[Scan]
initial_time=2015-12-22T18:16:39
final_time=2015-12-22T18:16:58
ip_count=19
run=1021
dataset=3
scan=92
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08767E-4
ql1_vset=
ql1_vmon=-7.58004E-1
ql1_imon=1.40402E-8
ql2_vset=
ql2_vmon=-7.35044E-1
ql2_imon=2.03799E-9
ql3_vset=
ql3_vmon=-9.19423E0
ql3_imon=6.59227E-10
ql4_vset=
ql4_vmon=-9.18918E0
ql4_imon=9.26971E-11
mult1=-8.70731E-9
mult2=-2.6919E-9
rf_tmon=-4.31481E-3
rf_agc=3.31852E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.68872E-9
bslens_vset=-6.2E0
bslens_vmon=-6.635E0
bslens_imon=2.36085E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1988E1
lens5a_imon=1.98462E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05128E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54177E1
cs_ef1b_imon=2.84768E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02145E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04826E1
cs_ea1_imon=2.51474E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38646E0
lens1_imon=2.54857E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64603E1
os_ef1alow_imon=2.93769E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03899E1
cs_ea2_imon=1.54522E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84325E1
cs_ef1a_imon=2.94221E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.31924E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11818E1
os_restr1_imon=4.30868E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15317E1
os_ea1_imon=2.359E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.06176E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24862E0
cs_ionrep_imon=1.21116E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93392E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0178E1
cs_anode1_imon=2.95368E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.32438E-8
tplens_vset=1.4E-1
tplens_vmon=1.58697E0
tplens_imon=-4.34017E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.48891E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.55357E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98207E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.05223E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23298E0
ionrepsh_imon=1.75901E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33779E1
lens5b_imon=2.15113E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74721E1
cs_ef2b_imon=3.14203E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49138E0
os_ea2_imon=-6.56494E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00515E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71773E1
cs_ef2a_imon=3.18096E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03487E0
os_ef2alow_imon=-2.82133E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.60944E-1
os_ef2bup_imon=-5.38606E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.42492E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23112E2
cs_ionfoca_imon=6.28225E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02018E1
cs_anode2_imon=2.23117E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.08532E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67984E1
iondef4_imon=1.09407E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.72097E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.83273E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10697E0
cs_ionaccel_imon=-2.17493E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02018E2
cs_ionfocb_imon=1.47202E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57048E1
einzel_imon=7.87898E-6
window_vset=0.0E0
window_vmon=1.6324E-1
window_imon=-1.27136E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.38949E-4
mask2_vset=0.0E0
mask2_vmon=-1.86176E1
mask2_imon=-4.96381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.01549E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.29592E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.02592E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2644E0
defgridb_imon=5.73625E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3333E1
os_fil1_imon=9.4421E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07289E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64319E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30748E1
cs_fil1_imon=9.962E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61567E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64271E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.69784E-2
os_fil2_imon=-2.97037E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.62854E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.22701E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36893E-1
cs_fil2_imon=-2.27532E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.83706E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22129E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.97963E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.6827E-1
res40_imon=-2.59196E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-7.57837E-1	-7.35211E-1	-9.19385E0	-9.18927E0	5.4121E-3	9.36508E-2	2.73123E1	-3.26645E1	-3.26308E1	2.68364E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99941E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-7.57718E-1	-7.35497E-1	-9.19392E0	-9.18934E0	5.10216E-3	9.32217E-2	2.72666E1	-3.26711E1	-3.26458E1	2.67914E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-7.57837E-1	-7.35688E-1	-9.19375E0	-9.18946E0	5.10216E-3	9.30309E-2	2.72868E1	-3.26472E1	-3.26384E1	2.68128E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9978E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0934E0	-7.58219E-1	-7.35545E-1	-9.19383E0	-9.18925E0	5.05447E-3	9.27448E-2	2.73139E1	-3.2675E1	-3.26083E1	2.68046E1	1.1929E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-7.58076E-1	-7.35378E-1	-9.19402E0	-9.18932E0	5.17368E-3	9.29832E-2	2.72906E1	-3.26335E1	-3.26347E1	2.6803E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.03286E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09356E0	-7.57694E-1	-7.35402E-1	-9.19411E0	-9.18906E0	5.38826E-3	9.33886E-2	2.72968E1	-3.26868E1	-3.26343E1	2.68076E1	1.1929E-7	2.51603E-3	2.51603E-3	6.32858E-3	2.99594E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-7.57527E-1	-7.35188E-1	-9.19411E0	-9.1893E0	5.29289E-3	9.34124E-2	2.73273E1	-3.26314E1	-3.26308E1	2.68058E1	1.1929E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.98665E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-7.57408E-1	-7.35378E-1	-9.19418E0	-9.18925E0	5.57899E-3	9.30786E-2	2.73075E1	-3.26723E1	-3.26164E1	2.67734E1	1.1929E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-7.57766E-1	-7.34925E-1	-9.19433E0	-9.1892E0	5.45979E-3	9.31263E-2	2.73021E1	-3.26549E1	-3.26002E1	2.68466E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-7.57694E-1	-7.35426E-1	-9.19425E0	-9.18937E0	5.29289E-3	9.32693E-2	2.73099E1	-3.26561E1	-3.2653E1	2.6777E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.02396E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-7.57551E-1	-7.35521E-1	-9.19421E0	-9.18956E0	5.34058E-3	9.34124E-2	2.72997E1	-3.26591E1	-3.26765E1	2.6792E1	1.1929E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-7.57718E-1	-7.35259E-1	-9.19435E0	-9.18911E0	5.24521E-3	9.3174E-2	2.73039E1	-3.26437E1	-3.26419E1	2.68244E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-7.57623E-1	-7.35116E-1	-9.19418E0	-9.18951E0	5.07832E-3	9.32217E-2	2.72931E1	-3.26717E1	-3.26104E1	2.6795E1	1.19341E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.99941E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-7.57742E-1	-7.35021E-1	-9.19409E0	-9.18951E0	5.00679E-3	9.32932E-2	2.72979E1	-3.26482E1	-3.26164E1	2.67962E1	1.1929E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.9952E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-7.5798E-1	-7.34925E-1	-9.19416E0	-9.18956E0	5.26905E-3	9.29356E-2	2.73299E1	-3.26667E1	-3.26644E1	2.67884E1	1.1929E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-7.581E-1	-7.35569E-1	-9.1939E0	-9.18922E0	5.07832E-3	9.33409E-2	2.73027E1	-3.26817E1	-3.2634E1	2.6798E1	1.1929E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.9943E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-7.58052E-1	-7.35402E-1	-9.19383E0	-9.18939E0	5.29289E-3	9.34362E-2	2.72997E1	-3.26807E1	-3.26494E1	2.68208E1	1.1929E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.00942E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-7.57885E-1	-7.35307E-1	-9.19416E0	-9.18963E0	5.29289E-3	9.37223E-2	2.72797E1	-3.26467E1	-3.2593E1	2.67944E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.03449E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-7.581E-1	-7.35497E-1	-9.19402E0	-9.18918E0	4.8399E-3	9.33647E-2	2.73237E1	-3.26873E1	-3.26092E1	2.68052E1	1.1929E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.01738E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-7.58004E-1	-7.35044E-1	-9.19423E0	-9.18918E0	5.17368E-3	9.31978E-2	2.73033E1	-3.26573E1	-3.26248E1	2.67984E1	1.1929E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.97963E-1