[Scan]
initial_time=2015-12-22T18:19:45
final_time=2015-12-22T18:20:04
ip_count=19
run=1021
dataset=3
scan=99
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-7.57456E-1
ql1_imon=1.3983E-8
ql2_vset=
ql2_vmon=-7.35331E-1
ql2_imon=2.03496E-9
ql3_vset=
ql3_vmon=-9.19409E0
ql3_imon=4.72009E-10
ql4_vset=
ql4_vmon=-9.18941E0
ql4_imon=1.00529E-10
mult1=-8.83734E-9
mult2=-2.66838E-9
rf_tmon=-4.05525E-3
rf_agc=3.35215E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.7561E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68686E0
bslens_imon=2.80517E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20084E1
lens5a_imon=1.98262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54163E1
cs_ef1b_imon=2.81079E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05094E1
cs_ea1_imon=2.50468E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41621E0
lens1_imon=2.35567E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65137E1
os_ef1alow_imon=3.00036E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03926E1
cs_ea2_imon=1.54621E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85037E1
cs_ef1a_imon=2.92143E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.31104E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=4.27833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=2.36877E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.0591E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=1.19439E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=2.94378E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.33061E-8
tplens_vset=1.4E-1
tplens_vmon=1.58303E0
tplens_imon=-3.05966E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26107E1
iondef3_imon=1.49347E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26602E1
iondef2_imon=1.56072E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98356E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.10219E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.281E0
ionrepsh_imon=1.76176E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33711E1
lens5b_imon=2.1787E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74003E1
cs_ef2b_imon=3.09406E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48275E0
os_ea2_imon=-6.3867E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09841E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72797E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11213E1
os_restr2_imon=3.4004E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23108E2
cs_ionfoca_imon=6.30211E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02182E1
cs_anode2_imon=2.2392E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72939E1
iondef1_imon=1.09281E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68041E1
iondef4_imon=1.06827E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.77884E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.72569E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-1.97439E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.46999E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56105E1
einzel_imon=7.39592E-6
window_vset=0.0E0
window_vmon=1.45864E-1
window_imon=-1.14188E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82597E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.29668E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.4897E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.08786E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33173E0
defgridb_imon=5.92693E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33286E1
os_fil1_imon=9.42522E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07059E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63968E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30767E1
cs_fil1_imon=9.95891E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62606E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63964E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.87603E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.54182E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13021E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22283E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.41272E-1
res40_imon=-2.6123E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-7.57551E-1	-7.35164E-1	-9.19435E0	-9.18937E0	5.14984E-3	9.31025E-2	2.73279E1	-3.26591E1	-3.26284E1	2.68094E1	1.1929E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.03545E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-7.57766E-1	-7.35021E-1	-9.19397E0	-9.18906E0	5.07832E-3	9.32217E-2	2.73045E1	-3.26309E1	-3.2634E1	2.6813E1	1.1929E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-7.57313E-1	-7.35068E-1	-9.19425E0	-9.18951E0	5.43594E-3	9.30071E-2	2.73165E1	-3.26505E1	-3.26266E1	2.68018E1	1.1929E-7	2.5147E-3	2.5147E-3	6.29067E-3	2.99083E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-7.57885E-1	-7.35235E-1	-9.19452E0	-9.18901E0	5.29289E-3	9.34362E-2	2.73112E1	-3.26591E1	-3.26383E1	2.68424E1	1.1929E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-7.57599E-1	-7.35092E-1	-9.19421E0	-9.18915E0	5.29289E-3	9.32455E-2	2.734E1	-3.26554E1	-3.2645E1	2.68194E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02659E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-7.57527E-1	-7.35021E-1	-9.19414E0	-9.18894E0	5.65052E-3	9.32932E-2	2.7334E1	-3.26296E1	-3.26496E1	2.68099E1	1.1929E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.02813E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-7.57885E-1	-7.34901E-1	-9.19397E0	-9.18939E0	5.67436E-3	9.30786E-2	2.73208E1	-3.26517E1	-3.26327E1	2.68065E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9892E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.57861E-1	-7.34949E-1	-9.19421E0	-9.18925E0	5.43594E-3	9.3317E-2	2.73107E1	-3.26248E1	-3.25979E1	2.68107E1	1.1929E-7	2.51322E-3	2.51322E-3	6.33461E-3	3.00896E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-7.57694E-1	-7.34854E-1	-9.19428E0	-9.18915E0	5.24521E-3	9.31501E-2	2.72751E1	-3.26849E1	-3.25978E1	2.68063E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-7.57551E-1	-7.35068E-1	-9.19437E0	-9.1887E0	5.60284E-3	9.31025E-2	2.72955E1	-3.26506E1	-3.25984E1	2.68064E1	1.1929E-7	2.51225E-3	2.51225E-3	6.34037E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-7.57647E-1	-7.35402E-1	-9.1943E0	-9.18927E0	5.34058E-3	9.29356E-2	2.73033E1	-3.26789E1	-3.26308E1	2.68034E1	1.1929E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-7.57647E-1	-7.35259E-1	-9.19392E0	-9.18906E0	5.24521E-3	9.30786E-2	2.73015E1	-3.2653E1	-3.2647E1	2.68214E1	1.1929E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01347E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-7.57504E-1	-7.3545E-1	-9.19423E0	-9.18925E0	5.17368E-3	9.27925E-2	2.72781E1	-3.26422E1	-3.26218E1	2.67891E1	1.1929E-7	2.51701E-3	2.51701E-3	6.31283E-3	2.99217E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-7.57837E-1	-7.35044E-1	-9.19414E0	-9.1893E0	5.38826E-3	9.28164E-2	2.72817E1	-3.26777E1	-3.26344E1	2.67995E1					
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-7.57766E-1	-7.35188E-1	-9.19397E0	-9.18932E0	5.76973E-3	9.26971E-2	2.72763E1	-3.26783E1	-3.26615E1	2.68182E1	1.1929E-7	2.51693E-3	2.51693E-3	6.29067E-3	2.99879E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-7.57432E-1	-7.3514E-1	-9.19416E0	-9.1892E0	5.60284E-3	9.29594E-2	2.73069E1	-3.26362E1	-3.2614E1	2.68029E1	1.1929E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.03027E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-7.5767E-1	-7.35211E-1	-9.19399E0	-9.18925E0	5.57899E-3	9.31978E-2	2.73051E1	-3.26933E1	-3.26236E1	2.68214E1	1.1929E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-7.57623E-1	-7.35259E-1	-9.19404E0	-9.18875E0	5.36442E-3	9.30786E-2	2.73482E1	-3.26124E1	-3.26826E1	2.68166E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.03185E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-7.57718E-1	-7.35331E-1	-9.19399E0	-9.18913E0	5.29289E-3	9.30786E-2	2.72883E1	-3.26543E1	-3.26464E1	2.68256E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-7.57456E-1	-7.35331E-1	-9.19409E0	-9.18941E0	5.05447E-3	9.32455E-2	2.72939E1	-3.26602E1	-3.26107E1	2.68041E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9978E-1