[Scan]
initial_time=2015-12-22T18:32:43
final_time=2015-12-22T18:33:05
ip_count=19
run=1021
dataset=4
scan=121
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.72606E-6
ql1_vset=
ql1_vmon=-8.79983E1
ql1_imon=-3.61371E-9
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.65057E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-9.49658E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.67067E-8
mult1=-2.37327E-8
mult2=-2.68798E-9
rf_tmon=-3.86058E-3
rf_agc=3.40524E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=7.8615E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63558E0
bslens_imon=2.57985E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19602E1
lens5a_imon=1.96133E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04992E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53638E1
cs_ef1b_imon=2.82648E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02076E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05249E1
cs_ea1_imon=2.51543E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02728E0
lens1_imon=1.39099E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64481E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03731E1
cs_ea2_imon=1.55009E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84348E1
cs_ef1a_imon=2.93526E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.3316E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.2979E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.34684E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63543E1
os_ef1bup_imon=3.08226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26253E0
cs_ionrep_imon=1.18961E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91854E2
cs_nozzle_imon=1.93267E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01885E1
cs_anode1_imon=2.96375E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=4.04022E-8
tplens_vset=1.4E-1
tplens_vmon=1.60146E0
tplens_imon=-3.08873E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26425E1
iondef3_imon=1.48613E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26531E1
iondef2_imon=1.59459E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98461E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=1.1573E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27411E0
ionrepsh_imon=1.77709E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33542E1
lens5b_imon=2.16538E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74623E1
cs_ef2b_imon=3.12779E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46704E0
os_ea2_imon=-7.50351E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00445E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70991E1
cs_ef2a_imon=3.1754E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08178E0
os_ef2alow_imon=-2.76225E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.06498E-1
os_ef2bup_imon=-5.43819E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10996E1
os_restr2_imon=3.4211E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.29511E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01885E1
cs_anode2_imon=2.25654E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73098E1
iondef1_imon=1.10375E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.08781E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.78985E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.85433E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10408E0
cs_ionaccel_imon=-1.82045E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56301E1
einzel_imon=7.69827E-6
window_vset=0.0E0
window_vmon=1.64399E-1
window_imon=-1.14973E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39067E-4
mask2_vset=0.0E0
mask2_vmon=-1.86205E1
mask2_imon=-7.01421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=7.3944E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.76173E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.21016E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42681E0
defgridb_imon=6.21249E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.333E1
os_fil1_imon=9.41876E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06507E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64303E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30837E1
cs_fil1_imon=9.96234E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62592E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64376E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.14557E-2
os_fil2_imon=-2.78503E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93552E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.34385E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37767E-1
cs_fil2_imon=-2.40854E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01458E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22219E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33112E-3
inlet_lpb_pmon=3.00479E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51557E-3
foreline_cvt_pmon=2.51557E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.87587E-1
res40_imon=-2.56068E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.465E3	1.0E0	1.47E2	4.1E1	-7.42513E-2	-8.79988E1	-2.6226E-4	-8.80008E1	2.14577E-4	4.95911E-3	9.31978E-2	2.73111E1	-3.26783E1	-3.2605E1	2.67908E1	1.1929E-7	2.51814E-3	2.51814E-3	6.30212E-3	3.02115E-1
2.0E0	1.07781E5	1.06E2	3.16E2	1.6E2	-7.286E-2	-8.79987E1	-5.72205E-4	-8.8001E1	3.8147E-4	5.05447E-3	9.31501E-2	2.73082E1	-3.26719E1	-3.26217E1	2.681E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.02659E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.79987E1	-5.96046E-4	-8.8001E1	2.14577E-4	5.05447E-3	9.27687E-2	2.72921E1	-3.26944E1	-3.26036E1	2.68298E1	1.1929E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.03185E-1
4.0E0	2.3219E4	1.0E1	6.55E2	3.98E2	-7.34782E-2	-8.79986E1	-6.19888E-4	-8.80014E1	3.57628E-4	5.03063E-3	9.30786E-2	2.72841E1	-3.26518E1	-3.26386E1	2.681E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00041E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.79988E1	-3.8147E-4	-8.80012E1	2.14577E-4	5.10216E-3	9.31978E-2	2.73051E1	-3.2636E1	-3.2636E1	2.68146E1	1.1929E-7	2.50882E-3	2.50882E-3	6.32896E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.79986E1	-3.57628E-4	-8.80013E1	1.43051E-4	4.86374E-3	9.29117E-2	2.73039E1	-3.26591E1	-3.26404E1	2.68172E1	1.1929E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.79984E1	-7.15256E-5	-8.80011E1	3.09944E-4	4.93526E-3	9.30548E-2	2.73075E1	-3.26675E1	-3.26194E1	2.68136E1	1.1929E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.79983E1	-1.66893E-4	-8.80012E1	2.38419E-4	5.50747E-3	9.29594E-2	2.73357E1	-3.26549E1	-3.2632E1	2.68106E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
1.2E1	1.34E2	0.0E0	4.85E2	3.23E2	-7.44831E-2	-8.79986E1	-3.09944E-4	-8.8001E1	2.14577E-4	5.24521E-3	9.31501E-2	2.72973E1	-3.26488E1	-3.2638E1	2.68004E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.99E-1
1.3E1	2.0E1	2.0E0	5.25E2	3.53E2	-7.3401E-2	-8.79986E1	-1.90735E-4	-8.80011E1	2.86102E-4	5.00679E-3	9.31263E-2	2.72903E1	-3.26844E1	-3.26673E1	2.67962E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01223E-1
1.4E1	3.495E3	5.0E0	5.66E2	3.82E2	-7.3401E-2	-8.79986E1	-3.09944E-4	-8.8001E1	9.53674E-5	5.24521E-3	9.31501E-2	2.73075E1	-3.26438E1	-3.26389E1	2.68226E1	1.1929E-7	2.51225E-3	2.51225E-3	6.29645E-3	2.9978E-1
1.5E1	9.2E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.79988E1	-4.29153E-4	-8.80012E1	3.33786E-4	5.17368E-3	9.32455E-2	2.73387E1	-3.26738E1	-3.26065E1	2.67848E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
1.6E1	5.93E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.79988E1	-1.66893E-4	-8.80011E1	2.14577E-4	5.34058E-3	9.2864E-2	2.72805E1	-3.26314E1	-3.26885E1	2.6804E1	1.1929E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00453E-1
1.7E1	1.275E3	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.79985E1	-2.14577E-4	-8.80013E1	3.57628E-4	5.31673E-3	9.31263E-2	2.72951E1	-3.26402E1	-3.26231E1	2.68016E1	1.1929E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.99613E-1
1.8E1	5.346E3	4.0E0	7.27E2	5.0E2	-7.3401E-2	-8.79987E1	-3.09944E-4	-8.8001E1	9.53674E-5	5.45979E-3	9.31501E-2	2.73167E1	-3.26432E1	-3.26125E1	2.67998E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01347E-1
1.9E1	2.42E3	3.0E0	7.68E2	5.29E2	-7.30146E-2	-8.79985E1	-4.05312E-4	-8.80011E1	4.76837E-5	5.6982E-3	9.31025E-2	2.72443E1	-3.2554E1	-3.26065E1	2.68163E1	1.1929E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.00453E-1
2.0E1	2.5237E4	1.4E1	8.08E2	5.58E2	-7.35556E-2	-8.79987E1	-6.19888E-4	-8.8001E1	4.76837E-5	5.62668E-3	9.28879E-2	2.72919E1	-3.265E1	-3.26086E1	2.67914E1	1.1929E-7	2.51443E-3	2.51443E-3	6.29098E-3	2.9978E-1
2.1E1	5.4E1	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.79985E1	-6.4373E-4	-8.80008E1	-1.66893E-4	5.48363E-3	9.31263E-2	2.72861E1	-3.26355E1	-3.26075E1	2.68043E1	1.1929E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.97963E-1
2.2E1	1.833E3	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.79985E1	-5.72205E-4	-8.80008E1	-1.43051E-4	5.6982E-3	9.30786E-2	2.73064E1	-3.26825E1	-3.26325E1	2.67848E1	1.1929E-7	2.52123E-3	2.52123E-3	6.34261E-3	2.99101E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.79983E1	-4.52995E-4	-8.80009E1	9.53674E-5	5.45979E-3	9.31025E-2	2.73098E1	-3.26531E1	-3.26425E1	2.68154E1	1.1929E-7	2.51557E-3	2.51557E-3	6.33112E-3	3.00479E-1