[Scan]
initial_time=2015-12-22T18:29:58
final_time=2015-12-22T18:30:21
ip_count=19
run=1021
dataset=3
scan=116
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08736E-4
ql1_vset=
ql1_vmon=-7.5748E-1
ql1_imon=1.3904E-8
ql2_vset=
ql2_vmon=-7.34878E-1
ql2_imon=2.06896E-9
ql3_vset=
ql3_vmon=-9.19425E0
ql3_imon=3.19982E-10
ql4_vset=
ql4_vmon=-9.18953E0
ql4_imon=9.93252E-11
mult1=-9.41529E-9
mult2=-2.69466E-9
rf_tmon=-5.57589E-3
rf_agc=3.24323E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=1.74928E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66373E0
bslens_imon=2.64951E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.97009E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.04952E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=2.82881E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.01897E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.50939E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3293E0
lens1_imon=2.66393E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.96432E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.52488E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=2.92432E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.32987E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.30536E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1569E1
os_ea1_imon=2.35871E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63437E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26952E0
cs_ionrep_imon=1.19034E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91838E2
cs_nozzle_imon=1.93297E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=2.96937E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.32295E-8
tplens_vset=1.4E-1
tplens_vmon=1.56633E0
tplens_imon=-5.01223E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26362E1
iondef3_imon=1.49821E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.55769E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98317E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.14243E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30978E0
ionrepsh_imon=1.78696E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33556E1
lens5b_imon=2.18891E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47741E0
os_ea2_imon=-8.22064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.16866E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05756E0
os_ef2alow_imon=-2.69879E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.41301E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.29424E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.24389E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7349E1
iondef1_imon=1.0757E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.08161E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.76863E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.78846E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.90592E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47147E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56585E1
einzel_imon=7.51125E-6
window_vset=0.0E0
window_vmon=1.53072E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.38983E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.39362E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.37342E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=6.98987E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32036E0
defgridb_imon=6.09224E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33317E1
os_fil1_imon=9.44096E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06939E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6388E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30792E1
cs_fil1_imon=9.96594E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6275E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64412E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97053E-2
os_fil2_imon=-2.73204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79694E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.61048E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05813E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22208E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.2085E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-7.57289E-1	-7.35283E-1	-9.19445E0	-9.18915E0	5.05447E-3	9.31501E-2	2.72827E1	-3.26832E1	-3.26561E1	2.68196E1	1.1929E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00563E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-7.57408E-1	-7.35211E-1	-9.1943E0	-9.18925E0	5.19753E-3	9.32455E-2	2.72959E1	-3.26462E1	-3.26554E1	2.68256E1	1.19392E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-7.57217E-1	-7.34901E-1	-9.19416E0	-9.18953E0	5.26905E-3	9.32217E-2	2.72892E1	-3.2662E1	-3.26213E1	2.681E1	1.19554E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.00942E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-7.56931E-1	-7.34878E-1	-9.19442E0	-9.18925E0	5.36442E-3	9.32932E-2	2.73103E1	-3.2655E1	-3.26283E1	2.68117E1	1.19443E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-7.5748E-1	-7.34878E-1	-9.19447E0	-9.18946E0	5.36442E-3	9.31501E-2	2.72986E1	-3.26408E1	-3.26372E1	2.68146E1	1.1929E-7	2.51919E-3	2.51919E-3	6.29684E-3	3.00097E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-7.57265E-1	-7.34854E-1	-9.19437E0	-9.18951E0	5.14984E-3	9.31978E-2	2.73033E1	-3.26963E1	-3.26398E1	2.68094E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-7.57027E-1	-7.34711E-1	-9.1944E0	-9.18918E0	5.50747E-3	9.31978E-2	2.72775E1	-3.26771E1	-3.26182E1	2.68082E1	1.1929E-7	2.52209E-3	2.52209E-3	6.28552E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-7.56979E-1	-7.3483E-1	-9.19406E0	-9.18937E0	5.29289E-3	9.33409E-2	2.73285E1	-3.26723E1	-3.26392E1	2.68088E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.5686E-1	-7.35354E-1	-9.19459E0	-9.1897E0	5.24521E-3	9.32932E-2	2.73275E1	-3.26581E1	-3.26143E1	2.68148E1	1.1929E-7	2.51771E-3	2.51771E-3	6.27461E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-7.5717E-1	-7.35188E-1	-9.19464E0	-9.18965E0	5.72205E-3	9.32217E-2	2.73153E1	-3.26744E1	-3.26454E1	2.68003E1	1.1929E-7	2.51969E-3	2.51969E-3	6.3074E-3	3.01308E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-7.57265E-1	-7.34949E-1	-9.19447E0	-9.18949E0	5.26905E-3	9.32217E-2	2.73051E1	-3.26372E1	-3.26394E1	2.68168E1	1.1929E-7	2.52137E-3	2.52137E-3	6.3074E-3	2.99819E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-7.5736E-1	-7.34901E-1	-9.19449E0	-9.18961E0	5.36442E-3	9.31501E-2	2.73616E1	-3.26807E1	-3.26236E1	2.67932E1	1.1929E-7	2.51041E-3	2.51041E-3	6.31761E-3	3.00878E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-7.57146E-1	-7.34997E-1	-9.19456E0	-9.18937E0	5.26905E-3	9.3174E-2	2.72945E1	-3.26449E1	-3.2629E1	2.68262E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-7.57122E-1	-7.34591E-1	-9.19468E0	-9.18961E0	5.31673E-3	9.29356E-2	2.73016E1	-3.26378E1	-3.26455E1	2.68053E1	1.1929E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.03286E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-7.57337E-1	-7.34782E-1	-9.19471E0	-9.18949E0	5.17368E-3	9.30786E-2	2.73201E1	-3.26819E1	-3.26573E1	2.68057E1	1.1929E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.0148E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-7.57384E-1	-7.35354E-1	-9.19447E0	-9.18937E0	5.48363E-3	9.28402E-2	2.72996E1	-3.26585E1	-3.26401E1	2.67813E1	1.1929E-7	2.51007E-3	2.51007E-3	6.33486E-3	3.00302E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-7.57527E-1	-7.35068E-1	-9.19466E0	-9.18963E0	5.48363E-3	9.29117E-2	2.73033E1	-3.26372E1	-3.26266E1	2.68128E1	1.1929E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.01475E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-7.57456E-1	-7.3514E-1	-9.19483E0	-9.1897E0	5.29289E-3	9.27448E-2	2.72883E1	-3.26296E1	-3.26272E1	2.68082E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-7.5736E-1	-7.35188E-1	-9.19445E0	-9.18944E0	5.4121E-3	9.27925E-2	2.73249E1	-3.26573E1	-3.26242E1	2.6807E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.97963E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-7.5748E-1	-7.34878E-1	-9.19425E0	-9.18953E0	5.38826E-3	9.31978E-2	2.7349E1	-3.26561E1	-3.26362E1	2.68004E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00041E-1