[Scan]
initial_time=2015-12-22T18:11:46
final_time=2015-12-22T18:12:05
ip_count=19
run=1021
dataset=3
scan=81
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-7.6015E-1
ql1_imon=1.63162E-8
ql2_vset=
ql2_vmon=-7.35116E-1
ql2_imon=1.84162E-9
ql3_vset=
ql3_vmon=-9.19352E0
ql3_imon=7.06494E-9
ql4_vset=
ql4_vmon=-9.18953E0
ql4_imon=-4.5315E-10
mult1=-8.86143E-9
mult2=-2.70663E-9
rf_tmon=-4.14592E-3
rf_agc=3.37421E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.49868E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65796E0
bslens_imon=2.5114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20149E1
lens5a_imon=1.96032E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04997E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5379E1
cs_ef1b_imon=2.84215E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05118E1
cs_ea1_imon=2.51459E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34483E0
lens1_imon=2.65652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.53382E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.93405E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.32836E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.28734E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15713E1
os_ea1_imon=2.34966E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21198E0
cs_ionrep_imon=1.19439E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=2.96684E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.30247E-8
tplens_vset=1.4E-1
tplens_vmon=1.58834E0
tplens_imon=-4.86476E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26314E1
iondef3_imon=1.514E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.56355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.9807E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=3.95981E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25977E0
ionrepsh_imon=1.76884E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.18224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47331E0
os_ea2_imon=-8.29799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00683E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.74564E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.4378E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11057E1
os_restr2_imon=3.40869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23099E2
cs_ionfoca_imon=6.30848E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02236E1
cs_anode2_imon=2.2547E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73243E1
iondef1_imon=1.08963E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68148E1
iondef4_imon=1.07692E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.10815E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.87294E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-1.90952E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02048E2
cs_ionfocb_imon=1.47046E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.60134E-6
window_vset=0.0E0
window_vmon=1.46465E-1
window_imon=-1.17792E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.85924E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92596E3
multa_neg_imon=7.12679E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.96398E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50101E3
multb_neg_imon=7.74619E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26677E0
defgridb_imon=6.03665E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.4221E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06849E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64206E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3084E1
cs_fil1_imon=9.95747E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62378E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64441E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.87603E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.43425E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22228E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=3.01475E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51581E-3
foreline_cvt_pmon=2.51581E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=0
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.21761E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-7.61509E-1	-7.35521E-1	-9.19533E0	-9.18913E0	5.19753E-3	9.3174E-2	2.73075E1	-3.26296E1	-3.2638E1	2.68034E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-7.61199E-1	-7.35235E-1	-9.1948E0	-9.18925E0	5.36442E-3	9.33886E-2	2.73045E1	-3.26428E1	-3.26296E1	2.67842E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-7.60722E-1	-7.34949E-1	-9.19495E0	-9.18918E0	5.26905E-3	9.32217E-2	2.73086E1	-3.26785E1	-3.26195E1	2.68016E1	1.1929E-7	2.50898E-3	2.50898E-3	6.30192E-3	3.03185E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-7.60484E-1	-7.34806E-1	-9.19497E0	-9.18918E0	5.31673E-3	9.30309E-2	2.73315E1	-3.26651E1	-3.262E1	2.68007E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-7.60317E-1	-7.35354E-1	-9.19502E0	-9.18908E0	5.07832E-3	9.34124E-2	2.72886E1	-3.26679E1	-3.25853E1	2.6813E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-7.6046E-1	-7.35092E-1	-9.19509E0	-9.18925E0	5.29289E-3	9.33886E-2	2.73291E1	-3.26458E1	-3.26428E1	2.68058E1	1.1929E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09325E0	-7.60412E-1	-7.35378E-1	-9.19507E0	-9.18894E0	5.14984E-3	9.32455E-2	2.72931E1	-3.26536E1	-3.2623E1	2.68172E1	1.1929E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-7.60436E-1	-7.35092E-1	-9.19521E0	-9.18901E0	5.10216E-3	9.32693E-2	2.73021E1	-3.26691E1	-3.26384E1	2.6834E1	1.1929E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.01742E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-7.6077E-1	-7.35235E-1	-9.19483E0	-9.18918E0	5.50747E-3	9.31501E-2	2.72733E1	-3.26738E1	-3.26266E1	2.67848E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-7.60698E-1	-7.35354E-1	-9.19476E0	-9.18899E0	5.26905E-3	9.33409E-2	2.73323E1	-3.267E1	-3.26179E1	2.67989E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.9926E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-7.60746E-1	-7.35402E-1	-9.19471E0	-9.18913E0	5.05447E-3	9.31263E-2	2.73327E1	-3.26356E1	-3.26062E1	2.68226E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-7.60913E-1	-7.35092E-1	-9.19459E0	-9.18906E0	4.86374E-3	9.31025E-2	2.72787E1	-3.26536E1	-3.26284E1	2.68064E1	1.1929E-7	2.50898E-3	2.50898E-3	6.32936E-3	3.00563E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-7.60436E-1	-7.3545E-1	-9.19466E0	-9.18887E0	4.52995E-3	9.32455E-2	2.73128E1	-3.26944E1	-3.26272E1	2.6792E1	1.1929E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09302E0	-7.59959E-1	-7.35474E-1	-9.19459E0	-9.18911E0	4.88758E-3	9.32455E-2	2.72865E1	-3.26332E1	-3.26554E1	2.68154E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.01738E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-7.60102E-1	-7.35593E-1	-9.19402E0	-9.18918E0	5.03063E-3	9.31978E-2	2.73285E1	-3.26681E1	-3.26176E1	2.67908E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02659E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-7.60221E-1	-7.35378E-1	-9.19404E0	-9.18932E0	5.05447E-3	9.32932E-2	2.72955E1	-3.26807E1	-3.26446E1	2.68322E1	1.1929E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00563E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-7.60102E-1	-7.35641E-1	-9.19404E0	-9.18918E0	5.05447E-3	9.35555E-2	2.74247E1	-3.27816E1	-3.25191E1	2.67955E1	1.1929E-7	2.51755E-3	2.51755E-3	6.32916E-3	3.00378E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-7.60341E-1	-7.35617E-1	-9.19352E0	-9.18903E0	4.93526E-3	9.31978E-2	2.73086E1	-3.26642E1	-3.26109E1	2.68268E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.60102E-1	-7.35235E-1	-9.19352E0	-9.1892E0	4.8399E-3	9.30309E-2	2.72635E1	-3.26419E1	-3.26358E1	2.68016E1	1.1929E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-7.6015E-1	-7.35116E-1	-9.19352E0	-9.18953E0	4.98295E-3	9.31501E-2	2.73243E1	-3.2647E1	-3.26314E1	2.68148E1	1.1929E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.01475E-1