[Scan]
initial_time=2015-12-22T18:14:52
final_time=2015-12-22T18:15:11
ip_count=19
run=1021
dataset=3
scan=88
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0934E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-7.58386E-1
ql1_imon=1.4097E-8
ql2_vset=
ql2_vmon=-7.35188E-1
ql2_imon=2.07751E-9
ql3_vset=
ql3_vmon=-9.19442E0
ql3_imon=9.73916E-10
ql4_vset=
ql4_vmon=-9.18906E0
ql4_imon=6.35624E-11
mult1=-9.68851E-9
mult2=-2.79381E-9
rf_tmon=-4.64515E-3
rf_agc=3.38518E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=1.69126E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65324E0
bslens_imon=2.49371E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=2.84503E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02178E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.50645E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36666E0
lens1_imon=2.56803E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64476E1
os_ef1alow_imon=2.96144E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04233E1
cs_ea2_imon=1.55152E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=2.93188E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=1.33075E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.29526E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15382E1
os_ea1_imon=2.35072E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24148E0
cs_ionrep_imon=1.18271E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93201E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=2.97225E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.34201E-8
tplens_vset=1.4E-1
tplens_vmon=1.57005E0
tplens_imon=-3.4136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26337E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26402E1
iondef2_imon=1.58337E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98218E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=4.1122E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25682E0
ionrepsh_imon=1.77344E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33687E1
lens5b_imon=2.18826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74393E1
cs_ef2b_imon=3.11677E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49219E0
os_ea2_imon=-7.94404E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00407E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04134E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90216E-1
os_ef2bup_imon=-5.4342E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.42383E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.31273E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.25362E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72774E1
iondef1_imon=1.07087E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.08161E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.69705E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=7.82859E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47093E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=1.52471E-1
window_imon=-1.17071E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86284E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.46658E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.26318E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50169E3
multb_neg_imon=7.08078E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31697E0
defgridb_imon=6.31273E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33316E1
os_fil1_imon=9.42024E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06741E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6447E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30785E1
cs_fil1_imon=9.96137E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62912E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64821E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.58478E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79094E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.17608E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14222E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22252E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98936E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-7.58243E-1	-7.35593E-1	-9.19397E0	-9.18911E0	5.29289E-3	9.34362E-2	2.73193E1	-3.26679E1	-3.26042E1	2.68118E1	1.1929E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.02396E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-7.58219E-1	-7.35688E-1	-9.19428E0	-9.18925E0	5.55515E-3	9.30786E-2	2.73088E1	-3.26803E1	-3.26092E1	2.68172E1	1.1929E-7	2.51287E-3	2.51287E-3	6.31798E-3	3.006E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-7.58481E-1	-7.35641E-1	-9.19385E0	-9.18932E0	5.26905E-3	9.28402E-2	2.72889E1	-3.26764E1	-3.26121E1	2.68016E1	1.1929E-7	2.52293E-3	2.52293E-3	6.30171E-3	2.9917E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-7.58195E-1	-7.35879E-1	-9.19411E0	-9.18932E0	5.38826E-3	9.30786E-2	2.73189E1	-3.26855E1	-3.26326E1	2.68389E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-7.58362E-1	-7.35474E-1	-9.19394E0	-9.18932E0	5.43594E-3	9.32217E-2	2.7275E1	-3.26434E1	-3.26196E1	2.68064E1	1.1929E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.98156E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-7.58314E-1	-7.35426E-1	-9.19411E0	-9.18932E0	5.48363E-3	9.29356E-2	2.72745E1	-3.26194E1	-3.26699E1	2.67964E1	1.1929E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.98842E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-7.5798E-1	-7.35426E-1	-9.19366E0	-9.18944E0	5.36442E-3	9.31025E-2	2.73207E1	-3.26693E1	-3.26272E1	2.68202E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-7.58266E-1	-7.35426E-1	-9.19402E0	-9.18953E0	5.07832E-3	9.33647E-2	2.72856E1	-3.26431E1	-3.26183E1	2.68034E1	1.1929E-7	2.51484E-3	2.51484E-3	6.29926E-3	3.01674E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-7.58457E-1	-7.35641E-1	-9.19423E0	-9.18925E0	5.17368E-3	9.3174E-2	2.73177E1	-3.26693E1	-3.26326E1	2.67698E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-7.58123E-1	-7.35545E-1	-9.19409E0	-9.18918E0	5.07832E-3	9.32455E-2	2.72955E1	-3.26699E1	-3.26356E1	2.68256E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-7.58362E-1	-7.35426E-1	-9.1939E0	-9.18937E0	5.43594E-3	9.3627E-2	2.73057E1	-3.26663E1	-3.26747E1	2.68028E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-7.58171E-1	-7.35736E-1	-9.19402E0	-9.18908E0	5.45979E-3	9.3317E-2	2.73163E1	-3.26891E1	-3.26254E1	2.68268E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-7.581E-1	-7.35569E-1	-9.19406E0	-9.18939E0	5.24521E-3	9.34124E-2	2.73388E1	-3.26511E1	-3.26658E1	2.681E1	1.1929E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-7.58243E-1	-7.35497E-1	-9.19387E0	-9.18956E0	5.29289E-3	9.31978E-2	2.73104E1	-3.26891E1	-3.26242E1	2.68142E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9978E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-7.58529E-1	-7.35497E-1	-9.19404E0	-9.18939E0	5.17368E-3	9.32217E-2	2.72793E1	-3.26651E1	-3.262E1	2.6804E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-7.58481E-1	-7.35712E-1	-9.19425E0	-9.18899E0	5.14984E-3	9.34362E-2	2.72937E1	-3.26841E1	-3.2671E1	2.68071E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.03185E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-7.58576E-1	-7.35235E-1	-9.1939E0	-9.18901E0	4.88758E-3	9.3627E-2	2.73181E1	-3.26481E1	-3.26202E1	2.68127E1	1.1929E-7	2.52093E-3	2.52093E-3	6.30221E-3	3.00247E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-7.58505E-1	-7.35497E-1	-9.19418E0	-9.1892E0	5.29289E-3	9.33409E-2	2.73163E1	-3.2672E1	-3.26065E1	2.6786E1	1.1929E-7	2.5118E-3	2.5118E-3	6.33065E-3	3.00363E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0934E0	-7.5841E-1	-7.35354E-1	-9.19454E0	-9.18946E0	5.17368E-3	9.32455E-2	2.72745E1	-3.26609E1	-3.26795E1	2.67937E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0934E0	-7.58386E-1	-7.35188E-1	-9.19442E0	-9.18906E0	5.76973E-3	9.35316E-2	2.72774E1	-3.26402E1	-3.26337E1	2.68022E1	1.1929E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01347E-1