[Scan]
initial_time=2015-12-22T18:32:02
final_time=2015-12-22T18:32:24
ip_count=19
run=1021
dataset=3
scan=120
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08727E-4
ql1_vset=
ql1_vmon=-7.56693E-1
ql1_imon=1.38611E-8
ql2_vset=
ql2_vmon=-7.35307E-1
ql2_imon=2.06652E-9
ql3_vset=
ql3_vmon=-9.1944E0
ql3_imon=2.93875E-10
ql4_vset=
ql4_vmon=-9.18932E0
ql4_imon=1.24383E-10
mult1=-9.56114E-9
mult2=-2.62634E-9
rf_tmon=-5.36027E-3
rf_agc=3.37018E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.75709E-9
bslens_vset=-6.2E0
bslens_vmon=-6.71661E0
bslens_imon=2.71439E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1964E1
lens5a_imon=1.97875E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12526E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=2.83025E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.02283E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05192E1
cs_ea1_imon=2.50615E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35874E0
lens1_imon=2.6423E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03967E1
cs_ea2_imon=1.54543E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84154E1
cs_ef1a_imon=2.92432E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.32981E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.2895E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15522E1
os_ea1_imon=2.34933E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22146E0
cs_ionrep_imon=1.19719E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93222E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.96828E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.32953E-8
tplens_vset=1.4E-1
tplens_vmon=1.59577E0
tplens_imon=-1.73173E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26291E1
iondef3_imon=1.49965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26774E1
iondef2_imon=1.60563E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98256E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.13589E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29476E0
ionrepsh_imon=1.79165E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.15863E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74856E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48221E0
os_ea2_imon=-4.86804E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00111E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7148E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.72041E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98625E-1
os_ef2bup_imon=-5.4378E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.41698E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.35228E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.23704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73161E1
iondef1_imon=1.08724E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.08125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.76378E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.84554E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-1.95998E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.54729E-6
window_vset=0.0E0
window_vmon=1.76498E-1
window_imon=-1.13107E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.8596E1
mask2_imon=-9.68887E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=7.28548E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.24725E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=6.76997E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2572E0
defgridb_imon=6.17515E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33309E1
os_fil1_imon=9.43279E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07089E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64639E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30796E1
cs_fil1_imon=9.96143E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.626E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64236E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.44678E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.58188E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.41892E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22084E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40063E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.82718E-1
res40_imon=-2.53301E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-7.56955E-1	-7.35021E-1	-9.19471E0	-9.1893E0	5.00679E-3	9.29356E-2	2.73196E1	-3.26596E1	-3.26474E1	2.67999E1					
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-7.57027E-1	-7.35259E-1	-9.19452E0	-9.18913E0	4.74453E-3	9.30786E-2	2.73219E1	-3.26503E1	-3.26659E1	2.6796E1	1.1929E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.006E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-7.56884E-1	-7.35116E-1	-9.1943E0	-9.18908E0	4.98295E-3	9.32455E-2	2.7321E1	-3.2708E1	-3.26067E1	2.68209E1	1.1929E-7	2.51498E-3	2.51498E-3	6.3131E-3	3.02154E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-7.56884E-1	-7.35354E-1	-9.19449E0	-9.18896E0	5.38826E-3	9.2864E-2	2.72943E1	-3.26579E1	-3.26266E1	2.67938E1	1.1929E-7	2.51603E-3	2.51603E-3	6.3445E-3	3.02368E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-7.57146E-1	-7.35354E-1	-9.19454E0	-9.18896E0	5.03063E-3	9.30786E-2	2.72821E1	-3.26461E1	-3.26655E1	2.67926E1	1.1929E-7	2.51287E-3	2.51287E-3	6.31798E-3	3.01356E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-7.57003E-1	-7.35235E-1	-9.19461E0	-9.18896E0	4.95911E-3	9.31025E-2	2.72925E1	-3.26512E1	-3.26314E1	2.68004E1	1.1929E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-7.56907E-1	-7.34711E-1	-9.19473E0	-9.18906E0	5.24521E-3	9.30786E-2	2.73033E1	-3.26633E1	-3.26086E1	2.68094E1	1.1929E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.56931E-1	-7.34591E-1	-9.1943E0	-9.18887E0	5.07832E-3	9.31263E-2	2.73222E1	-3.26522E1	-3.26049E1	2.68018E1	1.1929E-7	2.51937E-3	2.51937E-3	6.30474E-3	3.01418E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09364E0	-7.56741E-1	-7.34591E-1	-9.19435E0	-9.18913E0	5.29289E-3	9.32932E-2	2.73146E1	-3.26699E1	-3.26254E1	2.68219E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-7.56717E-1	-7.35188E-1	-9.19418E0	-9.18915E0	5.17368E-3	9.33409E-2	2.73219E1	-3.26543E1	-3.26386E1	2.68124E1	1.1929E-7	2.51642E-3	2.51642E-3	6.3074E-3	3.01193E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09294E0	-7.56574E-1	-7.35092E-1	-9.19423E0	-9.18922E0	5.24521E-3	9.32455E-2	2.73369E1	-3.26705E1	-3.26194E1	2.68334E1	1.1929E-7	2.52209E-3	2.52209E-3	6.3514E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-7.56741E-1	-7.34925E-1	-9.19456E0	-9.18932E0	5.43594E-3	9.30548E-2	2.72865E1	-3.26681E1	-3.26224E1	2.68364E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9926E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-7.56788E-1	-7.35164E-1	-9.1944E0	-9.18932E0	5.29289E-3	9.3174E-2	2.73033E1	-3.2685E1	-3.2606E1	2.68256E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9874E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-7.57027E-1	-7.35164E-1	-9.19445E0	-9.18922E0	5.34058E-3	9.32455E-2	2.73123E1	-3.26518E1	-3.26356E1	2.68034E1	1.1929E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.00197E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-7.57003E-1	-7.35259E-1	-9.19423E0	-9.18903E0	5.05447E-3	9.31263E-2	2.72811E1	-3.26236E1	-3.26422E1	2.6816E1	1.1929E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-7.5717E-1	-7.35402E-1	-9.1944E0	-9.18925E0	4.91142E-3	9.30786E-2	2.7227E1	-3.2641E1	-3.27342E1	2.68046E1	1.1929E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.02659E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-7.56931E-1	-7.35235E-1	-9.19421E0	-9.18937E0	5.05447E-3	9.31263E-2	2.72865E1	-3.26723E1	-3.26134E1	2.68208E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32112E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-7.56812E-1	-7.35044E-1	-9.19447E0	-9.18965E0	4.98295E-3	9.31978E-2	2.73159E1	-3.26543E1	-3.26014E1	2.68154E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.57003E-1	-7.35211E-1	-9.19428E0	-9.18922E0	4.76837E-3	9.34362E-2	2.72979E1	-3.26753E1	-3.26524E1	2.68244E1	1.1929E-7	2.50898E-3	2.50898E-3	6.31288E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-7.56693E-1	-7.35307E-1	-9.1944E0	-9.18932E0	4.93526E-3	9.32455E-2	2.73161E1	-3.26774E1	-3.26291E1	2.6804E1	1.1929E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.0148E-1