[Scan]
initial_time=2015-12-22T18:26:27
final_time=2015-12-22T18:26:56
ip_count=19
run=1021
dataset=3
scan=110
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-7.5717E-1
ql1_imon=1.39086E-8
ql2_vset=
ql2_vmon=-7.35188E-1
ql2_imon=2.03741E-9
ql3_vset=
ql3_vmon=-9.19433E0
ql3_imon=3.14581E-10
ql4_vset=
ql4_vmon=-9.18918E0
ql4_imon=1.01221E-10
mult1=-9.66486E-9
mult2=-2.7115E-9
rf_tmon=-3.02292E-3
rf_agc=3.45597E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.72781E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63318E0
bslens_imon=2.57865E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19807E1
lens5a_imon=1.97979E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12529E2
lens4a_imon=2.04778E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.538E1
cs_ef1b_imon=2.81953E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02156E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=2.493E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38554E0
lens1_imon=2.69545E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.95646E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.5317E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83635E1
cs_ef1a_imon=2.91197E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.32262E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11361E1
os_restr1_imon=4.29373E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=2.36735E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07461E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.18908E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93208E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.96167E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.32102E-8
tplens_vset=1.4E-1
tplens_vmon=1.55708E0
tplens_imon=-3.05966E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26366E1
iondef3_imon=1.48144E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26726E1
iondef2_imon=1.58267E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.9819E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.1286E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24738E0
ionrepsh_imon=1.77556E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3374E1
lens5b_imon=2.17056E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74907E1
cs_ef2b_imon=3.10763E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47449E0
os_ea2_imon=-7.05919E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00205E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71495E1
cs_ef2a_imon=3.17192E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08931E0
os_ef2alow_imon=-2.75182E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9028E-1
os_ef2bup_imon=-5.38606E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10845E1
os_restr2_imon=3.43257E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23112E2
cs_ionfoca_imon=6.28194E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01717E1
cs_anode2_imon=2.24299E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73098E1
iondef1_imon=1.09494E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.076E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.79492E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=7.80833E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12377E0
cs_ionaccel_imon=-1.88301E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47271E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56365E1
einzel_imon=7.51755E-6
window_vset=0.0E0
window_vmon=1.20379E-1
window_imon=-1.24356E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39122E-4
mask2_vset=0.0E0
mask2_vmon=-1.85956E1
mask2_imon=-8.61283E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.91608E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.91797E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.2259E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48824E0
defgridb_imon=5.95171E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.39721E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06669E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63952E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30807E1
cs_fil1_imon=9.95464E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62563E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64143E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.01532E-2
os_fil2_imon=-2.8082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91815E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.5279E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38266E-1
cs_fil2_imon=-2.62864E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.52404E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22177E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=2.99083E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51804E-3
foreline_cvt_pmon=2.51804E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.04964E-1
res40_imon=-2.44947E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=145
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-7.57432E-1	-7.35044E-1	-9.19428E0	-9.18908E0	5.29289E-3	9.30548E-2	2.73004E1	-3.2626E1	-3.2659E1	2.68034E1					
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-7.57098E-1	-7.35188E-1	-9.19421E0	-9.18896E0	5.10216E-3	9.30786E-2	2.73069E1	-3.26591E1	-3.26089E1	2.68157E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-7.56931E-1	-7.35021E-1	-9.19454E0	-9.18913E0	5.126E-3	9.33409E-2	2.72684E1	-3.2635E1	-3.2629E1	2.68157E1	1.1929E-7	2.51581E-3	2.51581E-3	6.29067E-3	3.0201E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-7.57051E-1	-7.35116E-1	-9.1944E0	-9.1892E0	5.31673E-3	9.31501E-2	2.73021E1	-3.26797E1	-3.26172E1	2.68196E1	1.1929E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01871E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09634E0	-7.57074E-1	-7.35235E-1	-9.19483E0	-9.18927E0	5.36442E-3	9.32455E-2	2.73219E1	-3.26711E1	-3.26585E1	2.68004E1	1.1929E-7	2.51393E-3	2.51393E-3	6.33919E-3	3.02875E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-7.57194E-1	-7.34973E-1	-9.19461E0	-9.18908E0	5.05447E-3	9.34601E-2	2.72952E1	-3.26909E1	-3.26532E1	2.6796E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-7.56979E-1	-7.34782E-1	-9.19435E0	-9.18906E0	4.98295E-3	9.33409E-2	2.73027E1	-3.26609E1	-3.2602E1	2.68382E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-7.5686E-1	-7.34901E-1	-9.19435E0	-9.18922E0	5.07832E-3	9.34124E-2	2.72624E1	-3.26218E1	-3.26128E1	2.6807E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.5686E-1	-7.35021E-1	-9.19409E0	-9.18927E0	5.34058E-3	9.32217E-2	2.72825E1	-3.26237E1	-3.26301E1	2.68186E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-7.56979E-1	-7.34901E-1	-9.19449E0	-9.18922E0	5.19753E-3	9.31978E-2	2.7332E1	-3.27417E1	-3.26309E1	2.68207E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.02511E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-7.56836E-1	-7.35044E-1	-9.19433E0	-9.1893E0	5.07832E-3	9.32217E-2	2.73087E1	-3.26825E1	-3.26314E1	2.67966E1	1.1929E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.02545E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-7.56645E-1	-7.35164E-1	-9.19428E0	-9.1893E0	5.26905E-3	9.34362E-2	2.72877E1	-3.26843E1	-3.26278E1	2.6777E1	1.1929E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-7.56907E-1	-7.35283E-1	-9.19471E0	-9.18932E0	5.45979E-3	9.32217E-2	2.73147E1	-3.26506E1	-3.265E1	2.68256E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-7.56788E-1	-7.35402E-1	-9.19456E0	-9.18939E0	5.43594E-3	9.30071E-2	2.73424E1	-3.26458E1	-3.262E1	2.68232E1	1.1929E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00041E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-7.57074E-1	-7.35211E-1	-9.1943E0	-9.18927E0	5.74589E-3	9.33886E-2	2.73195E1	-3.26344E1	-3.2635E1	2.68052E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-7.56741E-1	-7.35235E-1	-9.19442E0	-9.18927E0	5.22137E-3	9.30786E-2	2.73063E1	-3.27011E1	-3.26536E1	2.68136E1	1.1929E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00563E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-7.5686E-1	-7.35164E-1	-9.19464E0	-9.18927E0	5.10216E-3	9.33886E-2	2.73145E1	-3.26579E1	-3.26219E1	2.67998E1	1.1929E-7	2.52538E-3	2.52538E-3	6.29645E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-7.57194E-1	-7.35259E-1	-9.19449E0	-9.18941E0	5.31673E-3	9.36031E-2	2.73177E1	-3.26639E1	-3.2617E1	2.68172E1	1.1929E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01347E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-7.57051E-1	-7.35092E-1	-9.19471E0	-9.18949E0	5.24521E-3	9.34601E-2	2.73171E1	-3.26512E1	-3.26308E1	2.68112E1	1.1929E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-7.5717E-1	-7.35188E-1	-9.19433E0	-9.18918E0	5.05447E-3	9.33409E-2	2.73098E1	-3.26726E1	-3.26366E1	2.6798E1	1.1929E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99083E-1