[Scan]
initial_time=2015-12-22T18:27:07
final_time=2015-12-22T18:27:36
ip_count=19
run=1021
dataset=3
scan=111
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-7.56693E-1
ql1_imon=1.39143E-8
ql2_vset=
ql2_vmon=-7.3514E-1
ql2_imon=2.03078E-9
ql3_vset=
ql3_vmon=-9.19435E0
ql3_imon=3.22056E-10
ql4_vset=
ql4_vmon=-9.18941E0
ql4_imon=1.17338E-10
mult1=-9.31897E-9
mult2=-2.75254E-9
rf_tmon=-4.3502E-3
rf_agc=3.45533E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=1.74432E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63023E0
bslens_imon=2.45477E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.97908E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.04902E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=2.83638E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04858E1
cs_ea1_imon=2.52698E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40264E0
lens1_imon=2.5468E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6456E1
os_ef1alow_imon=2.96144E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04032E1
cs_ea2_imon=1.53807E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85373E1
cs_ef1a_imon=2.93765E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.3237E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=4.29274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14928E1
os_ea1_imon=2.36558E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.06811E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=1.18873E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93328E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.95387E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.32209E-8
tplens_vset=1.4E-1
tplens_vmon=1.57418E0
tplens_imon=-3.55518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26062E1
iondef3_imon=1.4825E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27161E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98211E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.06615E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26213E0
ionrepsh_imon=1.77415E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33728E1
lens5b_imon=2.16596E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48629E0
os_ea2_imon=-8.89968E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00386E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71047E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07378E0
os_ef2alow_imon=-2.65194E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=3.41482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30318E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.23956E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.10024E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68023E1
iondef4_imon=1.06827E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.74331E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.74756E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-2.00683E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=1.43461E-1
window_imon=-1.05538E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86044E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.60461E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.77993E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.02415E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62702E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33333E1
os_fil1_imon=9.3854E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07275E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64227E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30794E1
cs_fil1_imon=9.93386E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62456E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6417E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93934E-2
os_fil2_imon=-2.92425E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.50512E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38456E-1
cs_fil2_imon=-2.70201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1182E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22109E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.0254E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-7.56979E-1	-7.35331E-1	-9.19459E0	-9.1893E0	5.14984E-3	9.29832E-2	2.73015E1	-3.26753E1	-3.26074E1	2.68238E1	1.1929E-7	2.51793E-3	2.51793E-3	6.30471E-3	3.00197E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-7.57313E-1	-7.35283E-1	-9.19445E0	-9.18932E0	5.31673E-3	9.29117E-2	2.72861E1	-3.2656E1	-3.26187E1	2.68154E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-7.57241E-1	-7.3514E-1	-9.19478E0	-9.1892E0	5.45979E-3	9.31501E-2	2.7297E1	-3.26422E1	-3.26289E1	2.68148E1	1.1929E-7	2.51581E-3	2.51581E-3	6.34099E-3	3.0041E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-7.57313E-1	-7.35402E-1	-9.19452E0	-9.18918E0	5.36442E-3	9.34362E-2	2.73228E1	-3.26585E1	-3.26213E1	2.6803E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-7.57408E-1	-7.35354E-1	-9.19454E0	-9.18891E0	4.64916E-3	9.30786E-2	2.73099E1	-3.26747E1	-3.26038E1	2.68052E1	1.1929E-7	2.51603E-3	2.51603E-3	6.30212E-3	3.01356E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-7.57194E-1	-7.35545E-1	-9.19452E0	-9.18903E0	5.26905E-3	9.31501E-2	2.72567E1	-3.26805E1	-3.26034E1	2.681E1	1.1929E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.00144E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-7.57027E-1	-7.35235E-1	-9.19447E0	-9.18911E0	5.19753E-3	9.31025E-2	2.73039E1	-3.26732E1	-3.26526E1	2.68112E1	1.1929E-7	2.52154E-3	2.52154E-3	6.3074E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-7.57217E-1	-7.35426E-1	-9.19464E0	-9.18941E0	5.03063E-3	9.33647E-2	2.73155E1	-3.26596E1	-3.26341E1	2.67845E1	1.1929E-7	2.51162E-3	2.51162E-3	6.31779E-3	3.01485E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-7.57289E-1	-7.34997E-1	-9.19478E0	-9.18915E0	5.26905E-3	9.3174E-2	2.72995E1	-3.2689E1	-3.26216E1	2.6802E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-7.57146E-1	-7.35617E-1	-9.19445E0	-9.18932E0	5.14984E-3	9.32217E-2	2.72696E1	-3.26212E1	-3.26609E1	2.68094E1	1.1929E-7	2.51498E-3	2.51498E-3	6.3131E-3	3.01337E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-7.57027E-1	-7.35211E-1	-9.19454E0	-9.18925E0	5.07832E-3	9.33886E-2	2.73063E1	-3.26706E1	-3.26289E1	2.68134E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-7.56812E-1	-7.35331E-1	-9.1944E0	-9.1892E0	4.95911E-3	9.33409E-2	2.73032E1	-3.26859E1	-3.25898E1	2.68207E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-7.57146E-1	-7.35736E-1	-9.19464E0	-9.18932E0	4.98295E-3	9.3317E-2	2.73009E1	-3.26524E1	-3.26536E1	2.68016E1	1.1929E-7	2.51384E-3	2.51384E-3	6.31879E-3	3.02699E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-7.56979E-1	-7.35164E-1	-9.19433E0	-9.18915E0	5.14984E-3	9.34362E-2	2.73228E1	-3.2682E1	-3.2652E1	2.68047E1	1.1929E-7	2.51847E-3	2.51847E-3	6.35059E-3	3.0071E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-7.56764E-1	-7.35021E-1	-9.19414E0	-9.18939E0	5.45979E-3	9.34362E-2	2.72732E1	-3.26647E1	-3.26522E1	2.68186E1	1.1929E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-7.57003E-1	-7.35235E-1	-9.19437E0	-9.18977E0	5.4121E-3	9.31978E-2	2.73528E1	-3.26508E1	-3.26228E1	2.68113E1	1.1929E-7	2.51575E-3	2.51575E-3	6.29703E-3	2.99753E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-7.57074E-1	-7.35617E-1	-9.19428E0	-9.18934E0	5.43594E-3	9.3317E-2	2.73033E1	-3.26416E1	-3.25888E1	2.68232E1	1.1929E-7	2.51911E-3	2.51911E-3	6.30149E-3	3.02459E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-7.57074E-1	-7.35068E-1	-9.1943E0	-9.18961E0	5.14984E-3	9.34362E-2	2.7324E1	-3.26708E1	-3.26484E1	2.68058E1	1.1929E-7	2.52384E-3	2.52384E-3	6.32896E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-7.56764E-1	-7.35116E-1	-9.1944E0	-9.18911E0	5.10216E-3	9.35078E-2	2.73311E1	-3.26467E1	-3.26231E1	2.6816E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-7.56693E-1	-7.3514E-1	-9.19435E0	-9.18941E0	5.38826E-3	9.30786E-2	2.73021E1	-3.27161E1	-3.26062E1	2.68023E1	1.1929E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01085E-1