[Scan]
initial_time=2015-12-22T18:13:32
final_time=2015-12-22T18:13:52
ip_count=19
run=1021
dataset=3
scan=85
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-7.58839E-1
ql1_imon=1.42771E-8
ql2_vset=
ql2_vmon=-7.3514E-1
ql2_imon=2.03838E-9
ql3_vset=
ql3_vmon=-9.19375E0
ql3_imon=1.52911E-9
ql4_vset=
ql4_vmon=-9.18941E0
ql4_imon=1.44601E-11
mult1=-1.01859E-8
mult2=-2.71661E-9
rf_tmon=-5.46774E-3
rf_agc=3.32855E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=1.73113E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64026E0
bslens_imon=2.77686E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1996E1
lens5a_imon=1.97589E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04842E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=2.84359E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02185E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04746E1
cs_ea1_imon=2.48663E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33717E0
lens1_imon=2.3132E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.96288E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03667E1
cs_ea2_imon=1.54019E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=2.93441E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.32952E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.28734E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=2.35461E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24915E0
cs_ionrep_imon=1.19368E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93197E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=2.96288E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.33531E-8
tplens_vset=1.4E-1
tplens_vmon=1.5848E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26362E1
iondef3_imon=1.48002E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.58514E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98162E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.09111E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27392E0
ionrepsh_imon=1.7922E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34076E1
lens5b_imon=2.18897E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7485E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50045E0
os_ea2_imon=-6.24513E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06141E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.68798E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.4378E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.42022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.29999E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.2547E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73279E1
iondef1_imon=1.08856E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67845E1
iondef4_imon=1.08737E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.76676E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.85039E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.93115E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47129E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56081E1
einzel_imon=7.50404E-6
window_vset=0.0E0
window_vmon=1.52471E-1
window_imon=-1.18152E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39023E-4
mask2_vset=0.0E0
mask2_vmon=-1.86002E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=6.83656E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.93566E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50073E3
multb_neg_imon=8.30895E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29335E0
defgridb_imon=5.97648E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.43033E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06362E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64335E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30772E1
cs_fil1_imon=9.95218E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62276E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64115E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.83804E-2
os_fil2_imon=-2.87019E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.53802E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.58188E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62024E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22198E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.88434E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-7.59029E-1	-7.3514E-1	-9.19394E0	-9.1893E0	5.10216E-3	9.29117E-2	2.72811E1	-3.26152E1	-3.26338E1	2.6801E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-7.5891E-1	-7.35021E-1	-9.19394E0	-9.18944E0	5.74589E-3	9.29832E-2	2.72696E1	-3.26768E1	-3.2664E1	2.68124E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-7.58743E-1	-7.35235E-1	-9.19361E0	-9.18896E0	5.53131E-3	9.30071E-2	2.73145E1	-3.26537E1	-3.26207E1	2.68184E1	1.1929E-7	2.51025E-3	2.51025E-3	6.32418E-3	3.00942E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-7.5891E-1	-7.3545E-1	-9.19404E0	-9.18913E0	5.55515E-3	9.31263E-2	2.73159E1	-3.2644E1	-3.26032E1	2.68172E1	1.1929E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-7.58862E-1	-7.35235E-1	-9.19402E0	-9.18939E0	4.95911E-3	9.27448E-2	2.73291E1	-3.26398E1	-3.26104E1	2.68124E1	1.1929E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-7.58529E-1	-7.34949E-1	-9.19402E0	-9.18939E0	5.48363E-3	9.28164E-2	2.72979E1	-3.26338E1	-3.26008E1	2.68184E1	1.1929E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-7.58481E-1	-7.35331E-1	-9.1939E0	-9.18903E0	5.43594E-3	9.29117E-2	2.72877E1	-3.2641E1	-3.26392E1	2.6783E1	1.1929E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.0041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-7.58576E-1	-7.35545E-1	-9.19378E0	-9.18899E0	5.29289E-3	9.28402E-2	2.72943E1	-3.2653E1	-3.26669E1	2.6819E1	1.19238E-7	2.51116E-3	2.51116E-3	6.31837E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-7.58934E-1	-7.35712E-1	-9.19385E0	-9.1892E0	5.26905E-3	9.27687E-2	2.72871E1	-3.2644E1	-3.26272E1	2.68004E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.02511E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-7.59149E-1	-7.35331E-1	-9.19378E0	-9.18932E0	5.31673E-3	9.28402E-2	2.73246E1	-3.26974E1	-3.26172E1	2.67848E1	1.1929E-7	2.51225E-3	2.51225E-3	6.34037E-3	3.03449E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-7.59006E-1	-7.3514E-1	-9.19387E0	-9.18956E0	5.81741E-3	9.28164E-2	2.73231E1	-3.26549E1	-3.25876E1	2.678E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-7.59006E-1	-7.35164E-1	-9.19373E0	-9.18922E0	5.8651E-3	9.29356E-2	2.73087E1	-3.26206E1	-3.2611E1	2.68053E1	1.1929E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.02769E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-7.58982E-1	-7.35116E-1	-9.19402E0	-9.1892E0	5.67436E-3	9.27925E-2	2.73081E1	-3.26585E1	-3.26524E1	2.67857E1	1.1929E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02659E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-7.59029E-1	-7.35211E-1	-9.19404E0	-9.18913E0	5.31673E-3	9.2721E-2	2.73163E1	-3.26708E1	-3.2636E1	2.68175E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-7.58743E-1	-7.35021E-1	-9.19404E0	-9.1892E0	5.38826E-3	9.2721E-2	2.73075E1	-3.26717E1	-3.26134E1	2.67998E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-7.58815E-1	-7.35116E-1	-9.19399E0	-9.18911E0	5.03063E-3	9.27448E-2	2.73183E1	-3.26867E1	-3.26368E1	2.68106E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.99E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-7.58481E-1	-7.35235E-1	-9.19378E0	-9.18915E0	5.10216E-3	9.30071E-2	2.73201E1	-3.2653E1	-3.26639E1	2.67878E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-7.58696E-1	-7.35259E-1	-9.19421E0	-9.18927E0	5.17368E-3	9.29832E-2	2.72673E1	-3.2636E1	-3.26354E1	2.68202E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.01738E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-7.58862E-1	-7.35164E-1	-9.19378E0	-9.18913E0	5.45979E-3	9.28164E-2	2.72702E1	-3.26374E1	-3.26308E1	2.6783E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-7.58839E-1	-7.3514E-1	-9.19375E0	-9.18941E0	5.50747E-3	9.3174E-2	2.73279E1	-3.26615E1	-3.26362E1	2.67845E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00041E-1