[Scan]
initial_time=2015-12-22T18:20:38
final_time=2015-12-22T18:21:00
ip_count=19
run=1021
dataset=3
scan=101
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08753E-4
ql1_vset=
ql1_vmon=-7.57504E-1
ql1_imon=1.39182E-8
ql2_vset=
ql2_vmon=-7.34639E-1
ql2_imon=2.17241E-9
ql3_vset=
ql3_vmon=-9.19445E0
ql3_imon=3.89659E-10
ql4_vset=
ql4_vmon=-9.1893E0
ql4_imon=8.83698E-11
mult1=-9.43937E-9
mult2=-2.86233E-9
rf_tmon=-3.95967E-3
rf_agc=3.37121E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.72746E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67978E0
bslens_imon=2.47601E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19925E1
lens5a_imon=1.97696E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.04792E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=2.82268E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05041E1
cs_ea1_imon=2.50079E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39439E0
lens1_imon=2.5114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04203E1
cs_ea2_imon=1.56001E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84088E1
cs_ef1a_imon=2.93224E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.31275E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.29779E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15335E1
os_ea1_imon=2.35567E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26979E0
cs_ionrep_imon=1.19404E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93257E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02163E1
cs_anode1_imon=2.95891E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.30772E-8
tplens_vset=1.4E-1
tplens_vmon=1.60486E0
tplens_imon=-5.64343E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26368E1
iondef3_imon=1.47294E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26849E1
iondef2_imon=1.56143E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.28879E-2
ql6_imon=4.19502E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28749E0
ionrepsh_imon=1.76211E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33876E1
lens5b_imon=2.1833E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.11569E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49219E0
os_ea2_imon=-5.00633E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04555E0
os_ef2alow_imon=-2.73123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.46664E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=3.41049E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.29645E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01683E1
cs_anode2_imon=2.24281E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.08821E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.71296E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.74195E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-1.82663E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56387E1
einzel_imon=7.55449E-6
window_vset=0.0E0
window_vmon=1.6028E-1
window_imon=-1.14188E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.38983E-4
mask2_vset=0.0E0
mask2_vmon=-1.86074E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.18342E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.56757E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.2259E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40556E0
defgridb_imon=6.04727E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33323E1
os_fil1_imon=9.42048E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06656E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63808E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30769E1
cs_fil1_imon=9.95447E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62222E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6422E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.87603E-2
os_fil2_imon=-2.88821E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.73688E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.61901E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.64795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43054E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22274E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.41873E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-7.5767E-1	-7.35092E-1	-9.19454E0	-9.18906E0	5.29289E-3	9.29832E-2	2.73129E1	-3.26488E1	-3.26765E1	2.68034E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0148E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-7.57551E-1	-7.35331E-1	-9.19466E0	-9.18891E0	5.57899E-3	9.29356E-2	2.73241E1	-3.26793E1	-3.2648E1	2.6819E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-7.57217E-1	-7.35259E-1	-9.19454E0	-9.18891E0	5.45979E-3	9.30071E-2	2.73168E1	-3.26668E1	-3.2612E1	2.67942E1	1.1929E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.00676E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09356E0	-7.57456E-1	-7.35283E-1	-9.19428E0	-9.18903E0	5.4121E-3	9.2864E-2	2.73032E1	-3.2636E1	-3.25986E1	2.68038E1	1.1929E-7	2.52058E-3	2.52058E-3	6.28703E-3	3.00878E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-7.57504E-1	-7.35044E-1	-9.19435E0	-9.1893E0	5.22137E-3	9.30071E-2	2.72973E1	-3.26981E1	-3.26212E1	2.68136E1	1.19344E-7	2.51725E-3	2.51725E-3	6.33021E-3	2.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-7.57003E-1	-7.34925E-1	-9.19416E0	-9.18913E0	5.53131E-3	9.31025E-2	2.72951E1	-3.26579E1	-3.26254E1	2.68232E1	1.1929E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-7.57051E-1	-7.35068E-1	-9.19411E0	-9.18908E0	5.43594E-3	9.3174E-2	2.73249E1	-3.26729E1	-3.25954E1	2.68076E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-7.5717E-1	-7.35307E-1	-9.19459E0	-9.18899E0	5.45979E-3	9.33409E-2	2.72709E1	-3.26368E1	-3.26302E1	2.67938E1	1.1929E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-7.57408E-1	-7.3514E-1	-9.19428E0	-9.18889E0	5.38826E-3	9.32455E-2	2.73159E1	-3.26645E1	-3.26056E1	2.68094E1	1.1929E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-7.57408E-1	-7.35092E-1	-9.1944E0	-9.18927E0	5.07832E-3	9.34601E-2	2.73352E1	-3.26626E1	-3.2603E1	2.68024E1	1.1929E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.03712E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-7.57623E-1	-7.35092E-1	-9.1944E0	-9.18903E0	5.57899E-3	9.31501E-2	2.72985E1	-3.26639E1	-3.26482E1	2.67992E1	1.1929E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-7.57432E-1	-7.35211E-1	-9.19454E0	-9.18927E0	5.22137E-3	9.32693E-2	2.73393E1	-3.26885E1	-3.25996E1	2.68028E1	1.1929E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-7.57575E-1	-7.35068E-1	-9.19428E0	-9.18918E0	5.00679E-3	9.32455E-2	2.73646E1	-3.26795E1	-3.2504E1	2.6816E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02133E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-7.57313E-1	-7.34997E-1	-9.19449E0	-9.18908E0	5.26905E-3	9.32455E-2	2.73039E1	-3.26687E1	-3.26386E1	2.68126E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00041E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-7.5717E-1	-7.3514E-1	-9.19442E0	-9.18913E0	5.17368E-3	9.26971E-2	2.73075E1	-3.26679E1	-3.26508E1	2.6803E1	1.1929E-7	2.52473E-3	2.52473E-3	6.33538E-3	2.98026E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-7.57217E-1	-7.35211E-1	-9.19402E0	-9.18908E0	5.50747E-3	9.30548E-2	2.73147E1	-3.26609E1	-3.26242E1	2.6816E1	1.1929E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00453E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09734E0	-7.57384E-1	-7.35068E-1	-9.19456E0	-9.18908E0	5.48363E-3	9.3174E-2	2.73535E1	-3.26567E1	-3.26166E1	2.68016E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.0148E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-7.5767E-1	-7.3514E-1	-9.1943E0	-9.18918E0	5.19753E-3	9.3174E-2	2.72898E1	-3.2659E1	-3.26396E1	2.67711E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.0071E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-7.57432E-1	-7.35259E-1	-9.19466E0	-9.18911E0	5.34058E-3	9.32217E-2	2.72979E1	-3.26512E1	-3.25954E1	2.68142E1	1.1929E-7	2.50898E-3	2.50898E-3	6.30192E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-7.57504E-1	-7.34639E-1	-9.19445E0	-9.1893E0	5.14984E-3	9.28879E-2	2.73069E1	-3.26849E1	-3.26368E1	2.68052E1	1.1929E-7	2.52492E-3	2.52492E-3	6.3074E-3	2.9943E-1