[Scan]
initial_time=2015-12-22T18:18:52
final_time=2015-12-22T18:19:11
ip_count=19
run=1021
dataset=3
scan=97
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-7.58171E-1
ql1_imon=1.39426E-8
ql2_vset=
ql2_vmon=-7.35331E-1
ql2_imon=2.07754E-9
ql3_vset=
ql3_vmon=-9.19397E0
ql3_imon=4.49395E-10
ql4_vset=
ql4_vmon=-9.18915E0
ql4_imon=7.99179E-11
mult1=-9.54559E-9
mult2=-2.68924E-9
rf_tmon=-5.46838E-3
rf_agc=3.31001E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.69871E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63489E0
bslens_imon=2.46205E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1964E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.04776E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53517E1
cs_ef1b_imon=2.82787E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02013E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05294E1
cs_ea1_imon=2.49894E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4008E0
lens1_imon=2.5702E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64852E1
os_ef1alow_imon=2.96306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04207E1
cs_ea2_imon=1.53714E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84076E1
cs_ef1a_imon=2.93282E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.3043E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.28504E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15492E1
os_ea1_imon=2.37529E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63919E1
os_ef1bup_imon=3.08643E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=1.20981E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93344E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.93421E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.3052E-8
tplens_vset=1.4E-1
tplens_vmon=1.58375E0
tplens_imon=-3.31791E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.48415E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.57499E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98303E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.1136E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26712E0
ionrepsh_imon=1.77579E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.1662E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7515E1
cs_ef2b_imon=3.13265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49363E0
os_ea2_imon=-7.49965E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00306E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71269E1
cs_ef2a_imon=3.17123E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0702E0
os_ef2alow_imon=-2.68927E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03602E-1
os_ef2bup_imon=-5.46599E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10897E1
os_restr2_imon=3.40859E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01832E1
cs_anode2_imon=2.24055E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73034E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68146E1
iondef4_imon=1.08677E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.69786E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.73528E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12493E0
cs_ionaccel_imon=-1.98031E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56278E1
einzel_imon=7.62181E-6
window_vset=0.0E0
window_vmon=1.44706E-1
window_imon=-1.14625E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86222E1
mask2_imon=-7.605E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.926E3
multa_neg_imon=7.21698E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.19678E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50158E3
multb_neg_imon=7.14488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.10305E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33259E1
os_fil1_imon=9.44123E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06854E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63949E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30692E1
cs_fil1_imon=9.95366E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62372E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63107E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.84155E-2
os_fil2_imon=-2.5823E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85444E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.48803E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36893E-1
cs_fil2_imon=-2.54755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.28047E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2197E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31827E-3
inlet_lpb_pmon=3.0012E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51972E-3
foreline_cvt_pmon=2.51972E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.49939E-1
res40_imon=-2.47032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0968E0	-7.57599E-1	-7.35092E-1	-9.19418E0	-9.18894E0	5.22137E-3	9.30071E-2	2.72756E1	-3.26596E1	-3.26213E1	2.67914E1	1.1929E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.0148E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09642E0	-7.57575E-1	-7.35092E-1	-9.19449E0	-9.18896E0	5.53131E-3	9.29356E-2	2.73369E1	-3.26735E1	-3.2602E1	2.67896E1	1.1929E-7	2.50989E-3	2.50989E-3	6.32356E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-7.57837E-1	-7.35092E-1	-9.19459E0	-9.18851E0	5.22137E-3	9.29356E-2	2.72955E1	-3.26621E1	-3.26621E1	2.68052E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.0041E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.0968E0	-7.57957E-1	-7.35044E-1	-9.19449E0	-9.18865E0	5.38826E-3	9.31263E-2	2.72745E1	-3.2632E1	-3.26482E1	2.67824E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0965E0	-7.57909E-1	-7.35044E-1	-9.19437E0	-9.18896E0	5.38826E-3	9.32455E-2	2.73263E1	-3.26567E1	-3.25947E1	2.68058E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-7.58147E-1	-7.35188E-1	-9.19423E0	-9.18894E0	5.22137E-3	9.31263E-2	2.73003E1	-3.26416E1	-3.26044E1	2.6785E1	1.1929E-7	2.52428E-3	2.52428E-3	6.29098E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-7.57742E-1	-7.34901E-1	-9.19454E0	-9.18906E0	4.64916E-3	9.36031E-2	2.729E1	-3.26417E1	-3.26133E1	2.68076E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-7.57885E-1	-7.34997E-1	-9.19425E0	-9.18911E0	5.22137E-3	9.36747E-2	2.73063E1	-3.26585E1	-3.26512E1	2.68308E1	1.1929E-7	2.52131E-3	2.52131E-3	6.31798E-3	3.00348E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-7.57861E-1	-7.35211E-1	-9.19425E0	-9.18927E0	4.95911E-3	9.32455E-2	2.72961E1	-3.26741E1	-3.25948E1	2.68268E1	1.1929E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.02253E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-7.57623E-1	-7.35235E-1	-9.19452E0	-9.18932E0	5.03063E-3	9.35793E-2	2.72871E1	-3.26494E1	-3.26452E1	2.6795E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02133E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-7.57527E-1	-7.35116E-1	-9.19466E0	-9.18911E0	4.93526E-3	9.32217E-2	2.73201E1	-3.26765E1	-3.26741E1	2.68144E1	1.1929E-7	2.5188E-3	2.5188E-3	6.28006E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-7.57957E-1	-7.35235E-1	-9.19445E0	-9.18939E0	5.53131E-3	9.3317E-2	2.73135E1	-3.26536E1	-3.26416E1	2.68146E1	1.1929E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.99879E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-7.5767E-1	-7.35545E-1	-9.19452E0	-9.18918E0	5.53131E-3	9.31263E-2	2.72985E1	-3.265E1	-3.26188E1	2.68142E1	1.1929E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-7.57766E-1	-7.35283E-1	-9.19433E0	-9.18941E0	5.50747E-3	9.29117E-2	2.73015E1	-3.26651E1	-3.26506E1	2.6835E1	1.1929E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00824E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-7.57694E-1	-7.35259E-1	-9.19425E0	-9.1892E0	5.17368E-3	9.29594E-2	2.72927E1	-3.26732E1	-3.26526E1	2.6792E1	1.1929E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-7.57742E-1	-7.35426E-1	-9.19428E0	-9.18925E0	5.14984E-3	9.3174E-2	2.72967E1	-3.26579E1	-3.2626E1	2.67986E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.03027E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-7.5779E-1	-7.35331E-1	-9.19414E0	-9.18934E0	5.24521E-3	9.29117E-2	2.72901E1	-3.265E1	-3.2635E1	2.68106E1	1.1929E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.9943E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-7.57694E-1	-7.3514E-1	-9.19404E0	-9.18932E0	5.4121E-3	9.32932E-2	2.72877E1	-3.26518E1	-3.26621E1	2.68166E1	1.1929E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-7.57957E-1	-7.35092E-1	-9.19409E0	-9.18908E0	4.88758E-3	9.35078E-2	2.73321E1	-3.26645E1	-3.25972E1	2.6795E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-7.58171E-1	-7.35331E-1	-9.19397E0	-9.18915E0	5.126E-3	9.32693E-2	2.73034E1	-3.26446E1	-3.26272E1	2.68146E1	1.1929E-7	2.51972E-3	2.51972E-3	6.31827E-3	3.0012E-1