[Scan]
initial_time=2015-12-22T18:23:49
final_time=2015-12-22T18:24:18
ip_count=19
run=1021
dataset=3
scan=106
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-7.57432E-1
ql1_imon=1.39373E-8
ql2_vset=
ql2_vmon=-7.35188E-1
ql2_imon=2.0371E-9
ql3_vset=
ql3_vmon=-9.19461E0
ql3_imon=3.97718E-10
ql4_vset=
ql4_vmon=-9.18922E0
ql4_imon=1.14012E-10
mult1=-9.84746E-9
mult2=-2.19071E-9
rf_tmon=-7.31077E-3
rf_agc=3.09043E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.70418E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6367E0
bslens_imon=2.50531E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.96937E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53604E1
cs_ef1b_imon=2.84935E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05126E1
cs_ea1_imon=2.5148E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35994E0
lens1_imon=2.58101E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.95459E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0366E1
cs_ea2_imon=1.54723E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=2.94053E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.31646E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.28481E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15083E1
os_ea1_imon=2.35582E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64152E1
os_ef1bup_imon=3.09406E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=1.2008E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93251E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=2.9463E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.32415E-8
tplens_vset=1.4E-1
tplens_vmon=1.57294E0
tplens_imon=-3.20976E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26892E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26034E1
iondef2_imon=1.55841E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02977E2
lens6_imon=2.98101E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.11792E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24969E0
ionrepsh_imon=1.76605E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3385E1
lens5b_imon=2.17918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73853E1
cs_ef2b_imon=3.10524E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48462E0
os_ea2_imon=-8.00434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71011E1
cs_ef2a_imon=3.18236E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0942E0
os_ef2alow_imon=-2.82493E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04031E-1
os_ef2bup_imon=-5.51349E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11099E1
os_restr2_imon=3.41229E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.28919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.25254E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72437E1
iondef1_imon=1.09012E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.07404E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.81337E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.78076E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-1.84465E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47024E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56579E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=1.59078E-1
window_imon=-1.1671E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.85918E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92599E3
multa_neg_imon=8.01368E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.55367E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.27466E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25119E0
defgridb_imon=5.96606E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33312E1
os_fil1_imon=9.42823E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06879E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64047E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30796E1
cs_fil1_imon=9.97345E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61843E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63638E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93184E-2
os_fil2_imon=-2.76808E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.50737E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.62993E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.11859E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22079E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19342E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.67701E-1
res40_imon=-2.42489E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-7.5736E-1	-7.3514E-1	-9.19421E0	-9.18932E0	4.88758E-3	9.3317E-2	2.73183E1	-3.26272E1	-3.26374E1	2.6768E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9952E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-7.57337E-1	-7.35164E-1	-9.19399E0	-9.18908E0	5.34058E-3	9.30786E-2	2.73431E1	-3.26529E1	-3.26432E1	2.68028E1	1.1929E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-7.57289E-1	-7.3514E-1	-9.19387E0	-9.18915E0	5.19753E-3	9.31978E-2	2.72968E1	-3.26543E1	-3.26484E1	2.67848E1	1.1929E-7	2.53033E-3	2.53033E-3	6.3074E-3	2.99348E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-7.57337E-1	-7.35235E-1	-9.19416E0	-9.18906E0	5.03063E-3	9.3317E-2	2.72779E1	-3.26886E1	-3.26173E1	2.68163E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.97901E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-7.57313E-1	-7.35235E-1	-9.19425E0	-9.18918E0	5.14984E-3	9.32455E-2	2.73051E1	-3.2664E1	-3.2626E1	2.6792E1	1.1929E-7	2.52236E-3	2.52236E-3	6.31798E-3	3.006E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-7.57098E-1	-7.34973E-1	-9.19414E0	-9.18903E0	5.05447E-3	9.30071E-2	2.73111E1	-3.26482E1	-3.26609E1	2.68172E1	1.1929E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-7.57122E-1	-7.34973E-1	-9.19399E0	-9.18939E0	5.10216E-3	9.31263E-2	2.73305E1	-3.2626E1	-3.26644E1	2.68082E1	1.1929E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-7.57289E-1	-7.34782E-1	-9.19416E0	-9.1888E0	5.43594E-3	9.35555E-2	2.73111E1	-3.2638E1	-3.2641E1	2.68593E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-7.57265E-1	-7.34735E-1	-9.19433E0	-9.18896E0	5.26905E-3	9.36747E-2	2.73086E1	-3.26437E1	-3.2593E1	2.68117E1	1.1929E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-7.5717E-1	-7.35164E-1	-9.1943E0	-9.18903E0	5.17368E-3	9.31978E-2	2.72702E1	-3.26392E1	-3.26194E1	2.68011E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02133E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-7.57217E-1	-7.3514E-1	-9.19416E0	-9.18903E0	4.95911E-3	9.32217E-2	2.73502E1	-3.26615E1	-3.2638E1	2.67692E1	1.1929E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-7.57074E-1	-7.3514E-1	-9.19428E0	-9.18918E0	5.26905E-3	9.32693E-2	2.72933E1	-3.26455E1	-3.26667E1	2.68148E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-7.57289E-1	-7.35235E-1	-9.19423E0	-9.18922E0	5.19753E-3	9.31978E-2	2.73195E1	-3.26711E1	-3.26386E1	2.68064E1	1.1929E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.98665E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-7.57289E-1	-7.35736E-1	-9.19437E0	-9.18906E0	5.34058E-3	9.35793E-2	2.73003E1	-3.26753E1	-3.2641E1	2.68556E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-7.57217E-1	-7.35354E-1	-9.19414E0	-9.18915E0	5.14984E-3	9.33409E-2	2.7251E1	-3.26681E1	-3.26398E1	2.67986E1	1.1929E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-7.57527E-1	-7.35259E-1	-9.19399E0	-9.18941E0	5.19753E-3	9.35078E-2	2.72949E1	-3.27071E1	-3.26026E1	2.67968E1	1.1929E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.02659E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-7.57647E-1	-7.35092E-1	-9.19392E0	-9.18944E0	4.95911E-3	9.31501E-2	2.73151E1	-3.26549E1	-3.26331E1	2.68244E1	1.1929E-7	2.51593E-3	2.51593E-3	6.31555E-3	3.01414E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-7.57742E-1	-7.35044E-1	-9.1943E0	-9.18953E0	4.88758E-3	9.33409E-2	2.73004E1	-3.26915E1	-3.26107E1	2.68154E1					
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-7.57647E-1	-7.34973E-1	-9.19461E0	-9.18908E0	4.86374E-3	9.31978E-2	2.73339E1	-3.26652E1	-3.25813E1	2.68112E1	1.1929E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-7.57432E-1	-7.35188E-1	-9.19461E0	-9.18922E0	5.03063E-3	9.3174E-2	2.72437E1	-3.26034E1	-3.26892E1	2.68004E1	1.19342E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9978E-1