[Scan]
initial_time=2015-12-22T18:13:59
final_time=2015-12-22T18:14:18
ip_count=19
run=1021
dataset=3
scan=86
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-7.58386E-1
ql1_imon=1.41984E-8
ql2_vset=
ql2_vmon=-7.35164E-1
ql2_imon=2.04855E-9
ql3_vset=
ql3_vmon=-9.19418E0
ql3_imon=1.30661E-9
ql4_vset=
ql4_vmon=-9.18953E0
ql4_imon=4.66228E-11
mult1=-9.87537E-9
mult2=-2.63183E-9
rf_tmon=-5.87567E-3
rf_agc=3.27618E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=1.69901E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61387E0
bslens_imon=2.41879E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19881E1
lens5a_imon=1.98055E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=2.84142E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02078E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05144E1
cs_ea1_imon=2.50182E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38578E0
lens1_imon=2.37192E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.96468E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.52092E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=2.92792E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.33381E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.29058E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15083E1
os_ea1_imon=2.35654E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07136E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23047E0
cs_ionrep_imon=1.20765E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93276E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.97621E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.33098E-8
tplens_vset=1.4E-1
tplens_vmon=1.56032E0
tplens_imon=-4.18309E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26294E1
iondef3_imon=1.5101E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26596E1
iondef2_imon=1.56021E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98331E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.05397E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27974E0
ionrepsh_imon=1.78228E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33381E1
lens5b_imon=2.17341E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.10632E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49483E0
os_ea2_imon=-8.36484E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.17587E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05396E0
os_ef2alow_imon=-2.66996E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.53872E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.42671E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.30433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02067E1
cs_anode2_imon=2.24929E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73148E1
iondef1_imon=1.07282E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67955E1
iondef4_imon=1.07692E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.67303E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.82852E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-2.01404E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02046E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56513E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=1.80102E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.859E1
mask2_imon=-8.78788E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.72167E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93751E3
defgrida_imon=6.33737E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.39002E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.14291E0
defgridb_imon=6.18597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33351E1
os_fil1_imon=9.4051E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06566E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64105E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30807E1
cs_fil1_imon=9.94473E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62708E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63972E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.84155E-2
os_fil2_imon=-2.90023E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76691E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.27148E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.578E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22159E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.70104E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-7.58696E-1	-7.3545E-1	-9.19416E0	-9.18906E0	5.38826E-3	9.3317E-2	2.73109E1	-3.26648E1	-3.26654E1	2.68262E1					
2.0E0	4.8E1	0.0E0	3.16E2	1.6E2	-2.09356E0	-7.5891E-1	-7.35474E-1	-9.19411E0	-9.18951E0	5.19753E-3	9.31025E-2	2.73132E1	-3.26541E1	-3.26503E1	2.68469E1	1.1929E-7	2.51814E-3	2.51814E-3	6.31798E-3	2.99845E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-7.58648E-1	-7.35259E-1	-9.19437E0	-9.18949E0	5.36442E-3	9.33409E-2	2.73234E1	-3.2675E1	-3.26449E1	2.67968E1	1.1929E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.99879E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-7.5891E-1	-7.35235E-1	-9.19421E0	-9.1893E0	5.126E-3	9.31263E-2	2.73153E1	-3.26675E1	-3.26182E1	2.68279E1	1.1929E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-7.58719E-1	-7.35378E-1	-9.19428E0	-9.18908E0	5.48363E-3	9.31978E-2	2.72831E1	-3.26714E1	-3.26255E1	2.68254E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-7.58767E-1	-7.34973E-1	-9.19428E0	-9.18911E0	5.38826E-3	9.33409E-2	2.72689E1	-3.26305E1	-3.26275E1	2.68215E1	1.1929E-7	2.51682E-3	2.51682E-3	6.34916E-3	3.00726E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-7.58624E-1	-7.35354E-1	-9.19428E0	-9.18906E0	5.38826E-3	9.31978E-2	2.72895E1	-3.26515E1	-3.2586E1	2.68004E1	1.19353E-7	2.51364E-3	2.51364E-3	6.30068E-3	2.9841E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09348E0	-7.58553E-1	-7.3545E-1	-9.19402E0	-9.18932E0	5.24521E-3	9.30786E-2	2.72751E1	-3.26376E1	-3.26193E1	2.68082E1	1.1929E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.9892E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09325E0	-7.58481E-1	-7.35521E-1	-9.19373E0	-9.18939E0	5.36442E-3	9.31263E-2	2.72979E1	-3.2629E1	-3.26218E1	2.68178E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-7.58767E-1	-7.35068E-1	-9.19406E0	-9.18915E0	5.48363E-3	9.3317E-2	2.73159E1	-3.26308E1	-3.2632E1	2.67968E1	1.1929E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.02133E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-7.5891E-1	-7.35235E-1	-9.19394E0	-9.18913E0	5.60284E-3	9.3174E-2	2.72865E1	-3.2638E1	-3.27119E1	2.6822E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-7.58696E-1	-7.35164E-1	-9.19399E0	-9.18925E0	5.67436E-3	9.30548E-2	2.72964E1	-3.26411E1	-3.26057E1	2.68047E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-7.58839E-1	-7.35331E-1	-9.19378E0	-9.18951E0	5.57899E-3	9.30786E-2	2.73222E1	-3.26682E1	-3.26327E1	2.68107E1	1.1929E-7	2.52599E-3	2.52599E-3	6.31278E-3	2.99686E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09302E0	-7.58648E-1	-7.35521E-1	-9.19402E0	-9.18908E0	5.55515E-3	9.31025E-2	2.72378E1	-3.26699E1	-3.2653E1	2.68233E1	1.19343E-7	2.51359E-3	2.51359E-3	6.32978E-3	2.99879E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-7.58815E-1	-7.35474E-1	-9.19421E0	-9.1893E0	5.45979E-3	9.3317E-2	2.72516E1	-3.26741E1	-3.262E1	2.67944E1	1.1929E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-7.58696E-1	-7.35497E-1	-9.19406E0	-9.18899E0	5.55515E-3	9.32455E-2	2.72775E1	-3.26392E1	-3.26567E1	2.68088E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-7.586E-1	-7.35116E-1	-9.19425E0	-9.18908E0	5.36442E-3	9.3174E-2	2.72768E1	-3.26744E1	-3.26236E1	2.68004E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-7.58672E-1	-7.35307E-1	-9.19418E0	-9.18941E0	5.55515E-3	9.35316E-2	2.73285E1	-3.26969E1	-3.26633E1	2.67848E1	1.1929E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-7.586E-1	-7.35426E-1	-9.1939E0	-9.1892E0	5.57899E-3	9.30071E-2	2.73033E1	-3.26524E1	-3.26428E1	2.68124E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-7.58386E-1	-7.35164E-1	-9.19418E0	-9.18953E0	5.60284E-3	9.32217E-2	2.73148E1	-3.26596E1	-3.26294E1	2.67955E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00041E-1