[Scan]
initial_time=2015-12-22T18:22:30
final_time=2015-12-22T18:22:59
ip_count=19
run=1021
dataset=3
scan=104
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08746E-4
ql1_vset=
ql1_vmon=-7.57504E-1
ql1_imon=1.39062E-8
ql2_vset=
ql2_vmon=-7.35092E-1
ql2_imon=1.99438E-9
ql3_vset=
ql3_vmon=-9.19418E0
ql3_imon=3.94297E-10
ql4_vset=
ql4_vmon=-9.1893E0
ql4_imon=9.37223E-11
mult1=-5.97209E-9
mult2=-1.79391E-9
rf_tmon=-1.00802E-2
rf_agc=2.82594E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.69358E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62374E0
bslens_imon=2.64944E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20161E1
lens5a_imon=1.9674E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05065E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53725E1
cs_ef1b_imon=2.81745E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04681E1
cs_ea1_imon=2.50256E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37846E0
lens1_imon=2.49725E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.96445E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03968E1
cs_ea2_imon=1.53807E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84267E1
cs_ef1a_imon=2.93178E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.31865E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11332E1
os_restr1_imon=4.29061E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15087E1
os_ea1_imon=2.37974E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63774E1
os_ef1bup_imon=3.08643E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25387E0
cs_ionrep_imon=1.19793E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93229E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02122E1
cs_anode1_imon=2.94812E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.32648E-8
tplens_vset=1.4E-1
tplens_vmon=1.58421E0
tplens_imon=-4.97094E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26222E1
iondef3_imon=1.49347E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25166E1
iondef2_imon=1.57523E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98551E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.10784E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26862E0
ionrepsh_imon=1.76848E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33663E1
lens5b_imon=2.17127E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74322E1
cs_ef2b_imon=3.11493E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49455E0
os_ea2_imon=-7.27156E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00396E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71171E1
cs_ef2a_imon=3.16601E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03602E0
os_ef2alow_imon=-2.76225E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04181E-1
os_ef2bup_imon=-5.41039E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10892E1
os_restr2_imon=3.41554E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.3053E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0163E1
cs_anode2_imon=2.24264E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72309E1
iondef1_imon=1.09246E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.07878E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.70993E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.77707E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13072E0
cs_ionaccel_imon=-1.7996E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47077E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5622E1
einzel_imon=7.54188E-6
window_vset=0.0E0
window_vmon=1.4876E-1
window_imon=-1.26441E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.85863E1
mask2_imon=-8.1958E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.2259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.69145E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.00999E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.18114E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33313E1
os_fil1_imon=9.43515E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0668E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6375E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30798E1
cs_fil1_imon=9.95337E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62094E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63657E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.83804E-2
os_fil2_imon=-2.72711E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8776E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.6013E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37517E-1
cs_fil2_imon=-2.75607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.003E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22068E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.3682E-1
res40_imon=-2.54331E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-7.57599E-1	-7.35092E-1	-9.1944E0	-9.18927E0	5.17368E-3	9.3317E-2	2.7311E1	-3.26738E1	-3.26154E1	2.67962E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.03286E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-7.57575E-1	-7.35259E-1	-9.19442E0	-9.18906E0	5.07832E-3	9.31263E-2	2.7302E1	-3.26223E1	-3.25985E1	2.67914E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-7.57647E-1	-7.35259E-1	-9.19404E0	-9.18925E0	5.24521E-3	9.30309E-2	2.72839E1	-3.26567E1	-3.26455E1	2.6774E1	1.1929E-7	2.51915E-3	2.51915E-3	6.27954E-3	3.01475E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-7.57599E-1	-7.35354E-1	-9.19406E0	-9.18901E0	5.17368E-3	9.30786E-2	2.72939E1	-3.26691E1	-3.2613E1	2.6807E1	1.1929E-7	2.51364E-3	2.51364E-3	6.34789E-3	3.02124E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-7.57313E-1	-7.34949E-1	-9.19404E0	-9.18889E0	5.43594E-3	9.31025E-2	2.72913E1	-3.26464E1	-3.2638E1	2.68172E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-7.5748E-1	-7.3514E-1	-9.19411E0	-9.18908E0	5.34058E-3	9.33409E-2	2.73057E1	-3.26685E1	-3.26431E1	2.67998E1	1.1929E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-7.5748E-1	-7.34997E-1	-9.19404E0	-9.18899E0	5.03063E-3	9.34124E-2	2.72847E1	-3.26705E1	-3.26074E1	2.68316E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-7.57527E-1	-7.34615E-1	-9.19399E0	-9.18911E0	5.31673E-3	9.32932E-2	2.73177E1	-3.26464E1	-3.262E1	2.68298E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-7.57527E-1	-7.34496E-1	-9.19435E0	-9.18915E0	5.26905E-3	9.31263E-2	2.73009E1	-3.26729E1	-3.25737E1	2.68148E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-7.57122E-1	-7.3483E-1	-9.19418E0	-9.1888E0	5.29289E-3	9.32693E-2	2.73004E1	-3.26791E1	-3.26697E1	2.67734E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02133E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-7.57527E-1	-7.34925E-1	-9.19399E0	-9.18918E0	5.38826E-3	9.30786E-2	2.73205E1	-3.26419E1	-3.26311E1	2.6792E1	1.1929E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-7.57527E-1	-7.34568E-1	-9.19406E0	-9.18932E0	5.43594E-3	9.31263E-2	2.73738E1	-3.26648E1	-3.2654E1	2.67976E1	1.1929E-7	2.51783E-3	2.51783E-3	6.33863E-3	3.00494E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-7.57647E-1	-7.34854E-1	-9.19435E0	-9.18939E0	5.24521E-3	9.3174E-2	2.73177E1	-3.26873E1	-3.26416E1	2.68022E1	1.1929E-7	2.51527E-3	2.51527E-3	6.3016E-3	2.99811E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-7.57551E-1	-7.34639E-1	-9.19421E0	-9.18906E0	5.38826E-3	9.31025E-2	2.72898E1	-3.26732E1	-3.26467E1	2.68154E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.04322E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.57527E-1	-7.35044E-1	-9.19416E0	-9.18911E0	5.45979E-3	9.3174E-2	2.72821E1	-3.26496E1	-3.2659E1	2.68004E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.02396E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-7.57575E-1	-7.34949E-1	-9.19445E0	-9.18899E0	5.22137E-3	9.31978E-2	2.7332E1	-3.2675E1	-3.2585E1	2.68142E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00966E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-7.57551E-1	-7.35164E-1	-9.19435E0	-9.18922E0	5.29289E-3	9.32932E-2	2.73105E1	-3.2638E1	-3.26068E1	2.67944E1	1.1929E-7	2.51693E-3	2.51693E-3	6.29624E-3	2.99879E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-7.57527E-1	-7.34997E-1	-9.19442E0	-9.18899E0	5.34058E-3	9.32455E-2	2.72986E1	-3.26679E1	-3.26443E1	2.68146E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01609E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09348E0	-7.57432E-1	-7.34973E-1	-9.19423E0	-9.18949E0	5.07832E-3	9.32217E-2	2.73123E1	-3.26296E1	-3.26482E1	2.6798E1	1.19341E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-7.57504E-1	-7.35092E-1	-9.19418E0	-9.1893E0	5.00679E-3	9.32455E-2	2.72309E1	-3.25166E1	-3.26222E1	2.68082E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1