[Scan]
initial_time=2015-12-22T18:31:32
final_time=2015-12-22T18:31:54
ip_count=19
run=1021
dataset=3
scan=119
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-7.5717E-1
ql1_imon=1.38974E-8
ql2_vset=
ql2_vmon=-7.35164E-1
ql2_imon=2.01092E-9
ql3_vset=
ql3_vmon=-9.19449E0
ql3_imon=2.80762E-10
ql4_vset=
ql4_vmon=-9.18906E0
ql4_imon=1.24538E-10
mult1=-9.16857E-9
mult2=-2.66905E-9
rf_tmon=-5.92958E-3
rf_agc=3.25264E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.73053E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62836E0
bslens_imon=2.45505E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2019E1
lens5a_imon=1.97537E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05176E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53703E1
cs_ef1b_imon=2.84687E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04658E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.53953E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37002E0
lens1_imon=2.55048E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64505E1
os_ef1alow_imon=2.98816E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03926E1
cs_ea2_imon=1.53146E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84453E1
cs_ef1a_imon=2.92277E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.33294E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11299E1
os_restr1_imon=4.28741E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.35631E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63279E1
os_ef1bup_imon=3.07691E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23365E0
cs_ionrep_imon=1.18754E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93397E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01938E1
cs_anode1_imon=2.96403E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.34403E-8
tplens_vset=1.4E-1
tplens_vmon=1.57018E0
tplens_imon=-3.35183E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26162E1
iondef3_imon=1.50703E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26432E1
iondef2_imon=1.56657E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98193E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=4.10295E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24955E0
ionrepsh_imon=1.76238E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33384E1
lens5b_imon=2.17539E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74371E1
cs_ef2b_imon=3.12245E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53074E0
os_ea2_imon=-7.24518E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00661E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.18161E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0591E0
os_ef2alow_imon=-2.67731E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64772E-1
os_ef2bup_imon=-5.49922E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10994E1
os_restr2_imon=3.40736E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.32142E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02243E1
cs_anode2_imon=2.24123E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72843E1
iondef1_imon=1.08792E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67601E1
iondef4_imon=1.08289E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.76276E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=7.84919E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13533E0
cs_ionaccel_imon=-1.77041E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.47195E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55977E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=2.06194E-1
window_imon=-9.76383E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82601E2
mask1_imon=2.39069E-4
mask2_vset=0.0E0
mask2_vmon=-1.86214E1
mask2_imon=-6.57216E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.29884E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.62322E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.066E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55106E0
defgridb_imon=6.13083E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33313E1
os_fil1_imon=9.41227E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05591E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64391E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30765E1
cs_fil1_imon=9.94817E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6195E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64482E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.05778E-2
os_fil2_imon=-2.86635E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79142E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.80808E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35385E-1
cs_fil2_imon=-2.95717E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11027E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2215E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.12679E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-7.56836E-1	-7.35116E-1	-9.19402E0	-9.18946E0	4.95911E-3	9.30071E-2	2.73311E1	-3.26608E1	-3.26455E1	2.68094E1	1.1929E-7	2.51611E-3	2.51611E-3	6.29603E-3	3.02426E-1
2.0E0	2.2E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-7.57027E-1	-7.35307E-1	-9.19435E0	-9.18946E0	5.19753E-3	9.27687E-2	2.72984E1	-3.26376E1	-3.2626E1	2.68419E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02133E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-7.57051E-1	-7.3514E-1	-9.19428E0	-9.18934E0	5.48363E-3	9.32932E-2	2.73123E1	-3.2629E1	-3.26362E1	2.67421E1	1.1929E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.01475E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-7.56764E-1	-7.35259E-1	-9.19385E0	-9.18961E0	5.36442E-3	9.34124E-2	2.73329E1	-3.26608E1	-3.2644E1	2.68053E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-7.56741E-1	-7.34878E-1	-9.19428E0	-9.18961E0	5.43594E-3	9.34601E-2	2.73252E1	-3.26608E1	-3.26089E1	2.69321E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-7.56907E-1	-7.35044E-1	-9.19435E0	-9.18932E0	5.34058E-3	9.31263E-2	2.72859E1	-3.26573E1	-3.2647E1	2.67854E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-7.57098E-1	-7.35283E-1	-9.19404E0	-9.1892E0	5.34058E-3	9.29594E-2	2.72979E1	-3.26699E1	-3.2635E1	2.67553E1	1.1929E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-7.56979E-1	-7.35021E-1	-9.19435E0	-9.18946E0	5.34058E-3	9.3174E-2	2.7321E1	-3.26484E1	-3.26231E1	2.68022E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-7.5717E-1	-7.35068E-1	-9.1944E0	-9.18937E0	5.48363E-3	9.32693E-2	2.72751E1	-3.26897E1	-3.26374E1	2.67902E1	1.1929E-7	2.52647E-3	2.52647E-3	6.32386E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-7.56979E-1	-7.34949E-1	-9.19464E0	-9.18922E0	5.48363E-3	9.31025E-2	2.73357E1	-3.26639E1	-3.26362E1	2.67692E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02396E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-7.56717E-1	-7.34949E-1	-9.19449E0	-9.18944E0	5.36442E-3	9.27687E-2	2.72943E1	-3.26603E1	-3.26362E1	2.68869E1	1.1929E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-7.56741E-1	-7.35021E-1	-9.19421E0	-9.18951E0	5.36442E-3	9.32693E-2	2.73039E1	-3.26378E1	-3.25936E1	2.68123E1	1.1929E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-7.56645E-1	-7.35021E-1	-9.19447E0	-9.18932E0	5.55515E-3	9.30071E-2	2.73118E1	-3.26548E1	-3.26199E1	2.66959E1	1.1929E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-7.57146E-1	-7.35283E-1	-9.1943E0	-9.18889E0	5.45979E-3	9.2864E-2	2.73249E1	-3.26723E1	-3.26164E1	2.67535E1	1.1929E-7	2.51359E-3	2.51359E-3	6.32418E-3	2.99613E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-7.57122E-1	-7.35211E-1	-9.19416E0	-9.18913E0	5.126E-3	9.28164E-2	2.73051E1	-3.26765E1	-3.26122E1	2.68346E1	1.1929E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-7.57432E-1	-7.35307E-1	-9.19394E0	-9.18875E0	5.38826E-3	9.29356E-2	2.74225E1	-3.27499E1	-3.24868E1	2.67391E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00453E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-7.57194E-1	-7.35044E-1	-9.19435E0	-9.18899E0	5.07832E-3	9.30309E-2	2.72913E1	-3.26506E1	-3.26314E1	2.6847E1	1.1929E-7	2.50898E-3	2.50898E-3	6.30192E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-7.5717E-1	-7.35044E-1	-9.19449E0	-9.18899E0	5.38826E-3	9.3174E-2	2.73139E1	-3.26472E1	-3.26189E1	2.67866E1	1.19264E-7	2.51863E-3	2.51863E-3	6.3074E-3	3.01155E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-7.57313E-1	-7.34997E-1	-9.19428E0	-9.18913E0	5.17368E-3	9.3174E-2	2.73281E1	-3.26779E1	-3.26325E1	2.67511E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-7.5717E-1	-7.35164E-1	-9.19449E0	-9.18906E0	5.07832E-3	9.29594E-2	2.72843E1	-3.26432E1	-3.26162E1	2.67601E1	1.1929E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.00453E-1