[Scan]
initial_time=2015-12-22T18:21:50
final_time=2015-12-22T18:22:19
ip_count=19
run=1021
dataset=3
scan=103
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-7.5748E-1
ql1_imon=1.39476E-8
ql2_vset=
ql2_vmon=-7.35402E-1
ql2_imon=2.04333E-9
ql3_vset=
ql3_vmon=-9.19437E0
ql3_imon=4.04143E-10
ql4_vset=
ql4_vmon=-9.18939E0
ql4_imon=1.21498E-10
mult1=-1.4364E-8
mult2=-2.80444E-9
rf_tmon=-1.59241E-3
rf_agc=3.77076E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=1.74959E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63613E0
bslens_imon=2.54326E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2029E1
lens5a_imon=1.97519E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=2.82665E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.0205E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04605E1
cs_ea1_imon=2.51247E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38554E0
lens1_imon=2.58573E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64464E1
os_ef1alow_imon=2.96432E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0346E1
cs_ea2_imon=1.5455E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83481E1
cs_ef1a_imon=2.92432E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.31806E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.29274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15435E1
os_ea1_imon=2.37726E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62933E1
os_ef1bup_imon=3.07028E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21434E0
cs_ionrep_imon=1.2036E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=2.96864E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.33215E-8
tplens_vset=1.4E-1
tplens_vmon=1.55531E0
tplens_imon=-4.12148E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27197E1
iondef3_imon=1.50445E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27636E1
iondef2_imon=1.56001E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98456E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.08788E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27274E0
ionrepsh_imon=1.77025E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.20879E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75378E1
cs_ef2b_imon=3.11497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48216E0
os_ea2_imon=-8.47495E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70861E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10501E0
os_ef2alow_imon=-2.77808E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88414E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10709E1
os_restr2_imon=3.41518E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.28229E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73267E1
iondef1_imon=1.08715E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.07188E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.76813E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.79364E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.87709E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56513E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=1.65686E-1
window_imon=-1.17071E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86032E1
mask2_imon=-8.21124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.44534E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93767E3
defgrida_imon=6.2384E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=6.75869E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56206E0
defgridb_imon=5.87738E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33329E1
os_fil1_imon=9.41177E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06735E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63904E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30809E1
cs_fil1_imon=9.9544E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6272E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63937E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02798E-2
os_fil2_imon=-2.79211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.20539E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.69874E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.57587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.47899E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22175E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33211E-3
inlet_lpb_pmon=3.00432E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51694E-3
foreline_cvt_pmon=2.51694E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.29259E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-7.57241E-1	-7.3483E-1	-9.19397E0	-9.18941E0	5.17368E-3	9.31501E-2	2.73472E1	-3.26861E1	-3.26338E1	2.67931E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-7.57527E-1	-7.35068E-1	-9.1943E0	-9.18939E0	5.45979E-3	9.32932E-2	2.73265E1	-3.26187E1	-3.26615E1	2.67539E1	1.1929E-7	2.52599E-3	2.52599E-3	6.3074E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-7.57599E-1	-7.34973E-1	-9.19442E0	-9.18953E0	5.19753E-3	9.28879E-2	2.72968E1	-3.26602E1	-3.26006E1	2.67866E1	1.1929E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.01209E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-7.57837E-1	-7.3514E-1	-9.19406E0	-9.18939E0	5.17368E-3	9.2864E-2	2.73087E1	-3.26777E1	-3.26488E1	2.68372E1	1.1929E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-7.57623E-1	-7.3483E-1	-9.19418E0	-9.18913E0	5.26905E-3	9.29356E-2	2.73202E1	-3.26729E1	-3.26347E1	2.68224E1	1.1929E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-7.57647E-1	-7.35068E-1	-9.19392E0	-9.18961E0	5.10216E-3	9.31263E-2	2.72951E1	-3.26478E1	-3.26006E1	2.682E1	1.1929E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.00348E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-7.57456E-1	-7.35307E-1	-9.19411E0	-9.18975E0	5.14984E-3	9.3174E-2	2.7288E1	-3.26695E1	-3.26003E1	2.68106E1	1.1929E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.57551E-1	-7.35235E-1	-9.19414E0	-9.18941E0	5.17368E-3	9.33886E-2	2.72921E1	-3.26413E1	-3.26036E1	2.68154E1	1.1929E-7	2.51359E-3	2.51359E-3	6.33538E-3	3.01209E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-7.5748E-1	-7.35402E-1	-9.1943E0	-9.18918E0	5.26905E-3	9.30071E-2	2.72916E1	-3.26615E1	-3.26462E1	2.68088E1	1.1929E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-7.57504E-1	-7.35044E-1	-9.19442E0	-9.18944E0	5.43594E-3	9.27448E-2	2.73175E1	-3.26773E1	-3.26319E1	2.68058E1	1.1929E-7	2.51248E-3	2.51248E-3	6.33538E-3	2.99879E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-7.57599E-1	-7.35116E-1	-9.19425E0	-9.18939E0	5.10216E-3	9.30071E-2	2.73243E1	-3.26657E1	-3.26188E1	2.6771E1	1.1929E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.01738E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-7.5779E-1	-7.35331E-1	-9.19414E0	-9.18927E0	5.05447E-3	9.2864E-2	2.73004E1	-3.26809E1	-3.26378E1	2.67806E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-7.57718E-1	-7.35402E-1	-9.19433E0	-9.18899E0	5.05447E-3	9.32455E-2	2.73309E1	-3.26398E1	-3.26567E1	2.681E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00966E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-7.57384E-1	-7.35354E-1	-9.1943E0	-9.18918E0	5.38826E-3	9.28402E-2	2.73169E1	-3.26614E1	-3.26431E1	2.67931E1	1.1929E-7	2.51804E-3	2.51804E-3	6.34099E-3	2.99879E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-7.57337E-1	-7.35235E-1	-9.19452E0	-9.18903E0	5.4121E-3	9.30786E-2	2.73099E1	-3.2641E1	-3.26494E1	2.68238E1	1.1929E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-7.57384E-1	-7.35307E-1	-9.19456E0	-9.1892E0	5.22137E-3	9.29356E-2	2.73057E1	-3.26603E1	-3.26314E1	2.67986E1	1.1929E-7	2.50668E-3	2.50668E-3	6.34518E-3	3.00197E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-7.57718E-1	-7.35354E-1	-9.19449E0	-9.18911E0	5.17368E-3	9.29832E-2	2.72787E1	-3.26567E1	-3.2626E1	2.68358E1	1.1929E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-7.57694E-1	-7.35426E-1	-9.19466E0	-9.18927E0	4.88758E-3	9.29356E-2	2.7337E1	-3.26449E1	-3.26437E1	2.68058E1	1.1929E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-7.57527E-1	-7.35164E-1	-9.1944E0	-9.18932E0	5.34058E-3	9.29117E-2	2.73104E1	-3.26404E1	-3.26425E1	2.68092E1	1.1929E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-7.5748E-1	-7.35402E-1	-9.19437E0	-9.18939E0	5.19753E-3	9.30309E-2	2.73267E1	-3.27636E1	-3.27197E1	2.68046E1	1.1929E-7	2.51694E-3	2.51694E-3	6.33211E-3	3.00432E-1