[Scan]
initial_time=2015-12-22T18:16:12
final_time=2015-12-22T18:16:31
ip_count=19
run=1021
dataset=3
scan=91
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08714E-4
ql1_vset=
ql1_vmon=-7.58004E-1
ql1_imon=1.40126E-8
ql2_vset=
ql2_vmon=-7.34997E-1
ql2_imon=2.0314E-9
ql3_vset=
ql3_vmon=-9.19414E0
ql3_imon=6.91593E-10
ql4_vset=
ql4_vmon=-9.18925E0
ql4_imon=9.40442E-11
mult1=-8.80122E-9
mult2=-2.74456E-9
rf_tmon=-5.41366E-3
rf_agc=3.22581E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=1.73483E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6421E0
bslens_imon=2.41879E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20127E1
lens5a_imon=1.99929E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1253E2
lens4a_imon=2.04812E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=2.84503E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05174E1
cs_ea1_imon=2.4838E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37737E0
lens1_imon=2.58462E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.52957E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=2.929E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.32609E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=4.29526E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=2.36015E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63912E1
os_ef1bup_imon=3.10235E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=1.20837E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.95495E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.33377E-8
tplens_vset=1.4E-1
tplens_vmon=1.55912E0
tplens_imon=-4.36334E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26062E1
iondef3_imon=1.49172E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26699E1
iondef2_imon=1.58112E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98065E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.13705E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29115E0
ionrepsh_imon=1.78047E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33916E1
lens5b_imon=2.18062E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.1128E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51045E0
os_ea2_imon=-6.74261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04031E-1
os_ef2bup_imon=-5.4342E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10535E1
os_restr2_imon=3.41626E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.30974E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.23416E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.09878E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68477E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.74125E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.83755E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16618E0
cs_ionaccel_imon=-2.03206E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.53287E-6
window_vset=0.0E0
window_vmon=1.54273E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.38875E-4
mask2_vset=0.0E0
mask2_vmon=-1.85467E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.43688E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.36261E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=6.97185E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42562E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33312E1
os_fil1_imon=9.42402E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06999E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64184E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30758E1
cs_fil1_imon=9.96396E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62059E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64544E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67389E-2
os_fil2_imon=-2.85217E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7549E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.40425E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38586E-1
cs_fil2_imon=-3.02636E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.87833E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22035E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.02659E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.62606E-1
res40_imon=-2.66996E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=146
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-7.58338E-1	-7.35164E-1	-9.19435E0	-9.1892E0	4.95911E-3	9.32217E-2	2.73196E1	-3.26909E1	-3.26173E1	2.68094E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.02659E-1
2.0E0	5.0E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-7.58624E-1	-7.35331E-1	-9.19416E0	-9.18934E0	5.34058E-3	9.32217E-2	2.73032E1	-3.26897E1	-3.26572E1	2.68213E1	1.1929E-7	2.52025E-3	2.52025E-3	6.32328E-3	2.99845E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-7.58123E-1	-7.35259E-1	-9.19435E0	-9.18927E0	5.60284E-3	9.31263E-2	2.72964E1	-3.2637E1	-3.26301E1	2.68186E1	1.1929E-7	2.51359E-3	2.51359E-3	6.33538E-3	3.01475E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-7.57909E-1	-7.3545E-1	-9.19428E0	-9.18934E0	5.19753E-3	9.34124E-2	2.73057E1	-3.26296E1	-3.26012E1	2.67746E1	1.1929E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-7.58266E-1	-7.35331E-1	-9.19394E0	-9.18939E0	5.14984E-3	9.32217E-2	2.73063E1	-3.26458E1	-3.26236E1	2.67836E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-7.58386E-1	-7.35426E-1	-9.19366E0	-9.18946E0	5.17368E-3	9.32217E-2	2.73063E1	-3.26508E1	-3.26136E1	2.6825E1	1.1929E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-7.58195E-1	-7.35164E-1	-9.19392E0	-9.18934E0	5.43594E-3	9.28164E-2	2.72931E1	-3.26645E1	-3.26242E1	2.68118E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.03286E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-7.57933E-1	-7.35068E-1	-9.19404E0	-9.18953E0	5.126E-3	9.31978E-2	2.73112E1	-3.26689E1	-3.26095E1	2.68106E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-7.57909E-1	-7.3545E-1	-9.19414E0	-9.18951E0	5.26905E-3	9.3174E-2	2.72874E1	-3.26354E1	-3.26384E1	2.68364E1	1.1929E-7	2.5225E-3	2.5225E-3	6.32418E-3	3.00676E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-7.58028E-1	-7.35211E-1	-9.19452E0	-9.18939E0	5.45979E-3	9.34124E-2	2.73399E1	-3.26903E1	-3.26482E1	2.68022E1	1.1929E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.98156E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-7.58052E-1	-7.35211E-1	-9.19437E0	-9.18949E0	5.53131E-3	9.35316E-2	2.73075E1	-3.26621E1	-3.26338E1	2.67938E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01871E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09356E0	-7.5798E-1	-7.35283E-1	-9.19425E0	-9.18906E0	5.07832E-3	9.32932E-2	2.73075E1	-3.26741E1	-3.26512E1	2.67908E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.03185E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-7.57623E-1	-7.35378E-1	-9.19409E0	-9.18913E0	5.07832E-3	9.33647E-2	2.7301E1	-3.26927E1	-3.26172E1	2.68059E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01871E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-7.57694E-1	-7.35545E-1	-9.19406E0	-9.18941E0	5.29289E-3	9.32932E-2	2.73249E1	-3.26777E1	-3.26621E1	2.67998E1	1.1929E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.03027E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-7.57837E-1	-7.35044E-1	-9.19368E0	-9.18913E0	5.22137E-3	9.33647E-2	2.73302E1	-3.26811E1	-3.26658E1	2.67982E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-7.5798E-1	-7.34973E-1	-9.19363E0	-9.18915E0	5.19753E-3	9.33647E-2	2.72968E1	-3.26938E1	-3.26178E1	2.68163E1	1.1929E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9978E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-7.57957E-1	-7.35378E-1	-9.19366E0	-9.18896E0	5.07832E-3	9.30548E-2	2.72845E1	-3.26508E1	-3.25936E1	2.68136E1	1.1929E-7	2.51116E-3	2.51116E-3	6.33486E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-7.57813E-1	-7.35211E-1	-9.19394E0	-9.18908E0	4.8399E-3	9.30548E-2	2.72379E1	-3.26437E1	-3.26708E1	2.6817E1	1.1929E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-7.58028E-1	-7.35188E-1	-9.19416E0	-9.18911E0	4.88758E-3	9.31025E-2	2.73117E1	-3.2653E1	-3.25587E1	2.67978E1	1.1929E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-7.58004E-1	-7.34997E-1	-9.19414E0	-9.18925E0	5.10216E-3	9.34124E-2	2.73225E1	-3.26699E1	-3.26062E1	2.68477E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.02659E-1