3	2.51709E-3	6.33388E-3	2.46996E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0965E0	-8.16631E-1	-7.98106E-1	-9.13129E0	-9.14185E0	5.26905E-3	9.27687E-2	2.73155E1	-3.26609E1	-3.26266E1	2.6787E1	2.42226E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.47065E-2