[Scan]
initial_time=2015-12-22T18:25:48
final_time=2015-12-22T18:26:17
ip_count=19
run=1021
dataset=3
scan=109
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-7.57003E-1
ql1_imon=1.38854E-8
ql2_vset=
ql2_vmon=-7.34973E-1
ql2_imon=2.07207E-9
ql3_vset=
ql3_vmon=-9.19442E0
ql3_imon=3.92961E-10
ql4_vset=
ql4_vmon=-9.1892E0
ql4_imon=1.08135E-10
mult1=-8.57245E-9
mult2=-2.42918E-9
rf_tmon=-6.55523E-3
rf_agc=3.15972E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.70832E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66975E0
bslens_imon=2.53264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19724E1
lens5a_imon=1.96103E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53737E1
cs_ef1b_imon=2.82509E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02284E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=2.49017E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35368E0
lens1_imon=2.74146E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.96931E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.52533E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8385E1
cs_ef1a_imon=2.91892E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=1.31342E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11315E1
os_restr1_imon=4.29929E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15158E1
os_ea1_imon=2.3539E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.07044E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=1.19015E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93296E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01728E1
cs_anode1_imon=2.96167E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.32439E-8
tplens_vset=1.4E-1
tplens_vmon=1.60073E0
tplens_imon=-5.92658E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26134E1
iondef3_imon=1.4917E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.58727E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98204E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.10798E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2751E0
ionrepsh_imon=1.77663E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33581E1
lens5b_imon=2.19675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74327E1
cs_ef2b_imon=3.11145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50812E0
os_ea2_imon=-7.5901E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00591E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71223E1
cs_ef2a_imon=3.17991E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09279E0
os_ef2alow_imon=-2.72749E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94335E-1
os_ef2bup_imon=-5.41039E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10886E1
os_restr2_imon=3.41171E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.30707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.24924E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72787E1
iondef1_imon=1.09777E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68175E1
iondef4_imon=1.07808E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71792E1
olens3_imon=5.68366E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.78471E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12203E0
cs_ionaccel_imon=-2.00117E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47094E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.62876E-6
window_vset=0.0E0
window_vmon=1.51077E-1
window_imon=-1.13235E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39046E-4
mask2_vset=0.0E0
mask2_vmon=-1.86118E1
mask2_imon=-6.66668E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.76035E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.51447E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.26129E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39079E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33323E1
os_fil1_imon=9.43758E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07074E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64167E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30788E1
cs_fil1_imon=9.97121E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62129E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63836E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90135E-2
os_fil2_imon=-2.70394E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83706E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.45449E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37018E-1
cs_fil2_imon=-2.64602E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.5973E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21997E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.02922E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.23874E-1
res40_imon=-2.55721E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-7.57098E-1	-7.35116E-1	-9.1944E0	-9.18901E0	5.14984E-3	9.31263E-2	2.73303E1	-3.26753E1	-3.2635E1	2.68142E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00302E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-7.5717E-1	-7.34997E-1	-9.19425E0	-9.18894E0	5.07832E-3	9.34124E-2	2.72831E1	-3.26597E1	-3.26383E1	2.68045E1	1.1929E-7	2.51096E-3	2.51096E-3	6.31278E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-7.56645E-1	-7.35021E-1	-9.1944E0	-9.18915E0	4.91142E-3	9.3174E-2	2.73086E1	-3.26366E1	-3.26337E1	2.68111E1	1.1929E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.02277E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-7.57027E-1	-7.35307E-1	-9.19433E0	-9.18913E0	5.55515E-3	9.3174E-2	2.7304E1	-3.26528E1	-3.26163E1	2.67891E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02133E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-7.56788E-1	-7.35092E-1	-9.19442E0	-9.18934E0	5.38826E-3	9.30071E-2	2.72855E1	-3.26493E1	-3.26334E1	2.68154E1	1.1929E-7	2.51886E-3	2.51886E-3	6.3282E-3	3.01981E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-7.56812E-1	-7.35188E-1	-9.1944E0	-9.18906E0	5.19753E-3	9.33886E-2	2.73075E1	-3.26585E1	-3.26034E1	2.68151E1	1.1929E-7	2.52473E-3	2.52473E-3	6.3074E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-7.56621E-1	-7.34997E-1	-9.19452E0	-9.1893E0	5.26905E-3	9.32217E-2	2.72775E1	-3.26747E1	-3.2596E1	2.68172E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.57051E-1	-7.35068E-1	-9.19449E0	-9.18932E0	5.36442E-3	9.30309E-2	2.73016E1	-3.26543E1	-3.26443E1	2.68128E1	1.1929E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.99613E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-7.57122E-1	-7.34925E-1	-9.19442E0	-9.18913E0	5.4121E-3	9.3317E-2	2.72979E1	-3.26843E1	-3.26308E1	2.68412E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.02769E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-7.57003E-1	-7.35164E-1	-9.19454E0	-9.1892E0	5.38826E-3	9.34124E-2	2.73195E1	-3.26915E1	-3.25773E1	2.68032E1	1.1929E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-7.57456E-1	-7.35378E-1	-9.19445E0	-9.18915E0	5.45979E-3	9.2864E-2	2.73153E1	-3.2641E1	-3.26422E1	2.67908E1	1.1929E-7	2.52538E-3	2.52538E-3	6.36244E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-7.5717E-1	-7.3514E-1	-9.1943E0	-9.18915E0	5.45979E-3	9.30071E-2	2.73111E1	-3.26705E1	-3.26705E1	2.68186E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-7.56836E-1	-7.34854E-1	-9.19418E0	-9.1893E0	5.48363E-3	9.32455E-2	2.72931E1	-3.26621E1	-3.25996E1	2.67848E1	1.1929E-7	2.52169E-3	2.52169E-3	6.35059E-3	3.0071E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-7.57217E-1	-7.34782E-1	-9.19425E0	-9.1893E0	5.36442E-3	9.30786E-2	2.73039E1	-3.26549E1	-3.2623E1	2.6801E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.01475E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-7.57313E-1	-7.34901E-1	-9.19449E0	-9.1892E0	5.07832E-3	9.29117E-2	2.73153E1	-3.26873E1	-3.26879E1	2.68064E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-7.57337E-1	-7.35092E-1	-9.19409E0	-9.18939E0	5.19753E-3	9.3174E-2	2.73227E1	-3.26573E1	-3.26089E1	2.67902E1	1.1929E-7	2.52473E-3	2.52473E-3	6.33538E-3	3.0041E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-7.56979E-1	-7.35092E-1	-9.19428E0	-9.18934E0	5.19753E-3	9.31025E-2	2.73204E1	-3.26782E1	-3.26336E1	2.67976E1	1.1929E-7	2.5165E-3	2.5165E-3	6.32273E-3	3.00149E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-7.57146E-1	-7.35068E-1	-9.19423E0	-9.18922E0	5.17368E-3	9.33409E-2	2.73155E1	-3.26793E1	-3.26162E1	2.68441E1	1.1929E-7	2.51758E-3	2.51758E-3	6.31902E-3	2.99811E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-7.57051E-1	-7.35283E-1	-9.19425E0	-9.18934E0	5.29289E-3	9.34124E-2	2.73496E1	-3.26945E1	-3.26464E1	2.68294E1	1.1929E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-7.57003E-1	-7.34973E-1	-9.19442E0	-9.1892E0	5.26905E-3	9.31501E-2	2.72787E1	-3.2647E1	-3.26134E1	2.68175E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.02922E-1