[Scan]
initial_time=2015-12-22T18:21:11
final_time=2015-12-22T18:21:40
ip_count=19
run=1021
dataset=3
scan=102
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08825E-4
ql1_vset=
ql1_vmon=-7.57551E-1
ql1_imon=1.39337E-8
ql2_vset=
ql2_vmon=-7.34615E-1
ql2_imon=2.09126E-9
ql3_vset=
ql3_vmon=-9.19402E0
ql3_imon=3.94511E-10
ql4_vset=
ql4_vmon=-9.18899E0
ql4_imon=8.91089E-11
mult1=-8.17533E-9
mult2=-2.85652E-9
rf_tmon=-4.62156E-3
rf_agc=3.22473E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.73386E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62108E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20127E1
lens5a_imon=1.98163E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.04855E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53667E1
cs_ef1b_imon=2.82092E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=2.50218E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35213E0
lens1_imon=2.39716E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64446E1
os_ef1alow_imon=2.97348E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04279E1
cs_ea2_imon=1.53173E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84597E1
cs_ef1a_imon=2.93491E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.31238E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.2986E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=2.36916E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64E1
os_ef1bup_imon=3.07809E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24849E0
cs_ionrep_imon=1.19791E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93312E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01937E1
cs_anode1_imon=2.94707E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.31521E-8
tplens_vset=1.4E-1
tplens_vmon=1.55912E0
tplens_imon=-2.38062E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25741E1
iondef3_imon=1.4809E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2711E1
iondef2_imon=1.56742E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98241E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=4.1041E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=1.75308E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.1644E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.76117E1
cs_ef2b_imon=3.12848E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49904E0
os_ea2_imon=-9.30213E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00446E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.712E1
cs_ef2a_imon=3.18721E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07541E0
os_ef2alow_imon=-2.68579E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81013E-1
os_ef2bup_imon=-5.29918E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10874E1
os_restr2_imon=3.41797E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01954E1
cs_anode2_imon=2.24994E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73541E1
iondef1_imon=1.08904E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68279E1
iondef4_imon=1.068E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.7809E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=7.82134E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11972E0
cs_ionaccel_imon=-1.93514E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47028E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56185E1
einzel_imon=7.61138E-6
window_vset=0.0E0
window_vmon=1.59186E-1
window_imon=-1.09065E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39001E-4
mask2_vset=0.0E0
mask2_vmon=-1.86222E1
mask2_imon=-8.1958E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.12829E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5016E3
multb_neg_imon=6.96103E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45269E0
defgridb_imon=6.02374E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33335E1
os_fil1_imon=9.4271E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0664E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64159E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30771E1
cs_fil1_imon=9.96003E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61254E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63612E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00922E-2
os_fil2_imon=-2.68077E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91815E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.56537E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37642E-1
cs_fil2_imon=-2.40854E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27523E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22087E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=3.01742E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51136E-3
foreline_cvt_pmon=2.51136E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.12493E-1
res40_imon=-2.54678E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-7.57265E-1	-7.35378E-1	-9.19473E0	-9.18925E0	4.98295E-3	9.30071E-2	2.72974E1	-3.26638E1	-3.26319E1	2.68208E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.02253E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09642E0	-7.57313E-1	-7.35378E-1	-9.19466E0	-9.1892E0	5.29289E-3	9.31978E-2	2.72831E1	-3.26523E1	-3.2645E1	2.68232E1	1.1929E-7	2.51567E-3	2.51567E-3	6.32402E-3	3.00882E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0965E0	-7.57456E-1	-7.35235E-1	-9.19461E0	-9.18915E0	5.55515E-3	9.28879E-2	2.73165E1	-3.26759E1	-3.2602E1	2.68076E1					
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-7.5717E-1	-7.35235E-1	-9.19416E0	-9.18915E0	5.60284E-3	9.31025E-2	2.72906E1	-3.26405E1	-3.26266E1	2.68163E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-7.57337E-1	-7.35307E-1	-9.1943E0	-9.18918E0	5.62668E-3	9.31501E-2	2.73297E1	-3.2653E1	-3.26398E1	2.6813E1	1.1929E-7	2.51393E-3	2.51393E-3	6.30212E-3	3.02621E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-7.57337E-1	-7.35521E-1	-9.19428E0	-9.18922E0	5.36442E-3	9.30548E-2	2.72865E1	-3.26567E1	-3.2644E1	2.68136E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-7.57194E-1	-7.35283E-1	-9.19423E0	-9.18915E0	5.43594E-3	9.30786E-2	2.72787E1	-3.2647E1	-3.2611E1	2.6801E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-7.57432E-1	-7.35068E-1	-9.19435E0	-9.18891E0	5.24521E-3	9.29832E-2	2.7298E1	-3.2639E1	-3.26372E1	2.68064E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-7.57194E-1	-7.35235E-1	-9.19428E0	-9.18906E0	5.36442E-3	9.32932E-2	2.72817E1	-3.26573E1	-3.2635E1	2.67932E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.02253E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-7.57265E-1	-7.35068E-1	-9.19447E0	-9.18894E0	5.10216E-3	9.29832E-2	2.73213E1	-3.26753E1	-3.26362E1	2.67938E1	1.1929E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.02133E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-7.57003E-1	-7.35116E-1	-9.19416E0	-9.18918E0	5.4121E-3	9.30548E-2	2.73051E1	-3.26705E1	-3.2632E1	2.67722E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-7.57098E-1	-7.35092E-1	-9.19433E0	-9.18922E0	5.31673E-3	9.3317E-2	2.73249E1	-3.26669E1	-3.26482E1	2.67728E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-7.5717E-1	-7.35807E-1	-9.19445E0	-9.18925E0	5.14984E-3	9.34124E-2	2.73231E1	-3.26939E1	-3.26392E1	2.68304E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01347E-1
1.7E1	4.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-7.57337E-1	-7.35259E-1	-9.19428E0	-9.18915E0	5.48363E-3	9.32932E-2	2.7312E1	-3.2637E1	-3.26266E1	2.67989E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.99E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.5748E-1	-7.35354E-1	-9.19442E0	-9.18899E0	5.14984E-3	9.31978E-2	2.73443E1	-3.26713E1	-3.26438E1	2.68064E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9892E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-7.57289E-1	-7.35116E-1	-9.19394E0	-9.1893E0	5.43594E-3	9.29117E-2	2.73405E1	-3.26855E1	-3.26314E1	2.67968E1	1.1929E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.9874E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-7.57456E-1	-7.3514E-1	-9.19433E0	-9.18918E0	5.22137E-3	9.3174E-2	2.73129E1	-3.26464E1	-3.26639E1	2.68172E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-7.57623E-1	-7.34782E-1	-9.19414E0	-9.18908E0	5.14984E-3	9.30786E-2	2.73161E1	-3.2677E1	-3.26318E1	2.68196E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-7.57456E-1	-7.35044E-1	-9.19411E0	-9.18896E0	5.48363E-3	9.27687E-2	2.728E1	-3.26615E1	-3.26236E1	2.68232E1	1.1929E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-7.57551E-1	-7.34615E-1	-9.19402E0	-9.18899E0	5.29289E-3	9.29594E-2	2.73541E1	-3.2711E1	-3.25741E1	2.68279E1	1.1929E-7	2.51136E-3	2.51136E-3	6.31299E-3	3.01742E-1