[Scan]
initial_time=2015-12-22T18:19:18
final_time=2015-12-22T18:19:38
ip_count=19
run=1021
dataset=3
scan=98
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-7.57456E-1
ql1_imon=1.39725E-8
ql2_vset=
ql2_vmon=-7.35593E-1
ql2_imon=2.062E-9
ql3_vset=
ql3_vmon=-9.19442E0
ql3_imon=4.67348E-10
ql4_vset=
ql4_vmon=-9.1887E0
ql4_imon=7.94053E-11
mult1=-9.00591E-9
mult2=-2.63278E-9
rf_tmon=-4.97506E-3
rf_agc=3.27508E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.73378E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67565E0
bslens_imon=2.35213E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1983E1
lens5a_imon=1.98403E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.0493E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=2.82232E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.01972E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04941E1
cs_ea1_imon=2.50822E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36607E0
lens1_imon=2.50432E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.95927E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03938E1
cs_ea2_imon=1.51152E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.92684E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.30862E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.28986E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15205E1
os_ea1_imon=2.35143E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22968E0
cs_ionrep_imon=1.19015E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93523E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=2.94918E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.3086E-8
tplens_vset=1.4E-1
tplens_vmon=1.57359E0
tplens_imon=-5.11252E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.48816E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.57134E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98225E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.10455E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26449E0
ionrepsh_imon=1.77415E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.19003E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74267E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48098E0
os_ea2_imon=-6.88222E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00435E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.17659E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10727E1
os_restr2_imon=3.42491E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.2876E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.24209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.08644E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68176E1
iondef4_imon=1.07873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.73238E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.74806E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-1.75455E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47136E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56183E1
einzel_imon=7.51845E-6
window_vset=0.0E0
window_vmon=1.46465E-1
window_imon=-1.17792E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.38904E-4
mask2_vset=0.0E0
mask2_vmon=-1.86086E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.58338E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.48616E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.35331E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39079E0
defgridb_imon=6.13576E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33315E1
os_fil1_imon=9.41165E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06656E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63465E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30776E1
cs_fil1_imon=9.95038E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62276E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63946E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90135E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.82656E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.66597E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37648E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22219E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30212E-3
inlet_lpb_pmon=3.01356E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52025E-3
foreline_cvt_pmon=2.52025E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.68302E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-7.57861E-1	-7.34973E-1	-9.19418E0	-9.18922E0	5.19753E-3	9.30786E-2	2.73257E1	-3.26319E1	-3.26272E1	2.6785E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.97704E-1
2.0E0	4.8E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-7.57813E-1	-7.35021E-1	-9.1943E0	-9.18927E0	5.45979E-3	9.31501E-2	2.72929E1	-3.26627E1	-3.26144E1	2.68388E1	1.1929E-7	2.52025E-3	2.52025E-3	6.3445E-3	2.99845E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-7.57861E-1	-7.34997E-1	-9.19409E0	-9.18951E0	5.38826E-3	9.33409E-2	2.72874E1	-3.26413E1	-3.26213E1	2.68163E1	1.1929E-7	2.52066E-3	2.52066E-3	6.3131E-3	2.9971E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-7.57885E-1	-7.35044E-1	-9.19447E0	-9.1893E0	5.24521E-3	9.33886E-2	2.72934E1	-3.2636E1	-3.26416E1	2.68061E1	1.1929E-7	2.51603E-3	2.51603E-3	6.3074E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-7.58028E-1	-7.35044E-1	-9.19459E0	-9.1892E0	5.62668E-3	9.32932E-2	2.73252E1	-3.26484E1	-3.26183E1	2.67842E1	1.1929E-7	2.51832E-3	2.51832E-3	6.32716E-3	3.00761E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-7.58123E-1	-7.3514E-1	-9.19454E0	-9.18932E0	5.55515E-3	9.32217E-2	2.72889E1	-3.26723E1	-3.26152E1	2.68196E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-7.57933E-1	-7.35164E-1	-9.19437E0	-9.18906E0	5.48363E-3	9.34362E-2	2.73105E1	-3.26524E1	-3.26386E1	2.68124E1	1.1929E-7	2.50898E-3	2.50898E-3	6.32386E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-7.57933E-1	-7.35426E-1	-9.19459E0	-9.18884E0	5.48363E-3	9.32455E-2	2.72727E1	-3.2647E1	-3.26212E1	2.68016E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-7.57694E-1	-7.35211E-1	-9.19416E0	-9.18922E0	5.45979E-3	9.3317E-2	2.73237E1	-3.26296E1	-3.26164E1	2.6825E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.57861E-1	-7.35211E-1	-9.19428E0	-9.18899E0	5.50747E-3	9.33647E-2	2.72612E1	-3.26801E1	-3.26416E1	2.6813E1	1.1929E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.99E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-7.57694E-1	-7.35378E-1	-9.19428E0	-9.18911E0	5.38826E-3	9.33409E-2	2.73021E1	-3.26655E1	-3.2626E1	2.68238E1	1.1929E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.01223E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-7.5767E-1	-7.3545E-1	-9.19416E0	-9.18884E0	5.24521E-3	9.31263E-2	2.7269E1	-3.26707E1	-3.26248E1	2.68118E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-7.57575E-1	-7.35354E-1	-9.19402E0	-9.18899E0	5.53131E-3	9.33647E-2	2.72991E1	-3.2623E1	-3.26044E1	2.67926E1	1.1929E-7	2.51116E-3	2.51116E-3	6.34588E-3	3.00302E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-7.57623E-1	-7.35331E-1	-9.19435E0	-9.18899E0	5.36442E-3	9.32932E-2	2.72967E1	-3.2644E1	-3.26182E1	2.67986E1	1.1929E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-7.5767E-1	-7.35879E-1	-9.19433E0	-9.18934E0	5.48363E-3	9.31025E-2	2.73104E1	-3.2649E1	-3.26195E1	2.67854E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-7.57623E-1	-7.35664E-1	-9.19452E0	-9.18913E0	5.19753E-3	9.31978E-2	2.73431E1	-3.26946E1	-3.26389E1	2.68052E1	1.19342E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02396E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-7.57742E-1	-7.35712E-1	-9.1944E0	-9.1893E0	5.126E-3	9.30548E-2	2.7286E1	-3.2666E1	-3.26341E1	2.68065E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3514E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-7.5748E-1	-7.35378E-1	-9.19411E0	-9.18894E0	5.10216E-3	9.31978E-2	2.72492E1	-3.26885E1	-3.26278E1	2.67896E1	1.1929E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.57599E-1	-7.35545E-1	-9.19433E0	-9.18918E0	5.19753E-3	9.31263E-2	2.736E1	-3.26561E1	-3.26685E1	2.67984E1	1.1929E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-7.57456E-1	-7.35593E-1	-9.19442E0	-9.1887E0	4.88758E-3	9.3174E-2	2.73069E1	-3.26446E1	-3.26242E1	2.68176E1	1.1929E-7	2.52025E-3	2.52025E-3	6.30212E-3	3.01356E-1