[Scan]
initial_time=2015-12-22T18:33:13
final_time=2015-12-22T18:33:35
ip_count=19
run=1021
dataset=4
scan=122
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.81959E-6
ql1_vset=
ql1_vmon=-8.79994E1
ql1_imon=-1.91355E-9
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.5551E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-5.84058E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.63362E-8
mult1=-1.74704E-8
mult2=-2.76053E-9
rf_tmon=-4.68666E-3
rf_agc=3.3676E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=7.1975E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67275E0
bslens_imon=2.54496E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20265E1
lens5a_imon=1.96757E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.0488E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=2.83674E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05204E1
cs_ea1_imon=2.52237E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01492E0
lens1_imon=1.42382E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03852E1
cs_ea2_imon=1.54399E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.92792E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.33849E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.29851E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15432E1
os_ea1_imon=2.37745E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29115E0
cs_ionrep_imon=1.20116E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=2.9654E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=4.01568E-8
tplens_vset=1.4E-1
tplens_vmon=1.55431E0
tplens_imon=-1.91197E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25731E1
iondef3_imon=1.49965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.56165E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98281E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=1.0704E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3242E0
ionrepsh_imon=1.78083E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33676E1
lens5b_imon=2.15431E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51346E0
os_ea2_imon=-8.43694E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=3.41229E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23098E2
cs_ionfoca_imon=6.29315E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.25037E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73255E1
iondef1_imon=1.0703E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.84973E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.83244E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47093E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=1.67488E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.8605E1
mask2_imon=-7.85084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92676E3
multa_neg_imon=7.58469E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.94661E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.33594E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33841E0
defgridb_imon=6.25806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.4072E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06704E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64414E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30862E1
cs_fil1_imon=9.94395E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62996E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64533E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07371E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.31531E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.62392E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22237E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98335E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.422E3	1.0E0	1.47E2	4.1E1	-7.42513E-2	-8.79989E1	-9.53674E-5	-8.80007E1	4.29153E-4	5.48363E-3	9.30309E-2	2.73015E1	-3.26771E1	-3.2641E1	2.67995E1	1.1929E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.02396E-1
2.0E0	1.08263E5	1.19E2	3.16E2	1.6E2	-7.41738E-2	-8.7999E1	-4.29153E-4	-8.80006E1	2.14577E-4	5.07832E-3	9.31263E-2	2.734E1	-3.26927E1	-3.26236E1	2.68126E1	1.19341E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00197E-1
3.0E0	2.8E1	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.79993E1	0.0E0	-8.80009E1	9.53674E-5	5.34058E-3	9.29594E-2	2.72862E1	-3.26443E1	-3.2636E1	2.6813E1	1.1929E-7	2.51136E-3	2.51136E-3	6.33538E-3	3.00942E-1
4.0E0	2.3007E4	7.0E0	6.55E2	3.98E2	-7.30146E-2	-8.79988E1	-1.90735E-4	-8.80007E1	1.19209E-4	5.26905E-3	9.3174E-2	2.72833E1	-3.26703E1	-3.26301E1	2.68041E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.79993E1	-7.15256E-5	-8.80005E1	4.76837E-5	5.45979E-3	9.31025E-2	2.72745E1	-3.2605E1	-3.26086E1	2.68166E1	1.1929E-7	2.51096E-3	2.51096E-3	6.32896E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.7999E1	-3.09944E-4	-8.80008E1	9.53674E-5	5.45979E-3	9.30786E-2	2.73115E1	-3.26446E1	-3.2622E1	2.6785E1	1.1929E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.7999E1	-4.76837E-5	-8.80005E1	3.33786E-4	5.07832E-3	9.30786E-2	2.73126E1	-3.26528E1	-3.25848E1	2.67995E1	1.1929E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.79991E1	-3.33786E-4	-8.80008E1	1.19209E-4	5.38826E-3	9.31263E-2	2.73027E1	-3.26561E1	-3.26452E1	2.68316E1	1.1929E-7	2.52362E-3	2.52362E-3	6.30182E-3	3.01209E-1
1.2E1	1.14E2	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.7999E1	-4.29153E-4	-8.80008E1	1.66893E-4	5.14984E-3	9.30071E-2	2.73051E1	-3.26254E1	-3.26098E1	2.68232E1	1.1929E-7	2.52209E-3	2.52209E-3	6.28006E-3	3.00824E-1
1.3E1	2.5E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.79988E1	-2.86102E-4	-8.80006E1	1.43051E-4	5.126E-3	9.29832E-2	2.73653E1	-3.26832E1	-3.2606E1	2.68148E1	1.1929E-7	2.51804E-3	2.51804E-3	6.29067E-3	3.01475E-1
1.4E1	3.433E3	1.0E0	5.66E2	3.82E2	-7.17779E-2	-8.79988E1	-1.90735E-4	-8.80006E1	3.33786E-4	4.79221E-3	9.3317E-2	2.73111E1	-3.27017E1	-3.2626E1	2.68094E1	1.1929E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.01223E-1
1.5E1	1.02E2	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.7999E1	-3.8147E-4	-8.80006E1	4.05312E-4	4.95911E-3	9.31025E-2	2.73273E1	-3.26693E1	-3.26428E1	2.67674E1	1.1929E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99175E-1
1.6E1	5.71E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.7999E1	-3.8147E-4	-8.80004E1	5.72205E-4	5.36442E-3	9.2864E-2	2.73293E1	-3.26543E1	-3.2626E1	2.68151E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01871E-1
1.7E1	1.244E3	1.0E0	6.87E2	4.7E2	-7.32464E-2	-8.7999E1	-1.19209E-4	-8.80007E1	3.8147E-4	5.26905E-3	9.30071E-2	2.73123E1	-3.26789E1	-3.26452E1	2.68076E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02396E-1
1.8E1	5.637E3	5.0E0	7.27E2	5.0E2	-7.29374E-2	-8.79993E1	-4.29153E-4	-8.80006E1	2.6226E-4	4.86374E-3	9.27687E-2	2.73273E1	-3.26567E1	-3.26494E1	2.68232E1	1.1929E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.00041E-1
1.9E1	2.41E3	1.0E0	7.68E2	5.29E2	-7.26282E-2	-8.79995E1	-6.19888E-4	-8.80004E1	5.96046E-4	5.10216E-3	9.3174E-2	2.74229E1	-3.279E1	-3.25347E1	2.6786E1	1.1929E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.00824E-1
2.0E1	2.562E4	1.7E1	8.08E2	5.58E2	-7.30918E-2	-8.79994E1	-3.33786E-4	-8.80005E1	5.72205E-4	5.05447E-3	9.33647E-2	2.73231E1	-3.26909E1	-3.26434E1	2.67956E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01347E-1
2.1E1	5.9E1	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.79996E1	-3.09944E-4	-8.80007E1	2.6226E-4	5.24521E-3	9.30786E-2	2.73063E1	-3.2652E1	-3.26679E1	2.68136E1	1.1929E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00966E-1
2.2E1	1.752E3	1.0E0	8.89E2	6.17E2	-7.20871E-2	-8.79996E1	-2.14577E-4	-8.80004E1	2.38419E-4	5.29289E-3	9.28402E-2	2.72955E1	-3.26741E1	-3.26398E1	2.68094E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01871E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.79994E1	-6.91414E-4	-8.80005E1	3.33786E-4	5.19753E-3	9.31263E-2	2.73255E1	-3.26446E1	-3.25731E1	2.68136E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1