[Scan]
initial_time=2015-12-22T18:29:26
final_time=2015-12-22T18:29:49
ip_count=19
run=1021
dataset=3
scan=115
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-7.56812E-1
ql1_imon=1.38779E-8
ql2_vset=
ql2_vmon=-7.35283E-1
ql2_imon=2.12197E-9
ql3_vset=
ql3_vmon=-9.19464E0
ql3_imon=2.80154E-10
ql4_vset=
ql4_vmon=-9.18889E0
ql4_imon=1.33872E-10
mult1=-9.82467E-9
mult2=-2.7266E-9
rf_tmon=-4.55448E-3
rf_agc=3.32855E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.72182E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66149E0
bslens_imon=2.33443E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.98474E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05019E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53546E1
cs_ef1b_imon=2.82891E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04905E1
cs_ea1_imon=2.48451E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39439E0
lens1_imon=2.58219E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64927E1
os_ef1alow_imon=2.96723E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04186E1
cs_ea2_imon=1.5363E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84197E1
cs_ef1a_imon=2.92275E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.32695E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.29999E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15406E1
os_ea1_imon=2.37479E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63537E1
os_ef1bup_imon=3.06732E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26803E0
cs_ionrep_imon=1.2128E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02047E1
cs_anode1_imon=2.96514E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.33374E-8
tplens_vset=1.4E-1
tplens_vmon=1.59778E0
tplens_imon=-4.617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.48887E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.58904E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98477E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.12862E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27982E0
ionrepsh_imon=1.76459E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33215E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74924E1
cs_ef2b_imon=3.11145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51755E0
os_ea2_imon=-9.53678E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06049E2
lens4b_imon=2.00456E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71298E1
cs_ef2a_imon=3.18061E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0505E0
os_ef2alow_imon=-2.8109E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87963E-1
os_ef2bup_imon=-5.36174E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11054E1
os_restr2_imon=3.41276E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23097E2
cs_ionfoca_imon=6.27344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01861E1
cs_anode2_imon=2.24299E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73381E1
iondef1_imon=1.07688E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.0687E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.78562E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.78991E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11972E0
cs_ionaccel_imon=-1.8413E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47098E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56197E1
einzel_imon=7.62181E-6
window_vset=0.0E0
window_vmon=1.15166E-1
window_imon=-1.17058E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.38987E-4
mask2_vset=0.0E0
mask2_vmon=-1.86066E1
mask2_imon=-8.43906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.06308E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93681E3
defgrida_imon=6.37998E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=6.96398E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23134E0
defgridb_imon=6.32335E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33318E1
os_fil1_imon=9.42548E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08175E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64133E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30812E1
cs_fil1_imon=9.947E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6291E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64124E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.92668E-2
os_fil2_imon=-2.88349E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.69226E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.50891E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35894E-1
cs_fil2_imon=-2.24057E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09567E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22116E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3445E-3
inlet_lpb_pmon=3.03637E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52131E-3
foreline_cvt_pmon=2.52131E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.05543E-1
res40_imon=-2.56416E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-7.57289E-1	-7.34687E-1	-9.19447E0	-9.18894E0	5.29289E-3	9.31978E-2	2.73171E1	-3.26116E1	-3.26386E1	2.6801E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9943E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-7.57146E-1	-7.34997E-1	-9.19445E0	-9.18901E0	5.26905E-3	9.32217E-2	2.73132E1	-3.26747E1	-3.25998E1	2.67995E1	1.1929E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-7.57432E-1	-7.35044E-1	-9.19447E0	-9.18899E0	5.07832E-3	9.31263E-2	2.72968E1	-3.26667E1	-3.26225E1	2.68175E1	1.19344E-7	2.51498E-3	2.51498E-3	6.33021E-3	3.00794E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-7.57098E-1	-7.34878E-1	-9.19459E0	-9.1892E0	5.57899E-3	9.32693E-2	2.72927E1	-3.26649E1	-3.26166E1	2.67842E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-7.57098E-1	-7.34806E-1	-9.19447E0	-9.18903E0	5.57899E-3	9.30786E-2	2.73099E1	-3.26639E1	-3.2647E1	2.68328E1	1.1929E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-7.57146E-1	-7.35116E-1	-9.19449E0	-9.18903E0	5.60284E-3	9.32932E-2	2.72985E1	-3.26579E1	-3.2614E1	2.67956E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-7.57051E-1	-7.35283E-1	-9.19447E0	-9.18901E0	5.43594E-3	9.32455E-2	2.73169E1	-3.26832E1	-3.2616E1	2.67956E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.57146E-1	-7.34949E-1	-9.19433E0	-9.18908E0	5.74589E-3	9.33886E-2	2.72985E1	-3.26735E1	-3.26452E1	2.68256E1	1.1929E-7	2.5208E-3	2.5208E-3	6.31827E-3	3.01414E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-7.57122E-1	-7.35283E-1	-9.19461E0	-9.18896E0	5.48363E-3	9.33886E-2	2.73125E1	-3.26357E1	-3.26294E1	2.67995E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-7.56931E-1	-7.35688E-1	-9.19459E0	-9.18901E0	5.17368E-3	9.32455E-2	2.7317E1	-3.26978E1	-3.26722E1	2.68026E1	1.1929E-7	2.51783E-3	2.51783E-3	6.31779E-3	2.99753E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-7.57146E-1	-7.35235E-1	-9.1949E0	-9.18937E0	5.24521E-3	9.34124E-2	2.73205E1	-3.26311E1	-3.26243E1	2.68099E1	1.1929E-7	2.52066E-3	2.52066E-3	6.30171E-3	2.98361E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09356E0	-7.56979E-1	-7.35402E-1	-9.19485E0	-9.1892E0	5.26905E-3	9.32693E-2	2.72828E1	-3.26578E1	-3.26076E1	2.68037E1	1.1929E-7	2.51472E-3	2.51472E-3	6.31779E-3	2.98276E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-7.56979E-1	-7.35617E-1	-9.19483E0	-9.18915E0	5.31673E-3	9.31263E-2	2.73351E1	-3.26663E1	-3.26284E1	2.6792E1	1.1929E-7	2.5199E-3	2.5199E-3	6.29581E-3	3.00363E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-7.57241E-1	-7.35593E-1	-9.19452E0	-9.18918E0	5.26905E-3	9.34124E-2	2.73087E1	-3.26506E1	-3.26188E1	2.6813E1	1.1929E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.04241E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-7.57051E-1	-7.35259E-1	-9.19447E0	-9.18925E0	5.24521E-3	9.33647E-2	2.73021E1	-3.26434E1	-3.26591E1	2.68058E1	1.1929E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-7.56907E-1	-7.35044E-1	-9.19423E0	-9.18908E0	5.48363E-3	9.33647E-2	2.73181E1	-3.26726E1	-3.25841E1	2.68123E1	1.1929E-7	2.51443E-3	2.51443E-3	6.30466E-3	2.9939E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-7.56931E-1	-7.34639E-1	-9.19461E0	-9.18937E0	5.17368E-3	9.31501E-2	2.73315E1	-3.26867E1	-3.26404E1	2.68046E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-7.56645E-1	-7.34687E-1	-9.19459E0	-9.18934E0	5.53131E-3	9.32217E-2	2.73081E1	-3.26488E1	-3.2602E1	2.68034E1	1.1929E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.98665E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-7.56931E-1	-7.35211E-1	-9.19466E0	-9.18908E0	5.4121E-3	9.32932E-2	2.7297E1	-3.26683E1	-3.2564E1	2.68047E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01871E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-7.56812E-1	-7.35283E-1	-9.19464E0	-9.18889E0	5.126E-3	9.32932E-2	2.73381E1	-3.26795E1	-3.26302E1	2.68016E1	1.1929E-7	2.52131E-3	2.52131E-3	6.3445E-3	3.03637E-1