[Scan]
initial_time=2015-12-22T18:17:32
final_time=2015-12-22T18:17:51
ip_count=19
run=1021
dataset=3
scan=94
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08746E-4
ql1_vset=
ql1_vmon=-7.57313E-1
ql1_imon=1.39809E-8
ql2_vset=
ql2_vmon=-7.35497E-1
ql2_imon=2.0575E-9
ql3_vset=
ql3_vmon=-9.19409E0
ql3_imon=6.08551E-10
ql4_vset=
ql4_vmon=-9.18908E0
ql4_imon=6.90579E-11
mult1=-9.16244E-9
mult2=-2.80245E-9
rf_tmon=-5.69605E-3
rf_agc=3.25405E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.7226E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64631E0
bslens_imon=2.51973E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.97911E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.04754E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=2.81548E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0476E1
cs_ea1_imon=2.50543E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35213E0
lens1_imon=2.69277E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03846E1
cs_ea2_imon=1.51767E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=2.91891E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.311E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.2931E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15408E1
os_ea1_imon=2.37132E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=1.20332E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91848E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01641E1
cs_anode1_imon=2.94738E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.31127E-8
tplens_vset=1.4E-1
tplens_vmon=1.58676E0
tplens_imon=-6.16582E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26464E1
iondef3_imon=1.49496E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.55048E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98443E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.11705E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27373E0
ionrepsh_imon=1.78264E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.20405E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50324E0
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.0054E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.1784E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.69879E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89015E-1
os_ef2bup_imon=-5.42339E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.40833E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.28703E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.23704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73333E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.74046E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.80916E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-1.8915E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47053E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.61216E-6
window_vset=0.0E0
window_vmon=1.32049E-1
window_imon=-1.14188E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.42967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.69787E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=6.96103E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55495E0
defgridb_imon=5.96606E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33296E1
os_fil1_imon=9.44258E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06608E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64074E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30768E1
cs_fil1_imon=9.96275E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61753E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63105E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.89314E-2
os_fil2_imon=-2.94227E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.77161E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.75006E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.17535E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21825E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3131E-3
inlet_lpb_pmon=2.99981E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51498E-3
foreline_cvt_pmon=2.51498E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.14553E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-7.57647E-1	-7.35736E-1	-9.19418E0	-9.18918E0	5.43594E-3	9.30786E-2	2.73151E1	-3.26343E1	-3.25835E1	2.68227E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-7.57647E-1	-7.35426E-1	-9.19435E0	-9.18908E0	5.48363E-3	9.34601E-2	2.72922E1	-3.2656E1	-3.26456E1	2.683E1	1.1929E-7	2.52342E-3	2.52342E-3	6.31269E-3	3.03383E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-7.57718E-1	-7.35688E-1	-9.19406E0	-9.18908E0	5.55515E-3	9.33409E-2	2.72622E1	-3.27123E1	-3.26341E1	2.68117E1	1.1929E-7	2.52521E-3	2.52521E-3	6.3131E-3	3.01065E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09394E0	-7.57551E-1	-7.35283E-1	-9.1943E0	-9.18922E0	5.50747E-3	9.30309E-2	2.73225E1	-3.26621E1	-3.26242E1	2.6804E1	1.1929E-7	2.52659E-3	2.52659E-3	6.27577E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-7.57766E-1	-7.35497E-1	-9.1943E0	-9.18922E0	5.03063E-3	9.31978E-2	2.73261E1	-3.26278E1	-3.26573E1	2.68178E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-7.57313E-1	-7.35545E-1	-9.19418E0	-9.18934E0	5.22137E-3	9.34362E-2	2.72926E1	-3.26755E1	-3.26357E1	2.68128E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-7.57599E-1	-7.35664E-1	-9.1944E0	-9.18906E0	5.17368E-3	9.3317E-2	2.7293E1	-3.26769E1	-3.26196E1	2.68157E1	1.1929E-7	2.51886E-3	2.51886E-3	6.2815E-3	3.01237E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-7.57575E-1	-7.35664E-1	-9.19459E0	-9.18934E0	5.24521E-3	9.3317E-2	2.72827E1	-3.26496E1	-3.25894E1	2.68202E1	1.1929E-7	2.51952E-3	2.51952E-3	6.3074E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-7.57575E-1	-7.35855E-1	-9.19425E0	-9.18932E0	5.34058E-3	9.3174E-2	2.73057E1	-3.26334E1	-3.25844E1	2.68244E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-7.5779E-1	-7.35593E-1	-9.19428E0	-9.18932E0	5.14984E-3	9.32693E-2	2.73273E1	-3.26741E1	-3.2653E1	2.68262E1	1.1929E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.00942E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-7.5748E-1	-7.35497E-1	-9.1939E0	-9.18899E0	5.45979E-3	9.30786E-2	2.72859E1	-3.26819E1	-3.26002E1	2.67998E1	1.1929E-7	2.51096E-3	2.51096E-3	6.33436E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-7.57718E-1	-7.35426E-1	-9.19416E0	-9.18918E0	5.67436E-3	9.2721E-2	2.72955E1	-3.26735E1	-3.26314E1	2.68196E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-7.57742E-1	-7.35331E-1	-9.1939E0	-9.18918E0	5.4121E-3	9.31263E-2	2.73393E1	-3.26747E1	-3.2641E1	2.6777E1	1.1929E-7	2.51248E-3	2.51248E-3	6.30182E-3	3.00942E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-7.57885E-1	-7.35426E-1	-9.19423E0	-9.18906E0	5.4121E-3	9.31501E-2	2.73063E1	-3.26338E1	-3.26134E1	2.6807E1	1.19342E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9978E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-7.57575E-1	-7.35497E-1	-9.19404E0	-9.18911E0	5.29289E-3	9.30548E-2	2.73117E1	-3.26771E1	-3.25948E1	2.67998E1	1.1929E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-7.57527E-1	-7.35569E-1	-9.19416E0	-9.18941E0	5.22137E-3	9.31263E-2	2.72815E1	-3.26621E1	-3.26092E1	2.679E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01871E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-7.57718E-1	-7.35331E-1	-9.19428E0	-9.18918E0	5.53131E-3	9.31263E-2	2.73339E1	-3.26518E1	-3.26038E1	2.67876E1	1.1929E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.02221E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-7.57718E-1	-7.35426E-1	-9.19421E0	-9.18896E0	5.50747E-3	9.31978E-2	2.73296E1	-3.26807E1	-3.25998E1	2.68015E1	1.1929E-7	2.52099E-3	2.52099E-3	6.28006E-3	3.01085E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-7.57456E-1	-7.35259E-1	-9.1943E0	-9.18937E0	5.48363E-3	9.29594E-2	2.72402E1	-3.26397E1	-3.26965E1	2.67945E1	1.1929E-7	2.51886E-3	2.51886E-3	6.323E-3	3.01237E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-7.57313E-1	-7.35497E-1	-9.19409E0	-9.18908E0	4.98295E-3	9.31501E-2	2.73333E1	-3.26536E1	-3.26464E1	2.67914E1	1.1929E-7	2.51498E-3	2.51498E-3	6.3131E-3	2.99981E-1