[Scan]
initial_time=2015-12-22T17:02:55
final_time=2015-12-22T17:03:15
ip_count=19
run=1021
dataset=2
scan=78
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08712E-4
ql1_vset=
ql1_vmon=-8.16584E-1
ql1_imon=1.36782E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=1.96469E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=2.58338E-10
ql4_vset=
ql4_vmon=-9.14164E0
ql4_imon=4.06623E-11
mult1=-9.00591E-9
mult2=-2.75055E-9
rf_tmon=-5.38362E-3
rf_agc=3.25225E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.75208E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64616E0
bslens_imon=2.42646E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19382E1
lens5a_imon=1.94758E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=2.84575E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04941E1
cs_ea1_imon=2.55282E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34601E0
lens1_imon=2.59281E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64542E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.55435E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84688E1
cs_ef1a_imon=2.94486E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.28757E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11057E1
os_restr1_imon=4.30175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14869E1
os_ea1_imon=2.35744E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=1.18413E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.9499E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.26537E-8
tplens_vset=1.4E-1
tplens_vmon=1.58539E0
tplens_imon=-3.87372E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.48675E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26771E1
iondef2_imon=1.59151E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02999E2
lens6_imon=2.98279E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.14877E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2639E0
ionrepsh_imon=1.76211E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.17941E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40016E0
os_ea2_imon=-4.97094E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00396E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.716E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10021E0
os_ef2alow_imon=-2.74204E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85411E-1
os_ef2bup_imon=-5.47024E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.40977E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.28088E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.08538E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.0762E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.45555E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.65828E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-1.94196E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47089E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.48267E-1
window_imon=-1.36172E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.86188E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.56922E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.29857E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.08432E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42032E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.41507E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07161E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62598E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=9.93951E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63729E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64074E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.86336E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.81391E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.30557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.7582E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22349E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32418E-3
inlet_lpb_pmon=2.46446E-2
chamber_ion_pmon=2.4253E-9
chamber_cvt_pmon=2.50914E-3
foreline_cvt_pmon=2.50914E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.665E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.17037E-1	-7.98345E-1	-9.13146E0	-9.14159E0	5.57899E-3	9.29832E-2	2.7298E1	-3.2649E1	-3.2613E1	2.68005E1	2.4226E-9	2.51287E-3	2.51287E-3	6.31798E-3	2.46789E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16965E-1	-7.98655E-1	-9.13126E0	-9.14176E0	5.126E-3	9.3174E-2	2.73198E1	-3.26634E1	-3.26383E1	2.68174E1	2.42753E-9	2.52099E-3	2.52099E-3	6.34588E-3	2.4685E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-8.16655E-1	-7.98345E-1	-9.13119E0	-9.1414E0	5.126E-3	9.30548E-2	2.73257E1	-3.26567E1	-3.26402E1	2.67966E1	2.42753E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.46636E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.16584E-1	-7.98559E-1	-9.13122E0	-9.14183E0	5.126E-3	9.29832E-2	2.72738E1	-3.2688E1	-3.26413E1	2.68274E1	2.44233E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.4685E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.1656E-1	-7.9844E-1	-9.13136E0	-9.14178E0	5.34058E-3	9.29832E-2	2.73432E1	-3.26596E1	-3.25839E1	2.68104E1	2.4348E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.46789E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.16464E-1	-7.98464E-1	-9.13103E0	-9.14187E0	5.10216E-3	9.3174E-2	2.72727E1	-3.26629E1	-3.25955E1	2.68076E1	2.43575E-9	2.51679E-3	2.51679E-3	6.3074E-3	2.45949E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16584E-1	-7.9844E-1	-9.13105E0	-9.14185E0	5.24521E-3	9.31501E-2	2.72957E1	-3.26484E1	-3.26119E1	2.68256E1	2.43959E-9	2.51296E-3	2.51296E-3	6.31902E-3	2.47178E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16464E-1	-7.98321E-1	-9.13115E0	-9.14207E0	5.24521E-3	9.27687E-2	2.72967E1	-3.26482E1	-3.26188E1	2.68178E1	2.44021E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.47279E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16655E-1	-7.98321E-1	-9.13134E0	-9.14156E0	5.50747E-3	9.26018E-2	2.72815E1	-3.26408E1	-3.26231E1	2.68178E1	2.43798E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.48297E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16703E-1	-7.98273E-1	-9.13153E0	-9.14173E0	5.55515E-3	9.29117E-2	2.73149E1	-3.26321E1	-3.26738E1	2.6822E1	2.43809E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.46421E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.1656E-1	-7.98345E-1	-9.13177E0	-9.1414E0	5.4121E-3	9.30786E-2	2.73033E1	-3.26603E1	-3.2615E1	2.68126E1	2.43713E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.47758E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16631E-1	-7.98464E-1	-9.13157E0	-9.14185E0	5.57899E-3	9.33647E-2	2.73424E1	-3.26543E1	-3.25864E1	2.6813E1	2.43386E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.47709E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16941E-1	-7.9813E-1	-9.13134E0	-9.14164E0	5.29289E-3	9.28164E-2	2.73169E1	-3.26756E1	-3.26225E1	2.68065E1	2.43809E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.47279E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16607E-1	-7.98202E-1	-9.13103E0	-9.14185E0	5.48363E-3	9.29832E-2	2.73147E1	-3.26801E1	-3.26014E1	2.68094E1	2.43492E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.47709E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16607E-1	-7.98225E-1	-9.13126E0	-9.14199E0	5.43594E-3	9.31025E-2	2.73118E1	-3.26866E1	-3.25887E1	2.67639E1	2.42437E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.47494E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16989E-1	-7.98297E-1	-9.13122E0	-9.14185E0	5.57899E-3	9.32693E-2	2.73405E1	-3.26644E1	-3.26219E1	2.68041E1	2.43598E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.47065E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.1718E-1	-7.98368E-1	-9.13126E0	-9.14176E0	5.36442E-3	9.31978E-2	2.73141E1	-3.26729E1	-3.26392E1	2.68124E1	2.44214E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.47029E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.17251E-1	-7.97892E-1	-9.13122E0	-9.14171E0	5.65052E-3	9.34601E-2	2.7324E1	-3.26431E1	-3.26189E1	2.67481E1	2.43175E-9	2.51552E-3	2.51552E-3	6.28552E-3	2.47494E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16774E-1	-7.98011E-1	-9.13107E0	-9.14152E0	5.45979E-3	9.31978E-2	2.73153E1	-3.26374E1	-3.26398E1	2.6807E1	2.43071E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.47029E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16584E-1	-7.98225E-1	-9.13126E0	-9.14164E0	5.43594E-3	9.3174E-2	2.73093E1	-3.26771E1	-3.26284E1	2.67914E1	2.4253E-9	2.50914E-3	2.50914E-3	6.32418E-3	2.46446E-2