[Scan]
initial_time=2015-12-22T18:12:12
final_time=2015-12-22T18:12:32
ip_count=19
run=1021
dataset=3
scan=82
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-7.59959E-1
ql1_imon=1.4877E-8
ql2_vset=
ql2_vmon=-7.35211E-1
ql2_imon=1.99589E-9
ql3_vset=
ql3_vmon=-9.19363E0
ql3_imon=3.51915E-9
ql4_vset=
ql4_vmon=-9.18932E0
ql4_imon=-1.57952E-10
mult1=-9.19607E-9
mult2=-2.608E-9
rf_tmon=-5.4466E-3
rf_agc=3.18758E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=1.61282E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66073E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20133E1
lens5a_imon=1.97118E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.04945E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53832E1
cs_ef1b_imon=2.83566E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.01984E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05126E1
cs_ea1_imon=2.50471E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42543E0
lens1_imon=2.59904E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6456E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.53389E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=2.92864E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=1.33E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11039E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.35078E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6417E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21845E0
cs_ionrep_imon=1.20404E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.93261E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.96901E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.32301E-8
tplens_vset=1.4E-1
tplens_vmon=1.63542E0
tplens_imon=-1.65963E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2612E1
iondef3_imon=1.48342E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26814E1
iondef2_imon=1.58761E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98411E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.05033E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=1.76533E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3412E1
lens5b_imon=2.18243E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74952E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51105E0
os_ea2_imon=-7.4636E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.0036E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.17011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07738E0
os_ef2alow_imon=-2.66996E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.49186E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10721E1
os_restr2_imon=3.42671E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.28739E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.24569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72838E1
iondef1_imon=1.0858E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67955E1
iondef4_imon=1.08161E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.67871E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82881E-1
olens1_imon=7.85791E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0923E0
cs_ionaccel_imon=-1.86627E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.52566E-6
window_vset=0.0E0
window_vmon=1.21837E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.38911E-4
mask2_vset=0.0E0
mask2_vmon=-1.86074E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9269E3
multa_neg_imon=7.36118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.17155E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50093E3
multb_neg_imon=7.21698E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.16434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.44096E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07377E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64079E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3082E1
cs_fil1_imon=9.96966E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62276E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64277E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.76417E-2
os_fil2_imon=-2.82214E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.48674E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37938E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.65588E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22198E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.02922E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.54487E-1
res40_imon=-2.65915E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-7.59697E-1	-7.35521E-1	-9.19368E0	-9.18911E0	5.36442E-3	9.28164E-2	2.73104E1	-3.26413E1	-3.26626E1	2.68065E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
2.0E0	4.7E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-7.59768E-1	-7.35259E-1	-9.19368E0	-9.18937E0	5.31673E-3	9.29832E-2	2.72886E1	-3.26591E1	-3.26162E1	2.68076E1	1.1929E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.02115E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-7.5984E-1	-7.35331E-1	-9.19363E0	-9.18934E0	5.34058E-3	9.28879E-2	2.73027E1	-3.26408E1	-3.26107E1	2.67818E1	1.1929E-7	2.51045E-3	2.51045E-3	6.29035E-3	3.02699E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-7.60269E-1	-7.3576E-1	-9.19392E0	-9.18911E0	5.34058E-3	9.28164E-2	2.73111E1	-3.26639E1	-3.26554E1	2.6814E1	1.1929E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.03804E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-7.59816E-1	-7.35545E-1	-9.1939E0	-9.18894E0	5.38826E-3	9.29594E-2	2.72945E1	-3.26537E1	-3.26166E1	2.6849E1	1.1929E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.03286E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-7.59864E-1	-7.35426E-1	-9.19375E0	-9.18882E0	5.07832E-3	9.31025E-2	2.72947E1	-3.26982E1	-3.26346E1	2.68124E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-7.60078E-1	-7.35331E-1	-9.19371E0	-9.1893E0	5.45979E-3	9.30309E-2	2.72886E1	-3.26655E1	-3.26172E1	2.68256E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-7.59935E-1	-7.35784E-1	-9.19392E0	-9.18927E0	5.17368E-3	9.30309E-2	2.73063E1	-3.26675E1	-3.26062E1	2.68208E1	1.1929E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-7.60055E-1	-7.35474E-1	-9.19385E0	-9.18918E0	5.29289E-3	9.32932E-2	2.73369E1	-3.26855E1	-3.26128E1	2.68388E1	1.1929E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-7.59935E-1	-7.35211E-1	-9.19375E0	-9.18896E0	5.43594E-3	9.30786E-2	2.73369E1	-3.26771E1	-3.26206E1	2.68052E1	1.1929E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.02396E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-7.59983E-1	-7.35307E-1	-9.1939E0	-9.1893E0	5.72205E-3	9.33886E-2	2.7329E1	-3.26444E1	-3.2626E1	2.68262E1	1.1929E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-7.60055E-1	-7.35426E-1	-9.19385E0	-9.18918E0	5.43594E-3	9.31978E-2	2.73315E1	-3.26939E1	-3.26813E1	2.68118E1	1.1929E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.98481E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-7.59983E-1	-7.35307E-1	-9.19373E0	-9.18918E0	5.26905E-3	9.31025E-2	2.73033E1	-3.26579E1	-3.26242E1	2.68028E1	1.1929E-7	2.51225E-3	2.51225E-3	6.29645E-3	2.99E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-7.60078E-1	-7.35354E-1	-9.19359E0	-9.18927E0	5.38826E-3	9.30309E-2	2.73265E1	-3.26731E1	-3.26321E1	2.68034E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00966E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-7.59792E-1	-7.35164E-1	-9.1933E0	-9.18932E0	5.31673E-3	9.32455E-2	2.72974E1	-3.26502E1	-3.26526E1	2.6801E1	1.1929E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.02813E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-7.60031E-1	-7.35378E-1	-9.19359E0	-9.18941E0	5.31673E-3	9.34601E-2	2.7318E1	-3.26682E1	-3.26272E1	2.67986E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.02133E-1
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-2.09611E0	-7.59959E-1	-7.35378E-1	-9.19366E0	-9.18944E0	5.22137E-3	9.30309E-2	2.72847E1	-3.26657E1	-3.26338E1	2.682E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-7.5984E-1	-7.35378E-1	-9.19347E0	-9.18925E0	5.17368E-3	9.32217E-2	2.73153E1	-3.26603E1	-3.2641E1	2.68053E1	1.1929E-7	2.52139E-3	2.52139E-3	6.33538E-3	3.0201E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-7.59768E-1	-7.35378E-1	-9.19349E0	-9.18939E0	5.53131E-3	9.35793E-2	2.73075E1	-3.26759E1	-3.26044E1	2.68226E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-7.59959E-1	-7.35211E-1	-9.19363E0	-9.18932E0	5.53131E-3	9.32932E-2	2.72838E1	-3.26814E1	-3.2612E1	2.67955E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02922E-1