[Scan]
initial_time=2015-12-22T18:28:24
final_time=2015-12-22T18:28:47
ip_count=19
run=1021
dataset=3
scan=113
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-7.57313E-1
ql1_imon=1.39269E-8
ql2_vset=
ql2_vmon=-7.34901E-1
ql2_imon=2.07429E-9
ql3_vset=
ql3_vmon=-9.19447E0
ql3_imon=2.70057E-10
ql4_vset=
ql4_vmon=-9.18913E0
ql4_imon=1.25241E-10
mult1=-9.20382E-9
mult2=-2.77421E-9
rf_tmon=-5.13477E-3
rf_agc=3.29552E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.73993E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63082E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19877E1
lens5a_imon=1.9766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.05008E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53609E1
cs_ef1b_imon=2.83343E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02163E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0533E1
cs_ea1_imon=2.50539E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40441E0
lens1_imon=2.55034E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64718E1
os_ef1alow_imon=2.9641E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03549E1
cs_ea2_imon=1.52143E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84081E1
cs_ef1a_imon=2.9217E-5
olens2_vset=9.7E-1
olens2_vmon=9.70769E-1
olens2_imon=1.32176E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.115E1
os_restr1_imon=4.29478E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1494E1
os_ea1_imon=2.35921E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63519E1
os_ef1bup_imon=3.08295E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=1.19404E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.9324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01937E1
cs_anode1_imon=2.96236E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.33449E-8
tplens_vset=1.4E-1
tplens_vmon=1.57654E0
tplens_imon=-2.88269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26349E1
iondef3_imon=1.48675E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26862E1
iondef2_imon=1.57346E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98187E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.12612E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24856E0
ionrepsh_imon=1.77415E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.1518E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75063E1
cs_ef2b_imon=3.12466E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4798E0
os_ea2_imon=-5.96198E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00364E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71165E1
cs_ef2a_imon=3.16879E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07773E0
os_ef2alow_imon=-2.797E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93756E-1
os_ef2bup_imon=-5.50422E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10874E1
os_restr2_imon=3.42666E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23097E2
cs_ionfoca_imon=6.32512E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01919E1
cs_anode2_imon=2.23986E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73092E1
iondef1_imon=1.07901E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.08468E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=5.76816E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.75311E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12551E0
cs_ionaccel_imon=-1.87606E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02048E2
cs_ionfocb_imon=1.47247E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56376E1
einzel_imon=7.43415E-6
window_vset=0.0E0
window_vmon=1.80616E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39008E-4
mask2_vset=0.0E0
mask2_vmon=-1.86309E1
mask2_imon=-8.02203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.36393E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.76931E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.04185E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19295E0
defgridb_imon=5.96233E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33301E1
os_fil1_imon=9.41592E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0686E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6435E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30812E1
cs_fil1_imon=9.95835E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62314E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64118E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.76206E-2
os_fil2_imon=-2.89508E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79072E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.29883E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37393E-1
cs_fil2_imon=-2.73869E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35028E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22041E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.8585E-1
res40_imon=-2.58501E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-7.57456E-1	-7.35402E-1	-9.1944E0	-9.18937E0	5.10216E-3	9.30786E-2	2.73045E1	-3.2685E1	-3.26343E1	2.67998E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.03286E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-7.57265E-1	-7.35283E-1	-9.19423E0	-9.1892E0	4.95911E-3	9.3317E-2	2.7299E1	-3.26462E1	-3.26401E1	2.68214E1	1.1929E-7	2.51739E-3	2.51739E-3	6.34518E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-7.57146E-1	-7.35164E-1	-9.19423E0	-9.18908E0	4.95911E-3	9.31263E-2	2.73287E1	-3.26579E1	-3.26549E1	2.67914E1	1.1929E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.00942E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-7.56955E-1	-7.35331E-1	-9.19437E0	-9.18906E0	4.95911E-3	9.31263E-2	2.73594E1	-3.26744E1	-3.26083E1	2.68215E1	1.1929E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01085E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-7.57146E-1	-7.35092E-1	-9.19392E0	-9.18891E0	5.126E-3	9.31978E-2	2.73123E1	-3.26518E1	-3.26374E1	2.68088E1	1.1929E-7	2.52025E-3	2.52025E-3	6.29684E-3	2.99845E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-7.57194E-1	-7.35426E-1	-9.19414E0	-9.18922E0	4.93526E-3	9.31978E-2	2.7285E1	-3.26531E1	-3.2626E1	2.68172E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-7.57217E-1	-7.35402E-1	-9.19411E0	-9.18918E0	5.22137E-3	9.34362E-2	2.73123E1	-3.26332E1	-3.2641E1	2.68034E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-7.57265E-1	-7.35545E-1	-9.19452E0	-9.18908E0	5.05447E-3	9.33409E-2	2.73255E1	-3.26458E1	-3.26368E1	2.68124E1	1.1929E-7	2.52647E-3	2.52647E-3	6.32386E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-7.5717E-1	-7.35307E-1	-9.19428E0	-9.18911E0	5.26905E-3	9.35555E-2	2.73216E1	-3.26383E1	-3.2607E1	2.68172E1	1.1929E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.01995E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-7.57551E-1	-7.3545E-1	-9.19442E0	-9.18903E0	4.95911E-3	9.32217E-2	2.73195E1	-3.27384E1	-3.25996E1	2.68154E1	1.1929E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.97762E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-7.57146E-1	-7.35164E-1	-9.19423E0	-9.18911E0	5.31673E-3	9.34124E-2	2.73202E1	-3.26407E1	-3.26295E1	2.67959E1	1.1929E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-7.57098E-1	-7.35307E-1	-9.1944E0	-9.18915E0	5.43594E-3	9.32932E-2	2.73319E1	-3.26996E1	-3.26092E1	2.6802E1	1.1929E-7	2.51458E-3	2.51458E-3	6.31941E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-7.57217E-1	-7.35211E-1	-9.19445E0	-9.18925E0	5.14984E-3	9.33886E-2	2.73115E1	-3.26171E1	-3.26266E1	2.68094E1	1.1929E-7	2.51498E-3	2.51498E-3	6.3245E-3	3.01881E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-7.57074E-1	-7.35283E-1	-9.19456E0	-9.1893E0	5.07832E-3	9.34124E-2	2.7263E1	-3.26807E1	-3.2605E1	2.67962E1	1.1929E-7	2.51611E-3	2.51611E-3	6.27335E-3	3.01065E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-7.57146E-1	-7.34997E-1	-9.19425E0	-9.1892E0	5.07832E-3	9.3174E-2	2.72913E1	-3.27005E1	-3.26416E1	2.6792E1	1.1929E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-7.56979E-1	-7.34973E-1	-9.19459E0	-9.18932E0	5.05447E-3	9.33886E-2	2.72892E1	-3.26627E1	-3.26762E1	2.68051E1	1.1929E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.01209E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-7.57074E-1	-7.35331E-1	-9.19421E0	-9.1892E0	4.74453E-3	9.33886E-2	2.72931E1	-3.27023E1	-3.26296E1	2.67782E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-7.57074E-1	-7.3514E-1	-9.19418E0	-9.18941E0	5.36442E-3	9.33647E-2	2.73405E1	-3.26785E1	-3.26124E1	2.6803E1	1.1929E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-7.56955E-1	-7.3545E-1	-9.19461E0	-9.18925E0	5.19753E-3	9.33647E-2	2.73502E1	-3.27023E1	-3.26176E1	2.67968E1	1.1929E-7	2.51096E-3	2.51096E-3	6.31278E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-7.57313E-1	-7.34901E-1	-9.19447E0	-9.18913E0	4.95911E-3	9.32455E-2	2.73092E1	-3.26862E1	-3.26349E1	2.68154E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02396E-1