[Scan]
initial_time=2015-12-22T18:34:12
final_time=2015-12-22T18:34:34
ip_count=19
run=1021
dataset=4
scan=124
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.44831E-2
qbias_imon=-3.80492E-6
ql1_vset=
ql1_vmon=-8.80001E1
ql1_imon=-1.36799E-9
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.47465E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-4.31328E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.61698E-8
mult1=-2.21904E-8
mult2=-2.71262E-9
rf_tmon=-4.52444E-3
rf_agc=3.29971E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=6.45876E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64775E0
bslens_imon=2.54509E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20089E1
lens5a_imon=1.94916E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.04839E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53684E1
cs_ef1b_imon=2.82961E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02058E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0489E1
cs_ea1_imon=2.5276E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03076E0
lens1_imon=1.37013E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64527E1
os_ef1alow_imon=2.97244E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03899E1
cs_ea2_imon=1.5341E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=2.92726E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.33343E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=4.28365E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15352E1
os_ea1_imon=2.35518E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63687E1
os_ef1bup_imon=3.08191E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24978E0
cs_ionrep_imon=1.20629E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93225E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01902E1
cs_anode1_imon=2.96306E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=4.00938E-8
tplens_vset=1.4E-1
tplens_vmon=1.58292E0
tplens_imon=-4.16636E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26567E1
iondef3_imon=1.4969E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26398E1
iondef2_imon=1.57616E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98415E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=1.04417E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25557E0
ionrepsh_imon=1.78334E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33791E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.12674E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47689E0
os_ea2_imon=-7.67732E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00557E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.1754E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07483E0
os_ef2alow_imon=-2.72749E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91439E-1
os_ef2bup_imon=-5.36869E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10909E1
os_restr2_imon=3.42701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30554E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01873E1
cs_anode2_imon=2.24924E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72883E1
iondef1_imon=1.09054E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68172E1
iondef4_imon=1.08712E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.75618E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.8361E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13999E0
cs_ionaccel_imon=-1.76137E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.68089E-6
window_vset=0.0E0
window_vmon=1.55131E-1
window_imon=-1.09412E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39119E-4
mask2_vset=0.0E0
mask2_vmon=-1.86089E1
mask2_imon=-7.36173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.26578E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.3133E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.84168E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3717E0
defgridb_imon=6.17077E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3331E1
os_fil1_imon=9.40555E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06489E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64132E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3083E1
cs_fil1_imon=9.95678E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62667E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6418E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22019E-2
os_fil2_imon=-2.55914E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.52781E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37517E-1
cs_fil2_imon=-2.37958E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.63988E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22151E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.80058E-1
res40_imon=-2.47728E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.506E3	1.0E0	1.47E2	4.1E1	-7.49466E-2	-8.80001E1	-7.86781E-4	-8.80006E1	2.6226E-4	5.22137E-3	9.31263E-2	2.73287E1	-3.26579E1	-3.26213E1	2.68088E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00453E-1
2.0E0	1.09366E5	1.16E2	3.16E2	1.6E2	-7.53334E-2	-8.8E1	-6.4373E-4	-8.80005E1	3.57628E-4	5.126E-3	9.34124E-2	2.73112E1	-3.26585E1	-3.26223E1	2.67854E1	1.1929E-7	2.51287E-3	2.51287E-3	6.33388E-3	2.98842E-1
3.0E0	2.1E1	2.0E0	4.85E2	2.79E2	-7.40192E-2	-8.79997E1	-4.05312E-4	-8.80004E1	1.66893E-4	5.17368E-3	9.31978E-2	2.72833E1	-3.26661E1	-3.26508E1	2.6807E1	1.1929E-7	2.51581E-3	2.51581E-3	6.32978E-3	2.97499E-1
4.0E0	2.3427E4	1.7E1	6.55E2	3.98E2	-7.35556E-2	-8.79999E1	-5.48363E-4	-8.80005E1	1.19209E-4	5.07832E-3	9.33409E-2	2.7286E1	-3.26306E1	-3.26243E1	2.68235E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.41738E-2	-8.80002E1	-5.00679E-4	-8.80003E1	3.09944E-4	5.26905E-3	9.31263E-2	2.73123E1	-3.26536E1	-3.26554E1	2.68172E1	1.1929E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.02115E-1
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-7.41738E-2	-8.8E1	-2.14577E-4	-8.80003E1	2.14577E-4	5.60284E-3	9.33409E-2	2.72665E1	-3.26572E1	-3.26162E1	2.68076E1	1.1929E-7	2.51025E-3	2.51025E-3	6.32978E-3	2.99083E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.42513E-2	-8.79997E1	-3.09944E-4	-8.80003E1	7.15256E-5	5.34058E-3	9.34601E-2	2.72985E1	-3.26615E1	-3.2632E1	2.67836E1	1.1929E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.79998E1	-2.14577E-4	-8.80006E1	3.8147E-4	5.34058E-3	9.34124E-2	2.73051E1	-3.26677E1	-3.26295E1	2.68198E1	1.1929E-7	2.51116E-3	2.51116E-3	6.30192E-3	2.9978E-1
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.41738E-2	-8.80001E1	4.76837E-5	-8.80005E1	2.86102E-4	5.26905E-3	9.32217E-2	2.73322E1	-3.26626E1	-3.25871E1	2.67938E1	1.1929E-7	2.51077E-3	2.51077E-3	6.31798E-3	2.99343E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80001E1	-9.53674E-5	-8.80003E1	2.14577E-4	5.67436E-3	9.31263E-2	2.72995E1	-3.26616E1	-3.26522E1	2.68001E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1
1.4E1	3.541E3	1.0E0	5.66E2	3.82E2	-7.30146E-2	-8.79999E1	-3.33786E-4	-8.80002E1	2.38419E-5	5.4121E-3	9.32693E-2	2.73099E1	-3.26699E1	-3.26615E1	2.67992E1	1.1929E-7	2.51642E-3	2.51642E-3	6.31321E-3	3.00916E-1
1.5E1	1.02E2	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.79998E1	-5.00679E-4	-8.80004E1	3.33786E-4	5.19753E-3	9.29832E-2	2.73159E1	-3.26975E1	-3.26362E1	2.68148E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01347E-1
1.6E1	5.81E2	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.8E1	-1.19209E-4	-8.80001E1	1.90735E-4	5.65052E-3	9.3174E-2	2.73021E1	-3.26585E1	-3.26183E1	2.67763E1	1.1929E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.02253E-1
1.7E1	1.306E3	0.0E0	6.87E2	4.7E2	-7.40192E-2	-8.8E1	-6.19888E-4	-8.80005E1	1.90735E-4	5.48363E-3	9.33409E-2	2.73129E1	-3.26567E1	-3.26224E1	2.68034E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02396E-1
1.8E1	5.526E3	8.0E0	7.27E2	5.0E2	-7.42513E-2	-8.8E1	-8.34465E-4	-8.80003E1	3.09944E-4	5.31673E-3	9.32693E-2	2.72961E1	-3.26308E1	-3.26554E1	2.68142E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02922E-1
1.9E1	2.408E3	3.0E0	7.68E2	5.29E2	-7.34782E-2	-8.79999E1	-5.48363E-4	-8.80005E1	2.86102E-4	4.8399E-3	9.30786E-2	2.72013E1	-3.259E1	-3.27245E1	2.6786E1	1.1929E-7	2.51647E-3	2.51647E-3	6.33188E-3	3.01414E-1
2.0E1	2.5931E4	1.0E1	8.08E2	5.58E2	-7.39421E-2	-8.79999E1	-5.00679E-4	-8.80004E1	1.66893E-4	5.07832E-3	9.30786E-2	2.73003E1	-3.26621E1	-3.26543E1	2.67938E1					
2.1E1	4.4E1	1.0E0	8.49E2	5.88E2	-7.3401E-2	-8.8E1	4.76837E-5	-8.80006E1	2.86102E-4	5.07832E-3	9.34601E-2	2.73057E1	-3.26661E1	-3.26136E1	2.68036E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
2.2E1	1.884E3	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.80001E1	-1.43051E-4	-8.80003E1	3.33786E-4	4.86374E-3	9.33886E-2	2.72833E1	-3.26514E1	-3.26325E1	2.68196E1	1.1929E-7	2.52236E-3	2.52236E-3	6.32858E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.44831E-2	-8.80001E1	-3.57628E-4	-8.80004E1	3.33786E-4	5.14984E-3	9.32217E-2	2.72883E1	-3.26398E1	-3.26567E1	2.68172E1	1.1929E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.02396E-1