[Scan]
initial_time=2015-12-22T18:30:30
final_time=2015-12-22T18:30:52
ip_count=19
run=1021
dataset=3
scan=117
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08827E-4
ql1_vset=
ql1_vmon=-7.57194E-1
ql1_imon=1.38118E-8
ql2_vset=
ql2_vmon=-7.35044E-1
ql2_imon=2.04351E-9
ql3_vset=
ql3_vmon=-9.1943E0
ql3_imon=2.91979E-10
ql4_vset=
ql4_vmon=-9.18908E0
ql4_imon=1.17552E-10
mult1=-9.10224E-9
mult2=-2.68268E-9
rf_tmon=-5.08922E-3
rf_agc=3.32134E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=1.75709E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6409E0
bslens_imon=2.42239E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20205E1
lens5a_imon=1.98668E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=2.82268E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.01966E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05102E1
cs_ea1_imon=2.51913E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35634E0
lens1_imon=2.51612E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.5357E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84562E1
cs_ef1a_imon=2.9254E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.32841E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.30211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15216E1
os_ea1_imon=2.37421E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63876E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25871E0
cs_ionrep_imon=1.18782E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=2.95495E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.33208E-8
tplens_vset=1.4E-1
tplens_vmon=1.59877E0
tplens_imon=-4.54359E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25942E1
iondef3_imon=1.48847E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.58184E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98411E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.10142E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27253E0
ionrepsh_imon=1.79057E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3358E1
lens5b_imon=2.19829E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49663E0
os_ea2_imon=-6.41816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.16218E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05636E0
os_ef2alow_imon=-2.66275E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.41258E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=3.41482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30036E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.24641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73129E1
iondef1_imon=1.07138E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.08125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.76129E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.79326E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14816E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47024E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56129E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=1.41059E-1
window_imon=-1.18873E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86002E1
mask2_imon=-8.57164E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.23501E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.29772E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.17012E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27525E0
defgridb_imon=6.04898E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3331E1
os_fil1_imon=9.4588E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06891E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64287E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30782E1
cs_fil1_imon=9.97507E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61915E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64322E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.88025E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.363E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.94227E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13021E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22194E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.04063E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.40982E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=146
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-7.57265E-1	-7.3514E-1	-9.1943E0	-9.18906E0	5.05447E-3	9.29117E-2	2.72939E1	-3.26885E1	-3.26213E1	2.68142E1	1.1929E-7	2.52318E-3	2.52318E-3	6.29098E-3	3.00041E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09634E0	-7.56955E-1	-7.35283E-1	-9.19423E0	-9.18941E0	5.03063E-3	9.31978E-2	2.72937E1	-3.26579E1	-3.26338E1	2.68052E1	1.1929E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-7.57003E-1	-7.35188E-1	-9.19464E0	-9.18918E0	4.98295E-3	9.30071E-2	2.72979E1	-3.26512E1	-3.26182E1	2.68208E1	1.1929E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.01085E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-7.56884E-1	-7.35068E-1	-9.19459E0	-9.18939E0	5.07832E-3	9.29832E-2	2.73236E1	-3.26585E1	-3.26306E1	2.68175E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-7.57003E-1	-7.35116E-1	-9.19435E0	-9.18887E0	5.22137E-3	9.27925E-2	2.72648E1	-3.26675E1	-3.26374E1	2.68208E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.02769E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-7.57194E-1	-7.35188E-1	-9.19437E0	-9.18925E0	5.17368E-3	9.29356E-2	2.72925E1	-3.26717E1	-3.26464E1	2.67998E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-7.56788E-1	-7.35021E-1	-9.19428E0	-9.18911E0	5.17368E-3	9.2721E-2	2.72865E1	-3.26813E1	-3.26092E1	2.67986E1	1.1929E-7	2.52867E-3	2.52867E-3	6.31837E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09657E0	-7.57122E-1	-7.35092E-1	-9.19437E0	-9.18911E0	4.93526E-3	9.33647E-2	2.73057E1	-3.26657E1	-3.26266E1	2.68046E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.97963E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-7.57456E-1	-7.34997E-1	-9.19445E0	-9.1893E0	4.95911E-3	9.2864E-2	2.72799E1	-3.26879E1	-3.26134E1	2.68172E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-7.57313E-1	-7.34997E-1	-9.19425E0	-9.18903E0	5.03063E-3	9.29832E-2	2.72839E1	-3.26266E1	-3.2593E1	2.68123E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.0148E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-7.57265E-1	-7.35283E-1	-9.19468E0	-9.18922E0	5.03063E-3	9.30071E-2	2.72931E1	-3.26657E1	-3.26356E1	2.68118E1	1.1929E-7	2.52867E-3	2.52867E-3	6.32386E-3	3.03185E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-7.57146E-1	-7.3514E-1	-9.19447E0	-9.18918E0	5.14984E-3	9.32217E-2	2.73057E1	-3.26488E1	-3.2632E1	2.68214E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00563E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-7.57194E-1	-7.35044E-1	-9.19459E0	-9.18932E0	5.36442E-3	9.3317E-2	2.73063E1	-3.2659E1	-3.26278E1	2.68136E1	1.1929E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-7.57098E-1	-7.35235E-1	-9.19449E0	-9.18913E0	5.24521E-3	9.32455E-2	2.73219E1	-3.26597E1	-3.26026E1	2.6801E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00453E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-7.57384E-1	-7.34925E-1	-9.19452E0	-9.18913E0	5.53131E-3	9.30071E-2	2.72629E1	-3.26719E1	-3.26652E1	2.68106E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-7.57194E-1	-7.35164E-1	-9.19442E0	-9.18911E0	5.29289E-3	9.29832E-2	2.72008E1	-3.25855E1	-3.2688E1	2.67949E1	1.1929E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.01742E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-7.57217E-1	-7.34878E-1	-9.19435E0	-9.1892E0	5.26905E-3	9.31025E-2	2.72751E1	-3.26849E1	-3.26308E1	2.68136E1	1.1929E-7	2.52025E-3	2.52025E-3	6.3074E-3	2.99594E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-7.57122E-1	-7.35354E-1	-9.19435E0	-9.18908E0	5.14984E-3	9.28879E-2	2.73181E1	-3.26785E1	-3.25871E1	2.68028E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-7.57194E-1	-7.3514E-1	-9.19399E0	-9.18896E0	5.48363E-3	9.32217E-2	2.72992E1	-3.26655E1	-3.26148E1	2.68018E1	1.1929E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-7.57194E-1	-7.35044E-1	-9.1943E0	-9.18908E0	5.22137E-3	9.34601E-2	2.73129E1	-3.265E1	-3.25942E1	2.68046E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.04063E-1