[Scan]
initial_time=2015-12-22T18:17:05
final_time=2015-12-22T18:17:25
ip_count=19
run=1021
dataset=3
scan=93
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09379E0
qbias_imon=-1.08729E-4
ql1_vset=
ql1_vmon=-7.57766E-1
ql1_imon=1.40209E-8
ql2_vset=
ql2_vmon=-7.35617E-1
ql2_imon=2.04717E-9
ql3_vset=
ql3_vmon=-9.19447E0
ql3_imon=6.41286E-10
ql4_vset=
ql4_vmon=-9.1892E0
ql4_imon=7.42912E-11
mult1=-9.74297E-9
mult2=-2.67962E-9
rf_tmon=-3.99679E-3
rf_agc=3.35288E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.71081E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62964E0
bslens_imon=2.44062E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20621E1
lens5a_imon=1.97023E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04789E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54253E1
cs_ef1b_imon=2.82593E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04375E1
cs_ea1_imon=2.48168E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39911E0
lens1_imon=2.72731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64308E1
os_ef1alow_imon=2.95927E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03525E1
cs_ea2_imon=1.52674E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84496E1
cs_ef1a_imon=2.94306E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.32093E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11676E1
os_restr1_imon=4.30067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15689E1
os_ea1_imon=2.36027E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.04865E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2403E0
cs_ionrep_imon=1.17917E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01599E1
cs_anode1_imon=2.9636E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.31521E-8
tplens_vset=1.4E-1
tplens_vmon=1.5441E0
tplens_imon=-4.75858E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26115E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.55187E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.10049E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28572E0
ionrepsh_imon=1.75433E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33581E1
lens5b_imon=2.20596E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49455E0
os_ea2_imon=-9.57217E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00552E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.17335E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04435E0
os_ef2alow_imon=-2.81051E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.27457E-1
os_ef2bup_imon=-5.41258E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11256E1
os_restr2_imon=3.42455E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.28937E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02344E1
cs_anode2_imon=2.2356E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73457E1
iondef1_imon=1.11617E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68661E1
iondef4_imon=1.07512E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.74723E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=7.7939E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.06887E0
cs_ionaccel_imon=-2.15099E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02028E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=1.41659E-1
window_imon=-1.28604E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8257E2
mask1_imon=2.38958E-4
mask2_vset=0.0E0
mask2_vmon=-1.8662E1
mask2_imon=-3.41797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.17988E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.3375E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.09494E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.17469E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=9.43639E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06951E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64049E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30745E1
cs_fil1_imon=9.96594E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61825E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63871E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98999E-2
os_fil2_imon=-2.82214E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.65879E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.54561E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.11937E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10018E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22046E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-1.64077E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-7.57647E-1	-7.35307E-1	-9.19404E0	-9.18961E0	4.95911E-3	9.32932E-2	2.73086E1	-3.26484E1	-3.26172E1	2.67821E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.99E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-7.57599E-1	-7.35402E-1	-9.19433E0	-9.18927E0	4.93526E-3	9.3174E-2	2.72861E1	-3.26493E1	-3.26432E1	2.67914E1	1.1929E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-7.57527E-1	-7.3545E-1	-9.19423E0	-9.1892E0	5.17368E-3	9.33647E-2	2.73074E1	-3.26306E1	-3.26179E1	2.68047E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.0201E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-7.57527E-1	-7.34997E-1	-9.19456E0	-9.18918E0	5.24521E-3	9.34362E-2	2.72823E1	-3.26843E1	-3.26374E1	2.67992E1	1.1929E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.03383E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-7.57861E-1	-7.35235E-1	-9.19442E0	-9.18901E0	5.34058E-3	9.35316E-2	2.73106E1	-3.26536E1	-3.26787E1	2.67914E1	1.1929E-7	2.51935E-3	2.51935E-3	6.31837E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-7.57599E-1	-7.35378E-1	-9.19428E0	-9.18906E0	5.57899E-3	9.32455E-2	2.73228E1	-3.26815E1	-3.26048E1	2.67866E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-7.57766E-1	-7.35474E-1	-9.19399E0	-9.18865E0	5.65052E-3	9.31025E-2	2.7266E1	-3.26861E1	-3.26092E1	2.67956E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-7.5767E-1	-7.35354E-1	-9.19437E0	-9.18922E0	5.05447E-3	9.32455E-2	2.72756E1	-3.26897E1	-3.25588E1	2.6828E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-7.57813E-1	-7.35664E-1	-9.19423E0	-9.18911E0	5.36442E-3	9.31263E-2	2.72721E1	-3.2647E1	-3.26176E1	2.68007E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01995E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-7.57575E-1	-7.35545E-1	-9.19385E0	-9.18903E0	5.00679E-3	9.32693E-2	2.73004E1	-3.26809E1	-3.26413E1	2.6801E1	1.1929E-7	2.52647E-3	2.52647E-3	6.34588E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-7.57837E-1	-7.35688E-1	-9.19399E0	-9.1892E0	4.88758E-3	9.32932E-2	2.72895E1	-3.25894E1	-3.25876E1	2.68142E1	1.1929E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.02253E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-7.57575E-1	-7.35736E-1	-9.19402E0	-9.18951E0	4.95911E-3	9.34124E-2	2.73325E1	-3.26686E1	-3.26645E1	2.68199E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02396E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-7.57504E-1	-7.35474E-1	-9.1939E0	-9.18899E0	5.45979E-3	9.3317E-2	2.72987E1	-3.2657E1	-3.26175E1	2.68011E1	1.1929E-7	2.51129E-3	2.51129E-3	6.31666E-3	3.01609E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-7.5779E-1	-7.35164E-1	-9.19406E0	-9.1893E0	5.38826E-3	9.31263E-2	2.72469E1	-3.26468E1	-3.26205E1	2.68178E1	1.1929E-7	2.52204E-3	2.52204E-3	6.29455E-3	3.00687E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-7.57694E-1	-7.35211E-1	-9.19421E0	-9.18915E0	5.4121E-3	9.34124E-2	2.73369E1	-3.26759E1	-3.26206E1	2.68016E1	1.1929E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.99348E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-7.5748E-1	-7.35307E-1	-9.19409E0	-9.18915E0	5.43594E-3	9.32217E-2	2.72739E1	-3.26621E1	-3.2623E1	2.68124E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01347E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.09464E0	-7.57504E-1	-7.35354E-1	-9.19423E0	-9.18934E0	5.4121E-3	9.28879E-2	2.7344E1	-3.26697E1	-3.26195E1	2.68016E1	1.1929E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-7.57766E-1	-7.35354E-1	-9.19433E0	-9.18963E0	5.45979E-3	9.30309E-2	2.72979E1	-3.26783E1	-3.26416E1	2.67872E1	1.1929E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.02922E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-7.5736E-1	-7.35354E-1	-9.19447E0	-9.18946E0	5.29289E-3	9.31501E-2	2.73177E1	-3.26639E1	-3.26464E1	2.6846E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.02396E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09379E0	-7.57766E-1	-7.35617E-1	-9.19447E0	-9.1892E0	5.126E-3	9.31263E-2	2.73457E1	-3.26446E1	-3.26115E1	2.68661E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01085E-1