[Scan]
initial_time=2015-12-22T17:03:22
final_time=2015-12-22T17:03:41
ip_count=19
run=1021
dataset=2
scan=79
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09333E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.36472E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=2.04104E-9
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=2.25925E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=2.06113E-11
mult1=-7.58512E-9
mult2=-2.6228E-9
rf_tmon=-7.27021E-3
rf_agc=3.16272E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.74257E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66267E0
bslens_imon=2.64236E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.97554E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.04966E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=2.85872E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02004E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=2.54786E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37846E0
lens1_imon=2.27072E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6441E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03785E1
cs_ea2_imon=1.53488E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.93945E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.27723E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.30103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15317E1
os_ea1_imon=2.35603E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=1.18908E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93448E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=2.93405E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.26133E-8
tplens_vset=1.4E-1
tplens_vmon=1.59188E0
tplens_imon=-3.66136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26158E1
iondef3_imon=1.48356E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26416E1
iondef2_imon=1.56001E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98155E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.13893E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27097E0
ionrepsh_imon=1.78016E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33522E1
lens5b_imon=2.18791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50281E0
os_ea2_imon=-6.74064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00347E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.16182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05276E0
os_ef2alow_imon=-2.78168E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70995E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=3.41698E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.30353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.23127E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72925E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67998E1
iondef4_imon=1.07873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.47763E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.68571E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=1.67488E-1
window_imon=-1.01213E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86158E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.59753E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.62066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=6.65251E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28449E0
defgridb_imon=6.00126E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33389E1
os_fil1_imon=9.41904E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06963E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62709E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.96822E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63303E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64045E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80005E-2
os_fil2_imon=-2.81613E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.6709E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.62392E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.7582E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22447E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.4814E-2
chamber_ion_pmon=2.42121E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.10949E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16798E-1	-7.9813E-1	-9.13126E0	-9.1419E0	5.29289E-3	9.34362E-2	2.72962E1	-3.26549E1	-3.26372E1	2.67891E1	2.42753E-9	2.52099E-3	2.52099E-3	6.29098E-3	2.47065E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16703E-1	-7.97963E-1	-9.131E0	-9.14207E0	5.126E-3	9.31978E-2	2.72953E1	-3.26891E1	-3.26278E1	2.68213E1	2.42666E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.47203E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16679E-1	-7.98321E-1	-9.13098E0	-9.14185E0	5.29289E-3	9.29117E-2	2.7308E1	-3.26683E1	-3.26405E1	2.68082E1	2.4253E-9	2.52473E-3	2.52473E-3	6.32978E-3	2.46446E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.1656E-1	-7.98202E-1	-9.13122E0	-9.14192E0	4.95911E-3	9.31025E-2	2.73231E1	-3.2653E1	-3.26434E1	2.6813E1	2.42666E-9	2.52236E-3	2.52236E-3	6.34982E-3	2.46789E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16703E-1	-7.9813E-1	-9.13086E0	-9.14176E0	4.95911E-3	9.3174E-2	2.73183E1	-3.26326E1	-3.2635E1	2.6816E1	2.42016E-9	2.52757E-3	2.52757E-3	6.32386E-3	2.47925E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.16369E-1	-7.98082E-1	-9.13103E0	-9.14168E0	4.8399E-3	9.3174E-2	2.73045E1	-3.26903E1	-3.26266E1	2.6807E1	2.42647E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.4685E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16369E-1	-7.98035E-1	-9.13115E0	-9.14207E0	5.00679E-3	9.31501E-2	2.72853E1	-3.2611E1	-3.26152E1	2.68212E1	2.42437E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.4685E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.1656E-1	-7.97987E-1	-9.13126E0	-9.14176E0	5.29289E-3	9.31025E-2	2.72739E1	-3.26579E1	-3.26008E1	2.6822E1	2.42864E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.47662E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16631E-1	-7.98082E-1	-9.13134E0	-9.14178E0	4.91142E-3	9.34839E-2	2.7302E1	-3.2675E1	-3.26383E1	2.68063E1	2.42331E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.4685E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16584E-1	-7.98321E-1	-9.13126E0	-9.14183E0	4.88758E-3	9.2864E-2	2.72732E1	-3.2659E1	-3.26254E1	2.68209E1	2.4253E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.46882E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.16679E-1	-7.98082E-1	-9.13119E0	-9.1419E0	5.22137E-3	9.3174E-2	2.72937E1	-3.26831E1	-3.26332E1	2.6816E1	2.42347E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.47029E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.16798E-1	-7.98535E-1	-9.13105E0	-9.14161E0	4.76837E-3	9.28164E-2	2.73117E1	-3.26789E1	-3.26218E1	2.68124E1	2.42331E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.47494E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.1687E-1	-7.98583E-1	-9.13103E0	-9.14166E0	4.93526E-3	9.30786E-2	2.72982E1	-3.26808E1	-3.2626E1	2.68138E1	2.41596E-9	2.51225E-3	2.51225E-3	6.29098E-3	2.46636E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16679E-1	-7.98154E-1	-9.13131E0	-9.14149E0	5.29289E-3	9.31025E-2	2.73111E1	-3.26567E1	-3.26266E1	2.6801E1	2.42199E-9	2.51709E-3	2.51709E-3	6.33282E-3	2.46458E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.16774E-1	-7.98249E-1	-9.131E0	-9.14185E0	5.126E-3	9.30548E-2	2.73015E1	-3.26831E1	-3.26392E1	2.68076E1	2.42553E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.47874E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-8.16751E-1	-7.9813E-1	-9.13105E0	-9.1419E0	5.29289E-3	9.31978E-2	2.72968E1	-3.26732E1	-3.26472E1	2.68186E1	2.42647E-9	2.5188E-3	2.5188E-3	6.34588E-3	2.46207E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.16727E-1	-7.98202E-1	-9.13136E0	-9.14173E0	5.07832E-3	9.31978E-2	2.72985E1	-3.26524E1	-3.26224E1	2.6801E1	2.42437E-9	2.51771E-3	2.51771E-3	6.34588E-3	2.4685E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.17013E-1	-7.98297E-1	-9.13141E0	-9.14164E0	5.38826E-3	9.31025E-2	2.72957E1	-3.26543E1	-3.2626E1	2.68316E1	2.42243E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.48085E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09309E0	-8.16989E-1	-7.97868E-1	-9.13119E0	-9.14161E0	5.05447E-3	9.32693E-2	2.72835E1	-3.2653E1	-3.26086E1	2.67932E1	2.42553E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.46819E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09333E0	-8.16798E-1	-7.98225E-1	-9.13117E0	-9.14178E0	5.126E-3	9.30786E-2	2.72925E1	-3.26416E1	-3.26158E1	2.67998E1	2.42121E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.4814E-2