[Scan]
initial_time=2015-12-22T18:36:11
final_time=2015-12-22T18:36:33
ip_count=19
run=1021
dataset=4
scan=128
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.78328E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-1.07585E-9
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.48817E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-3.37873E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.60851E-8
mult1=-1.39546E-8
mult2=-2.60284E-9
rf_tmon=-5.41967E-3
rf_agc=3.25285E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=6.5347E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67382E0
bslens_imon=2.62852E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19909E1
lens5a_imon=1.9947E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.05208E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53783E1
cs_ef1b_imon=2.84142E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02156E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04745E1
cs_ea1_imon=2.49701E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00411E0
lens1_imon=1.33885E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64637E1
os_ef1alow_imon=2.96862E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03754E1
cs_ea2_imon=1.5414E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84325E1
cs_ef1a_imon=2.93873E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.33539E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11187E1
os_restr1_imon=4.28783E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15427E1
os_ea1_imon=2.35205E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63786E1
os_ef1bup_imon=3.07705E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.18787E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01954E1
cs_anode1_imon=2.96097E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=4.02101E-8
tplens_vset=1.4E-1
tplens_vmon=1.60609E0
tplens_imon=-3.88826E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26038E1
iondef3_imon=1.50316E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26831E1
iondef2_imon=1.55531E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98144E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=1.03662E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24978E0
ionrepsh_imon=1.78056E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33802E1
lens5b_imon=2.18485E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74582E1
cs_ef2b_imon=3.11388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51397E0
os_ea2_imon=-6.49541E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00463E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71217E1
cs_ef2a_imon=3.17679E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09337E0
os_ef2alow_imon=-2.58848E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.343E-1
os_ef2bup_imon=-5.44167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10921E1
os_restr2_imon=3.42909E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.32292E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.25028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72931E1
iondef1_imon=1.07767E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.07947E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.77233E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.81673E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13362E0
cs_ionaccel_imon=-1.83783E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47202E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.66351E-6
window_vset=0.0E0
window_vmon=1.5629E-1
window_imon=-1.0976E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.38962E-4
mask2_vset=0.0E0
mask2_vmon=-1.86031E1
mask2_imon=-6.24965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.22754E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.44887E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.06763E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2412E0
defgridb_imon=6.06996E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.40827E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0657E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64349E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30815E1
cs_fil1_imon=9.95001E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62337E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6423E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07094E-2
os_fil2_imon=-2.69235E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96448E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.3799E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35645E-1
cs_fil2_imon=-2.34483E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.003E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22227E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.30246E-1
res40_imon=-2.57806E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.55E3	2.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80012E1	-4.05312E-4	-8.79999E1	3.09944E-4	5.65052E-3	9.2721E-2	2.72998E1	-3.26514E1	-3.26278E1	2.6843E1	1.1929E-7	2.51498E-3	2.51498E-3	6.31798E-3	3.02621E-1
2.0E0	1.08398E5	1.05E2	3.16E2	1.6E2	-7.29374E-2	-8.80009E1	-3.57628E-4	-8.80003E1	2.86102E-4	5.65052E-3	9.33886E-2	2.73132E1	-3.26535E1	-3.26067E1	2.68288E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.02253E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80007E1	-3.8147E-4	-8.80004E1	7.15256E-5	5.53131E-3	9.31978E-2	2.72906E1	-3.26822E1	-3.26179E1	2.6807E1	1.1929E-7	2.51725E-3	2.51725E-3	6.28468E-3	3.00522E-1
4.0E0	2.3054E4	1.2E1	6.55E2	3.98E2	-7.40192E-2	-8.80007E1	-3.09944E-4	-8.80003E1	4.76837E-5	5.19753E-3	9.32693E-2	2.72679E1	-3.26396E1	-3.2639E1	2.68123E1	1.1929E-7	2.51182E-3	2.51182E-3	6.3074E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.8001E1	-5.96046E-4	-8.80001E1	3.33786E-4	5.55515E-3	9.34362E-2	2.72925E1	-3.26849E1	-3.26212E1	2.6816E1	1.1929E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.98156E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80007E1	-6.19888E-4	-8.80003E1	-7.15256E-5	4.88758E-3	9.32455E-2	2.73081E1	-3.2653E1	-3.26434E1	2.67956E1	1.1929E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80007E1	-3.8147E-4	-8.80005E1	7.15256E-5	5.36442E-3	9.32455E-2	2.72703E1	-3.26484E1	-3.26284E1	2.68316E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80007E1	-4.05312E-4	-8.80004E1	-1.19209E-4	5.126E-3	9.32693E-2	2.72727E1	-3.26438E1	-3.26321E1	2.6822E1	1.1929E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.01738E-1
1.2E1	1.03E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80007E1	-5.24521E-4	-8.80003E1	2.38419E-4	5.60284E-3	9.30309E-2	2.73207E1	-3.26543E1	-3.26386E1	2.68244E1	1.1929E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.01742E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80009E1	-1.66893E-4	-8.80001E1	4.29153E-4	5.10216E-3	9.29356E-2	2.7265E1	-3.2629E1	-3.26231E1	2.68142E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9926E-1
1.4E1	3.614E3	1.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80008E1	-9.53674E-5	-8.80003E1	1.43051E-4	5.34058E-3	9.30786E-2	2.73087E1	-3.26452E1	-3.26639E1	2.68148E1	1.1929E-7	2.50898E-3	2.50898E-3	6.29098E-3	3.00824E-1
1.5E1	1.09E2	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.80008E1	-2.6226E-4	-8.80005E1	1.19209E-4	5.24521E-3	9.34362E-2	2.73177E1	-3.26777E1	-3.2626E1	2.68256E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.03449E-1
1.6E1	5.24E2	1.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80007E1	-2.6226E-4	-8.80002E1	9.53674E-5	5.38826E-3	9.29832E-2	2.73155E1	-3.26712E1	-3.26446E1	2.67931E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.02769E-1
1.7E1	1.335E3	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80009E1	-9.53674E-5	-8.80003E1	3.09944E-4	5.00679E-3	9.377E-2	2.72782E1	-3.26499E1	-3.26132E1	2.68178E1	1.1929E-7	2.52236E-3	2.52236E-3	6.31798E-3	3.03383E-1
1.8E1	5.542E3	3.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80008E1	0.0E0	-8.80004E1	-2.86102E-4	5.07832E-3	9.32932E-2	2.73033E1	-3.26921E1	-3.26352E1	2.67851E1	1.20031E-7	2.51248E-3	2.51248E-3	6.3074E-3	3.02545E-1
1.9E1	2.451E3	1.0E0	7.68E2	5.29E2	-7.286E-2	-8.80007E1	-1.66893E-4	-8.80006E1	1.90735E-4	5.26905E-3	9.28164E-2	2.73263E1	-3.26644E1	-3.25977E1	2.68018E1	1.19343E-7	2.5225E-3	2.5225E-3	6.33538E-3	3.03618E-1
2.0E1	2.5992E4	7.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80009E1	9.53674E-5	-8.80003E1	1.43051E-4	5.03063E-3	9.29117E-2	2.72788E1	-3.26823E1	-3.26346E1	2.68028E1	1.19595E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00966E-1
2.1E1	5.9E1	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80008E1	2.38419E-5	-8.80004E1	4.29153E-4	5.26905E-3	9.32455E-2	2.73027E1	-3.26667E1	-3.26437E1	2.67758E1	1.19872E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.0201E-1
2.2E1	1.787E3	1.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80009E1	-2.14577E-4	-8.80003E1	2.14577E-4	5.10216E-3	9.30309E-2	2.73169E1	-3.26791E1	-3.26101E1	2.6834E1	1.2026E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.02253E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.8001E1	-1.66893E-4	-8.80006E1	4.52995E-4	4.88758E-3	9.32693E-2	2.72931E1	-3.26831E1	-3.26038E1	2.68028E1	1.20209E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.0148E-1