[Scan]
initial_time=2015-12-22T18:13:06
final_time=2015-12-22T18:13:25
ip_count=19
run=1021
dataset=3
scan=84
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-7.58839E-1
ql1_imon=1.43569E-8
ql2_vset=
ql2_vmon=-7.35164E-1
ql2_imon=2.02925E-9
ql3_vset=
ql3_vmon=-9.1938E0
ql3_imon=1.91979E-9
ql4_vset=
ql4_vmon=-9.18937E0
ql4_imon=-1.71781E-11
mult1=-9.57941E-9
mult2=-2.74213E-9
rf_tmon=-4.88624E-3
rf_agc=3.30986E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=1.63505E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64557E0
bslens_imon=2.53618E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19984E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.537E1
cs_ef1b_imon=2.82413E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02001E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04764E1
cs_ea1_imon=2.4838E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37079E0
lens1_imon=2.48663E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03873E1
cs_ea2_imon=1.5409E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.93044E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.33524E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.28842E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1517E1
os_ea1_imon=2.34222E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.06631E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22791E0
cs_ionrep_imon=1.18767E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93271E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=2.97369E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.34149E-8
tplens_vset=1.4E-1
tplens_vmon=1.58775E0
tplens_imon=-3.44899E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2632E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26542E1
iondef2_imon=1.5947E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.98318E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.06312E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24679E0
ionrepsh_imon=1.78229E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33823E1
lens5b_imon=2.17764E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.11244E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51047E0
os_ea2_imon=-7.66089E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.0041E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07558E0
os_ef2alow_imon=-2.71321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1184E-1
os_ef2bup_imon=-5.48105E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.42707E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.31344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.2547E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73224E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68181E1
iondef4_imon=1.07584E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.69533E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=7.84979E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-1.93835E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.4714E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=1.63283E-1
window_imon=-1.10944E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.39579E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.52863E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=6.88965E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36422E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.43027E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07377E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64017E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30825E1
cs_fil1_imon=9.95482E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62864E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64463E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81271E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.44057E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.41892E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22233E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3277E-3
inlet_lpb_pmon=3.00159E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51801E-3
foreline_cvt_pmon=2.51801E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.5749E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-7.59172E-1	-7.35378E-1	-9.1938E0	-9.18922E0	5.26905E-3	9.30309E-2	2.73069E1	-3.26494E1	-3.26344E1	2.68094E1	1.1929E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00966E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-7.59387E-1	-7.35211E-1	-9.19421E0	-9.18932E0	5.38826E-3	9.34124E-2	2.72775E1	-3.27007E1	-3.26285E1	2.68082E1	1.1929E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-7.5922E-1	-7.35569E-1	-9.19373E0	-9.18946E0	5.57899E-3	9.31501E-2	2.73128E1	-3.26685E1	-3.26266E1	2.68354E1	1.1929E-7	2.52066E-3	2.52066E-3	6.28468E-3	3.0352E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09503E0	-7.58982E-1	-7.35354E-1	-9.19356E0	-9.18939E0	5.65052E-3	9.3317E-2	2.73057E1	-3.2623E1	-3.26182E1	2.67908E1	1.1929E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-7.59029E-1	-7.35402E-1	-9.19404E0	-9.18941E0	5.45979E-3	9.31978E-2	2.73086E1	-3.26555E1	-3.26366E1	2.67998E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-7.5922E-1	-7.35617E-1	-9.19428E0	-9.18939E0	5.45979E-3	9.3317E-2	2.73075E1	-3.26729E1	-3.26002E1	2.67938E1	1.1929E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-7.5891E-1	-7.35331E-1	-9.19423E0	-9.18915E0	5.38826E-3	9.32932E-2	2.73171E1	-3.26536E1	-3.26314E1	2.68094E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-7.5891E-1	-7.35307E-1	-9.19373E0	-9.18925E0	5.34058E-3	9.33647E-2	2.73045E1	-3.2641E1	-3.26368E1	2.68142E1	1.1929E-7	2.52647E-3	2.52647E-3	6.32936E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-7.59125E-1	-7.3545E-1	-9.19397E0	-9.18906E0	5.53131E-3	9.32693E-2	2.72919E1	-3.26927E1	-3.26092E1	2.68208E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.58982E-1	-7.35474E-1	-9.19421E0	-9.18939E0	5.88894E-3	9.30309E-2	2.72745E1	-3.26567E1	-3.26536E1	2.68022E1	1.1929E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.99941E-1
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-7.59292E-1	-7.35283E-1	-9.19406E0	-9.18934E0	5.50747E-3	9.31263E-2	2.73496E1	-3.26621E1	-3.2611E1	2.6816E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-7.59292E-1	-7.35092E-1	-9.1939E0	-9.18961E0	5.38826E-3	9.32455E-2	2.72871E1	-3.26518E1	-3.26518E1	2.6798E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.03449E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-7.59029E-1	-7.35068E-1	-9.19406E0	-9.18925E0	5.74589E-3	9.31978E-2	2.72903E1	-3.2672E1	-3.26042E1	2.67938E1	1.1929E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-7.58791E-1	-7.35521E-1	-9.19435E0	-9.18906E0	5.6982E-3	9.31263E-2	2.73204E1	-3.26695E1	-3.26242E1	2.6798E1	1.1929E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.9978E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-7.5922E-1	-7.3545E-1	-9.19371E0	-9.18932E0	5.53131E-3	9.34601E-2	2.73069E1	-3.26803E1	-3.26325E1	2.67937E1	1.1929E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.02277E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-7.5922E-1	-7.3545E-1	-9.19383E0	-9.18961E0	5.81741E-3	9.31025E-2	2.7272E1	-3.26542E1	-3.26303E1	2.6802E1	1.1929E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.02115E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-7.58958E-1	-7.35116E-1	-9.19371E0	-9.18939E0	5.53131E-3	9.29117E-2	2.72921E1	-3.2649E1	-3.26372E1	2.6807E1	1.1929E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.01209E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-7.58982E-1	-7.35259E-1	-9.19361E0	-9.18941E0	5.60284E-3	9.27925E-2	2.73139E1	-3.26738E1	-3.2613E1	2.68192E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-7.58672E-1	-7.35402E-1	-9.1938E0	-9.18906E0	5.45979E-3	9.3174E-2	2.73273E1	-3.26855E1	-3.26308E1	2.68088E1	1.1929E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-7.58839E-1	-7.35164E-1	-9.1938E0	-9.18937E0	5.50747E-3	9.31978E-2	2.73224E1	-3.26542E1	-3.2632E1	2.68181E1	1.1929E-7	2.51801E-3	2.51801E-3	6.3277E-3	3.00159E-1