[Scan]
initial_time=2015-12-22T18:28:55
final_time=2015-12-22T18:29:18
ip_count=19
run=1021
dataset=3
scan=114
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-7.57289E-1
ql1_imon=1.39005E-8
ql2_vset=
ql2_vmon=-7.35521E-1
ql2_imon=2.0528E-9
ql3_vset=
ql3_vmon=-9.19433E0
ql3_imon=3.39854E-10
ql4_vset=
ql4_vmon=-9.18913E0
ql4_imon=1.20723E-10
mult1=-9.1504E-9
mult2=-2.63478E-9
rf_tmon=-4.45835E-3
rf_agc=3.34537E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.72632E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62787E0
bslens_imon=2.43E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19842E1
lens5a_imon=1.97271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.04966E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=2.8407E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0487E1
cs_ea1_imon=2.51636E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37905E0
lens1_imon=2.47601E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.9636E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03625E1
cs_ea2_imon=1.52533E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84268E1
cs_ef1a_imon=2.92107E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.33056E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1155E1
os_restr1_imon=4.2877E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15536E1
os_ea1_imon=2.36275E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26744E0
cs_ionrep_imon=1.19156E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93271E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02121E1
cs_anode1_imon=2.95063E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.33083E-8
tplens_vset=1.4E-1
tplens_vmon=1.58834E0
tplens_imon=-2.35178E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2617E1
iondef3_imon=1.4871E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.57205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98243E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.09183E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28159E0
ionrepsh_imon=1.78689E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.16773E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7479E1
cs_ef2b_imon=3.11641E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.468E0
os_ea2_imon=-7.12998E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00478E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.16686E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04435E0
os_ef2alow_imon=-2.69519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96823E-1
os_ef2bup_imon=-5.58917E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=3.42563E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23109E2
cs_ionfoca_imon=6.29645E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01929E1
cs_anode2_imon=2.24677E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.08963E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.07836E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.72504E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.80379E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10011E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47183E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56117E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=1.59078E-1
window_imon=-1.21035E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.85803E1
mask2_imon=-8.10312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.60107E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.33043E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.08786E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.1457E0
defgridb_imon=6.1039E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33314E1
os_fil1_imon=9.43135E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06368E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64218E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30808E1
cs_fil1_imon=9.9496E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62846E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64017E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.8507E-2
os_fil2_imon=-2.85818E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.32921E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-3.02636E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22181E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34982E-3
inlet_lpb_pmon=3.01104E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.92328E-1
res40_imon=-2.64833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-7.57241E-1	-7.35641E-1	-9.1943E0	-9.18918E0	5.36442E-3	9.31025E-2	2.73075E1	-3.26585E1	-3.26296E1	2.68175E1	1.1929E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.99941E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-7.5686E-1	-7.35354E-1	-9.19414E0	-9.1893E0	5.17368E-3	9.32455E-2	2.73124E1	-3.26309E1	-3.2637E1	2.67976E1	1.1929E-7	2.51847E-3	2.51847E-3	6.36144E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-7.5717E-1	-7.3545E-1	-9.19445E0	-9.18913E0	5.126E-3	9.30548E-2	2.73169E1	-3.26467E1	-3.26331E1	2.67873E1	1.1929E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.99348E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09565E0	-7.5736E-1	-7.3514E-1	-9.19452E0	-9.18901E0	5.38826E-3	9.31025E-2	2.73033E1	-3.26366E1	-3.26225E1	2.68064E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.97394E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-7.57313E-1	-7.35164E-1	-9.19442E0	-9.18918E0	5.05447E-3	9.29832E-2	2.73159E1	-3.26735E1	-3.25978E1	2.67962E1	1.1929E-7	2.51538E-3	2.51538E-3	6.3074E-3	3.0012E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-7.57098E-1	-7.35378E-1	-9.1944E0	-9.18896E0	5.07832E-3	9.31263E-2	2.73004E1	-3.26526E1	-3.26113E1	2.67966E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-7.5717E-1	-7.35354E-1	-9.19423E0	-9.18899E0	5.19753E-3	9.30786E-2	2.73027E1	-3.26326E1	-3.26398E1	2.67992E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.02769E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-7.57408E-1	-7.35259E-1	-9.19442E0	-9.18908E0	5.00679E-3	9.31978E-2	2.72967E1	-3.26272E1	-3.26362E1	2.67992E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-7.57027E-1	-7.35474E-1	-9.1943E0	-9.18887E0	5.10216E-3	9.2864E-2	2.73099E1	-3.26939E1	-3.2647E1	2.68292E1	1.1929E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.02922E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-7.57051E-1	-7.35402E-1	-9.19433E0	-9.18889E0	5.29289E-3	9.30071E-2	2.72827E1	-3.26425E1	-3.26319E1	2.6801E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.03185E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-7.56788E-1	-7.35402E-1	-9.19421E0	-9.18906E0	5.34058E-3	9.29594E-2	2.72991E1	-3.26615E1	-3.2623E1	2.67974E1	1.19341E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-7.56788E-1	-7.35378E-1	-9.19418E0	-9.18908E0	5.38826E-3	9.30786E-2	2.73314E1	-3.27013E1	-3.26327E1	2.678E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-7.56907E-1	-7.35044E-1	-9.19433E0	-9.1892E0	5.10216E-3	9.30309E-2	2.73004E1	-3.26307E1	-3.2685E1	2.6807E1	1.1929E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.00942E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-7.56693E-1	-7.35235E-1	-9.19418E0	-9.18903E0	5.24521E-3	9.29832E-2	2.72873E1	-3.27087E1	-3.25979E1	2.68058E1	1.1929E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00824E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-7.57098E-1	-7.35188E-1	-9.19435E0	-9.18915E0	5.74589E-3	9.31025E-2	2.72768E1	-3.2639E1	-3.2675E1	2.67998E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09665E0	-7.57074E-1	-7.35044E-1	-9.19404E0	-9.18932E0	5.60284E-3	9.30309E-2	2.73291E1	-3.2635E1	-3.25888E1	2.6837E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00966E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-7.56812E-1	-7.35354E-1	-9.19404E0	-9.18925E0	5.31673E-3	9.30071E-2	2.73099E1	-3.26446E1	-3.26128E1	2.68046E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-7.56979E-1	-7.35188E-1	-9.19394E0	-9.18894E0	5.03063E-3	9.31501E-2	2.73087E1	-3.2638E1	-3.26278E1	2.67908E1	1.1929E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.0041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-7.57265E-1	-7.34973E-1	-9.19385E0	-9.18915E0	5.05447E-3	9.31263E-2	2.72576E1	-3.27042E1	-3.25936E1	2.68233E1	1.1929E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-7.57289E-1	-7.35521E-1	-9.19433E0	-9.18913E0	4.95911E-3	9.29832E-2	2.73021E1	-3.26747E1	-3.2617E1	2.68136E1	1.1929E-7	2.51709E-3	2.51709E-3	6.34982E-3	3.01104E-1