[Scan]
initial_time=2015-12-22T17:03:49
final_time=2015-12-22T17:04:08
ip_count=19
run=1021
dataset=2
scan=80
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08737E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.36827E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=2.0005E-9
ql3_vset=
ql3_vmon=-9.13084E0
ql3_imon=2.28143E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=1.38879E-11
mult1=-7.78981E-9
mult2=-2.521E-9
rf_tmon=-5.99046E-3
rf_agc=3.20118E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=1.70472E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=1.97983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12548E2
lens4a_imon=2.04823E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=2.84647E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02265E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0506E1
cs_ea1_imon=2.55301E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37256E0
lens1_imon=2.51252E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03943E1
cs_ea2_imon=1.53966E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=2.93477E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.28138E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.3068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14849E1
os_ea1_imon=2.37313E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6396E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23347E0
cs_ionrep_imon=1.19972E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93243E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.94414E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=3.25569E-8
tplens_vset=1.4E-1
tplens_vmon=1.59517E0
tplens_imon=-2.92136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25785E1
iondef3_imon=1.47621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26356E1
iondef2_imon=1.57751E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98144E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=4.11975E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26532E0
ionrepsh_imon=1.76425E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3367E1
lens5b_imon=2.17846E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.11713E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45157E0
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.0067E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70441E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04435E0
os_ef2alow_imon=-2.7096E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.41229E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.32019E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.24209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.06741E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.44844E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82833E-1
olens1_imon=7.67032E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-1.91313E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.5653E-6
window_vset=0.0E0
window_vmon=1.71092E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.00429E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.08863E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.23501E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30833E0
defgridb_imon=5.84349E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33362E1
os_fil1_imon=9.41471E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06729E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62725E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.96035E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62846E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64079E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.73837E-2
os_fil2_imon=-2.86419E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.65689E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62024E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22333E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=2.47451E-2
chamber_ion_pmon=2.42243E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.14553E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=225
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16917E-1	-7.97963E-1	-9.13134E0	-9.14176E0	5.45979E-3	9.26971E-2	2.73309E1	-3.26633E1	-3.2623E1	2.67986E1	2.42226E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.46636E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.16751E-1	-7.97868E-1	-9.1311E0	-9.14164E0	5.36442E-3	9.28164E-2	2.72918E1	-3.26503E1	-3.26243E1	2.68076E1	2.42437E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.47279E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16655E-1	-7.98178E-1	-9.13131E0	-9.14173E0	5.45979E-3	9.29594E-2	2.73014E1	-3.26615E1	-3.2607E1	2.67982E1	2.43991E-9	2.52765E-3	2.52765E-3	6.3074E-3	2.47203E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.1656E-1	-7.98011E-1	-9.1311E0	-9.14178E0	5.60284E-3	9.31263E-2	2.729E1	-3.26434E1	-3.2622E1	2.68256E1	2.43713E-9	2.5225E-3	2.5225E-3	6.30182E-3	2.46446E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09348E0	-8.1656E-1	-7.98106E-1	-9.13124E0	-9.14183E0	5.14984E-3	9.31025E-2	2.73093E1	-3.26909E1	-3.26248E1	2.67998E1	2.43073E-9	2.51709E-3	2.51709E-3	6.3445E-3	2.48032E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16464E-1	-7.97987E-1	-9.13081E0	-9.14168E0	5.29289E-3	9.30309E-2	2.72915E1	-3.26236E1	-3.26001E1	2.67926E1	2.43703E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.47709E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.16441E-1	-7.97725E-1	-9.13095E0	-9.14173E0	5.38826E-3	9.33647E-2	2.73219E1	-3.26615E1	-3.26188E1	2.68028E1	2.42967E-9	2.51632E-3	2.51632E-3	6.29665E-3	2.4535E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16536E-1	-7.97606E-1	-9.13098E0	-9.14173E0	5.55515E-3	9.29356E-2	2.73045E1	-3.26543E1	-3.26124E1	2.6804E1	2.42331E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.47065E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16655E-1	-7.97892E-1	-9.13103E0	-9.14178E0	5.36442E-3	9.30309E-2	2.73069E1	-3.26982E1	-3.26101E1	2.68106E1	2.42437E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.4685E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.16655E-1	-7.98225E-1	-9.1306E0	-9.14176E0	5.38826E-3	9.3174E-2	2.73364E1	-3.26773E1	-3.26484E1	2.67782E1	2.42542E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.47925E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16631E-1	-7.98368E-1	-9.13112E0	-9.14183E0	5.36442E-3	9.32932E-2	2.72817E1	-3.26795E1	-3.26146E1	2.68292E1	2.4214E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.4724E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16512E-1	-7.98082E-1	-9.13103E0	-9.14171E0	5.36442E-3	9.32932E-2	2.73189E1	-3.26633E1	-3.2626E1	2.67932E1	2.42226E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.47279E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16655E-1	-7.98225E-1	-9.13093E0	-9.14204E0	5.22137E-3	9.31978E-2	2.73057E1	-3.26579E1	-3.26349E1	2.68059E1	2.42647E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.47065E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16464E-1	-7.98559E-1	-9.13093E0	-9.14178E0	5.36442E-3	9.3174E-2	2.73201E1	-3.26464E1	-3.25701E1	2.68194E1	2.42037E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.46819E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16679E-1	-7.98202E-1	-9.13069E0	-9.14152E0	5.126E-3	9.27925E-2	2.72794E1	-3.26358E1	-3.26193E1	2.68064E1	2.42745E-9	2.50914E-3	2.50914E-3	6.32418E-3	2.47758E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16584E-1	-7.9844E-1	-9.13088E0	-9.14209E0	5.38826E-3	9.30071E-2	2.72847E1	-3.26621E1	-3.2653E1	2.6789E1	2.42331E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.47279E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16345E-1	-7.98368E-1	-9.13119E0	-9.1418E0	5.24521E-3	9.32932E-2	2.73216E1	-3.26708E1	-3.26508E1	2.68041E1	2.42437E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.47279E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.16536E-1	-7.98035E-1	-9.13112E0	-9.1419E0	5.07832E-3	9.30548E-2	2.73081E1	-3.26422E1	-3.2626E1	2.6798E1	2.4245E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.4724E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.16441E-1	-7.97725E-1	-9.13103E0	-9.14199E0	5.126E-3	9.31263E-2	2.73187E1	-3.2629E1	-3.26301E1	2.6828E1	2.42016E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.46421E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16464E-1	-7.98106E-1	-9.13084E0	-9.14176E0	5.48363E-3	9.30071E-2	2.72967E1	-3.26356E1	-3.25785E1	2.6801E1	2.42243E-9	2.51954E-3	2.51954E-3	6.28592E-3	2.47451E-2