[Scan]
initial_time=2015-12-22T18:35:12
final_time=2015-12-22T18:35:34
ip_count=19
run=1021
dataset=4
scan=126
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.84253E-6
ql1_vset=
ql1_vmon=-8.80001E1
ql1_imon=-1.19064E-9
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.47243E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-3.67113E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.6166E-8
mult1=-2.30706E-8
mult2=-2.88592E-9
rf_tmon=-4.69234E-3
rf_agc=3.25304E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=6.51038E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64137E0
bslens_imon=2.43385E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19944E1
lens5a_imon=1.98635E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.04916E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5365E1
cs_ef1b_imon=2.84455E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02201E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05115E1
cs_ea1_imon=2.50535E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05161E0
lens1_imon=1.4188E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64724E1
os_ef1alow_imon=2.97244E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03563E1
cs_ea2_imon=1.53619E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=2.93248E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.33448E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11303E1
os_restr1_imon=4.29582E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14946E1
os_ea1_imon=2.35275E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.07288E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22719E0
cs_ionrep_imon=1.18648E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.96966E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=4.02064E-8
tplens_vset=1.4E-1
tplens_vmon=1.58755E0
tplens_imon=-1.52444E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26077E1
iondef3_imon=1.49586E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26661E1
iondef2_imon=1.58068E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98203E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=1.00962E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2463E0
ionrepsh_imon=1.77917E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.16156E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.11736E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50934E0
os_ea2_imon=-8.54638E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00477E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71397E1
cs_ef2a_imon=3.17018E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.56068E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09394E-1
os_ef2bup_imon=-5.36521E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10909E1
os_restr2_imon=3.4284E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.30137E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0178E1
cs_anode2_imon=2.25098E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.10096E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.08121E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.76503E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.81889E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10813E0
cs_ionaccel_imon=-1.80655E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47056E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56283E1
einzel_imon=7.63571E-6
window_vset=0.0E0
window_vmon=1.59186E-1
window_imon=-1.07675E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82659E2
mask1_imon=2.39157E-4
mask2_vset=0.0E0
mask2_vmon=-1.86124E1
mask2_imon=-6.42342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=7.55083E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.36196E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.28316E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2731E0
defgridb_imon=6.27854E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33301E1
os_fil1_imon=9.4015E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06565E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64535E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30827E1
cs_fil1_imon=9.95261E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61914E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64748E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10826E-2
os_fil2_imon=-2.69235E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91815E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.19843E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35645E-1
cs_fil2_imon=-2.44329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03196E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22143E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40034E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.03226E-1
res40_imon=-2.49813E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.567E3	2.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80003E1	-3.33786E-4	-8.80002E1	2.38419E-4	5.19753E-3	9.3317E-2	2.72898E1	-3.26614E1	-3.26449E1	2.67995E1	1.1929E-7	2.52131E-3	2.52131E-3	6.31269E-3	3.02621E-1
2.0E0	1.09539E5	8.7E1	3.16E2	1.6E2	-7.34782E-2	-8.80004E1	-4.29153E-4	-8.79999E1	2.38419E-5	5.67436E-3	9.36985E-2	2.73137E1	-3.26682E1	-3.26309E1	2.6797E1	1.1929E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.01995E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.42513E-2	-8.80003E1	7.15256E-5	-8.80005E1	1.43051E-4	5.36442E-3	9.3627E-2	2.73254E1	-3.26411E1	-3.26306E1	2.67868E1	1.19607E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.02813E-1
4.0E0	2.3743E4	8.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80003E1	-3.8147E-4	-8.80001E1	-4.76837E-5	5.53131E-3	9.3174E-2	2.72961E1	-3.26458E1	-3.26176E1	2.68202E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80004E1	-4.05312E-4	-8.80002E1	0.0E0	5.45979E-3	9.32217E-2	2.73228E1	-3.2672E1	-3.26077E1	2.68202E1	1.19953E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80003E1	-3.33786E-4	-8.80003E1	2.86102E-4	5.57899E-3	9.36031E-2	2.7302E1	-3.26627E1	-3.26199E1	2.68154E1	1.19902E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80006E1	-4.76837E-5	-8.80003E1	3.09944E-4	5.17368E-3	9.33409E-2	2.73267E1	-3.26621E1	-3.26134E1	2.67932E1	1.20244E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.02277E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80003E1	-2.38419E-4	-8.80004E1	3.8147E-4	5.45979E-3	9.34601E-2	2.73165E1	-3.26014E1	-3.2626E1	2.6819E1	1.19549E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01871E-1
1.2E1	1.09E2	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80003E1	-1.90735E-4	-8.80006E1	3.33786E-4	5.17368E-3	9.31263E-2	2.72927E1	-3.26838E1	-3.26083E1	2.67998E1	1.20174E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.01085E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80005E1	-5.00679E-4	-8.80004E1	0.0E0	4.95911E-3	9.31501E-2	2.72805E1	-3.26284E1	-3.26711E1	2.67956E1	1.19497E-7	2.50789E-3	2.50789E-3	6.31837E-3	3.00563E-1
1.4E1	3.531E3	1.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80002E1	-2.86102E-4	-8.80003E1	0.0E0	5.19753E-3	9.34601E-2	2.73069E1	-3.26639E1	-3.26536E1	2.67938E1	1.19953E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01223E-1
1.5E1	1.11E2	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80001E1	-4.05312E-4	-8.80004E1	7.15256E-5	5.65052E-3	9.32217E-2	2.73033E1	-3.26554E1	-3.2632E1	2.67878E1	1.20383E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00563E-1
1.6E1	5.75E2	1.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80003E1	-4.29153E-4	-8.80003E1	4.76837E-5	5.4121E-3	9.31263E-2	2.73333E1	-3.26506E1	-3.26332E1	2.67902E1	1.19757E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9952E-1
1.7E1	1.373E3	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80002E1	-4.52995E-4	-8.80003E1	1.43051E-4	5.57899E-3	9.30071E-2	2.73122E1	-3.26278E1	-3.26142E1	2.67937E1	1.1929E-7	2.52139E-3	2.52139E-3	6.32978E-3	2.99613E-1
1.8E1	5.46E3	2.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80002E1	-5.00679E-4	-8.80003E1	9.53674E-5	5.29289E-3	9.32932E-2	2.72751E1	-3.26416E1	-3.26326E1	2.68034E1	1.1929E-7	2.51814E-3	2.51814E-3	6.32858E-3	2.99845E-1
1.9E1	2.441E3	2.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80003E1	-5.00679E-4	-8.80002E1	1.90735E-4	5.29289E-3	9.31978E-2	2.72709E1	-3.27023E1	-3.27552E1	2.681E1	1.1929E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.01347E-1
2.0E1	2.571E4	6.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80004E1	-6.19888E-4	-8.8E1	5.24521E-4	5.55515E-3	9.32217E-2	2.73346E1	-3.26673E1	-3.26071E1	2.68388E1	1.1929E-7	2.51826E-3	2.51826E-3	6.31837E-3	3.02527E-1
2.1E1	6.1E1	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80002E1	-6.91414E-4	-8.8E1	4.52995E-4	5.60284E-3	9.3317E-2	2.73057E1	-3.26957E1	-3.26392E1	2.68388E1					
2.2E1	1.817E3	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80004E1	-5.00679E-4	-8.80004E1	3.09944E-4	5.29289E-3	9.34362E-2	2.73201E1	-3.26206E1	-3.26482E1	2.68406E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99175E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80001E1	-4.05312E-4	-8.80005E1	2.6226E-4	5.00679E-3	9.31978E-2	2.73057E1	-3.26661E1	-3.26077E1	2.6807E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00041E-1