[Scan]
initial_time=2015-12-22T18:24:28
final_time=2015-12-22T18:24:58
ip_count=19
run=1021
dataset=3
scan=107
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-7.57146E-1
ql1_imon=1.39168E-8
ql2_vset=
ql2_vmon=-7.35164E-1
ql2_imon=2.12594E-9
ql3_vset=
ql3_vmon=-9.19397E0
ql3_imon=3.46541E-10
ql4_vset=
ql4_vmon=-9.18908E0
ql4_imon=1.09494E-10
mult1=-8.68004E-9
mult2=-2.56729E-9
rf_tmon=-6.11372E-3
rf_agc=3.14435E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=1.73521E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67695E0
bslens_imon=2.47286E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19953E1
lens5a_imon=1.95892E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=2.83422E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.01944E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05216E1
cs_ea1_imon=2.51588E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35033E0
lens1_imon=2.46565E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.96684E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03913E1
cs_ea2_imon=1.53606E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84664E1
cs_ef1a_imon=2.92179E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.32161E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=4.29382E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15408E1
os_ea1_imon=2.34609E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63996E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24309E0
cs_ionrep_imon=1.19359E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93272E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.96864E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.32322E-8
tplens_vset=1.4E-1
tplens_vmon=1.54049E0
tplens_imon=-4.0389E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26093E1
iondef3_imon=1.49784E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26428E1
iondef2_imon=1.57896E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.08157E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29055E0
ionrepsh_imon=1.77723E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33513E1
lens5b_imon=2.17666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.09983E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50024E0
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.0054E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05516E0
os_ef2alow_imon=-2.706E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13642E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.41013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.30036E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.23091E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72999E1
iondef1_imon=1.08436E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68024E1
iondef4_imon=1.07296E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.7595E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.78003E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02034E2
cs_ionfocb_imon=1.47057E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.54729E-6
window_vset=0.0E0
window_vmon=2.13138E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.85882E1
mask2_imon=-8.10312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.82261E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.36261E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.7195E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=6.20759E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.42432E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06849E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64205E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30774E1
cs_fil1_imon=9.95741E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62059E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64034E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02212E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.70084E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.34624E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.77601E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22173E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28667E-3
inlet_lpb_pmon=3.00494E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51575E-3
foreline_cvt_pmon=2.51575E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.42183E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-7.5736E-1	-7.35235E-1	-9.19459E0	-9.18944E0	4.86374E-3	9.32932E-2	2.73051E1	-3.26673E1	-3.2626E1	2.68117E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.03027E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09657E0	-7.57241E-1	-7.34806E-1	-9.19461E0	-9.1893E0	4.93526E-3	9.3317E-2	2.73344E1	-3.26611E1	-3.25989E1	2.68201E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01871E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-7.56955E-1	-7.35164E-1	-9.19449E0	-9.1893E0	5.26905E-3	9.34124E-2	2.73206E1	-3.26523E1	-3.26359E1	2.68091E1	1.1929E-7	2.51838E-3	2.51838E-3	6.30968E-3	2.99224E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-7.57098E-1	-7.35331E-1	-9.19442E0	-9.18932E0	5.05447E-3	9.33886E-2	2.72935E1	-3.267E1	-3.26067E1	2.6802E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-7.57146E-1	-7.34854E-1	-9.19464E0	-9.18934E0	5.19753E-3	9.34362E-2	2.72781E1	-3.26795E1	-3.25996E1	2.681E1	1.1929E-7	2.5071E-3	2.5071E-3	6.32808E-3	3.00132E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-7.57384E-1	-7.34854E-1	-9.19445E0	-9.1892E0	4.98295E-3	9.31263E-2	2.73122E1	-3.26832E1	-3.26083E1	2.68082E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-7.57289E-1	-7.35259E-1	-9.19442E0	-9.18922E0	4.86374E-3	9.30548E-2	2.72901E1	-3.26536E1	-3.26422E1	2.68262E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-7.5717E-1	-7.35068E-1	-9.19421E0	-9.18951E0	5.05447E-3	9.31025E-2	2.73234E1	-3.26661E1	-3.26425E1	2.68154E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00041E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-7.57194E-1	-7.35521E-1	-9.19437E0	-9.18918E0	5.05447E-3	9.33647E-2	2.73255E1	-3.26518E1	-3.2626E1	2.68018E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.02253E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-7.5717E-1	-7.35164E-1	-9.19437E0	-9.18918E0	4.98295E-3	9.3174E-2	2.73399E1	-3.26518E1	-3.26482E1	2.68166E1	1.1929E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.00041E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-7.57003E-1	-7.35068E-1	-9.19397E0	-9.18863E0	5.00679E-3	9.31263E-2	2.73141E1	-3.26482E1	-3.26332E1	2.68057E1	1.1929E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-7.5717E-1	-7.34973E-1	-9.19435E0	-9.18887E0	5.03063E-3	9.30548E-2	2.73249E1	-3.26524E1	-3.26332E1	2.6785E1	1.1929E-7	2.51248E-3	2.51248E-3	6.31858E-3	2.99083E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-7.57313E-1	-7.34925E-1	-9.19404E0	-9.18918E0	5.36442E-3	9.32455E-2	2.73236E1	-3.26612E1	-3.2626E1	2.67997E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01085E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-7.57146E-1	-7.3483E-1	-9.19404E0	-9.18882E0	5.03063E-3	9.34601E-2	2.72904E1	-3.26419E1	-3.26003E1	2.68136E1	1.1929E-7	2.51609E-3	2.51609E-3	6.32333E-3	3.02447E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-7.57051E-1	-7.35116E-1	-9.19418E0	-9.18906E0	5.34058E-3	9.31978E-2	2.73353E1	-3.26428E1	-3.25947E1	2.68094E1	1.1929E-7	2.51136E-3	2.51136E-3	6.32978E-3	3.00942E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-7.57122E-1	-7.35235E-1	-9.19437E0	-9.1892E0	4.98295E-3	9.31501E-2	2.73147E1	-3.26723E1	-3.2632E1	2.68238E1	1.1929E-7	2.52262E-3	2.52262E-3	6.3074E-3	2.98937E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-7.57241E-1	-7.35378E-1	-9.19409E0	-9.18908E0	5.17368E-3	9.30786E-2	2.72763E1	-3.26422E1	-3.26116E1	2.6792E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-7.57217E-1	-7.35188E-1	-9.19411E0	-9.18899E0	5.05447E-3	9.28402E-2	2.73015E1	-3.26717E1	-3.2611E1	2.6789E1	1.1929E-7	2.51007E-3	2.51007E-3	6.28552E-3	3.02133E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-7.57504E-1	-7.34973E-1	-9.19416E0	-9.18872E0	5.07832E-3	9.3317E-2	2.73252E1	-3.26999E1	-3.2635E1	2.68082E1	1.1929E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-7.57146E-1	-7.35164E-1	-9.19397E0	-9.18908E0	5.24521E-3	9.32217E-2	2.72999E1	-3.26428E1	-3.26093E1	2.68024E1	1.1929E-7	2.51575E-3	2.51575E-3	6.28667E-3	3.00494E-1