[Scan]
initial_time=2015-12-22T18:36:41
final_time=2015-12-22T18:37:02
ip_count=19
run=1021
dataset=4
scan=129
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.79087E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-1.00353E-9
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.47685E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-3.16513E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.61081E-8
mult1=-1.55207E-8
mult2=-2.75101E-9
rf_tmon=-5.25186E-3
rf_agc=3.31157E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=6.63066E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6609E0
bslens_imon=2.37691E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19842E1
lens5a_imon=1.96032E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=2.82377E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04645E2
lens23_imon=1.02323E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05159E1
cs_ea1_imon=2.4969E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03773E0
lens1_imon=1.46728E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.54019E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.93008E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=1.33178E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11538E1
os_restr1_imon=4.28986E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15376E1
os_ea1_imon=2.36912E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=1.19085E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.9331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=2.95819E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=4.00878E-8
tplens_vset=1.4E-1
tplens_vmon=1.56593E0
tplens_imon=-3.55518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26102E1
iondef3_imon=1.50834E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26977E1
iondef2_imon=1.57417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.9824E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=1.02435E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23912E0
ionrepsh_imon=1.78052E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33811E1
lens5b_imon=2.16738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48452E0
os_ea2_imon=-7.23616E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00297E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.75285E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05833E-1
os_ef2bup_imon=-5.45222E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=3.41193E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.30848E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.25254E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.0783E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68024E1
iondef4_imon=1.06972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.78322E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.78803E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.88069E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47125E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.58332E-6
window_vset=0.0E0
window_vmon=1.63283E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39023E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-7.52649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.49843E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.61712E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.05246E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48528E0
defgridb_imon=6.0048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33352E1
os_fil1_imon=9.42024E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0659E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64012E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30826E1
cs_fil1_imon=9.95008E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62318E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64691E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97733E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.39501E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22265E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34099E-3
inlet_lpb_pmon=3.03081E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5147E-3
foreline_cvt_pmon=2.5147E-3
chamber_tmon=1.40017E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.81226E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.491E3	1.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80009E1	0.0E0	-8.80009E1	4.76837E-5	5.4121E-3	9.32693E-2	2.73335E1	-3.26764E1	-3.26341E1	2.68134E1	1.20311E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01223E-1
2.0E0	1.08379E5	1.03E2	3.16E2	1.6E2	-7.22418E-2	-8.80007E1	-2.14577E-4	-8.80001E1	-3.33786E-4	5.17368E-3	9.33647E-2	2.73001E1	-3.26603E1	-3.2626E1	2.68057E1	1.20444E-7	2.51919E-3	2.51919E-3	6.32858E-3	3.00097E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80011E1	-9.53674E-5	-8.80002E1	-1.66893E-4	5.48363E-3	9.30071E-2	2.73163E1	-3.26738E1	-3.26419E1	2.68215E1	1.20316E-7	2.52977E-3	2.52977E-3	6.3131E-3	2.9971E-1
4.0E0	2.3364E4	1.7E1	6.55E2	3.98E2	-7.29374E-2	-8.80009E1	-2.14577E-4	-8.80002E1	0.0E0	5.10216E-3	9.3317E-2	2.73299E1	-3.26384E1	-3.26189E1	2.6813E1	1.20055E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.0071E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80008E1	-1.90735E-4	-8.8E1	-2.14577E-4	5.00679E-3	9.34124E-2	2.7291E1	-3.26627E1	-3.26015E1	2.68244E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80012E1	-6.19888E-4	-8.79999E1	1.43051E-4	5.19753E-3	9.35555E-2	2.73464E1	-3.26762E1	-3.26136E1	2.68136E1	1.2035E-7	2.5225E-3	2.5225E-3	6.32418E-3	3.03349E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80009E1	-4.29153E-4	-8.80001E1	2.86102E-4	5.38826E-3	9.33647E-2	2.72579E1	-3.26465E1	-3.26215E1	2.68104E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.02511E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.8001E1	-1.90735E-4	-8.80001E1	-2.38419E-5	5.67436E-3	9.30786E-2	2.73127E1	-3.26438E1	-3.2619E1	2.68166E1	1.20078E-7	2.50955E-3	2.50955E-3	6.3282E-3	2.99753E-1
1.2E1	1.36E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80009E1	-5.00679E-4	-8.80001E1	-1.19209E-4	5.36442E-3	9.29594E-2	2.73216E1	-3.26602E1	-3.26673E1	2.68001E1	1.19686E-7	2.51526E-3	2.51526E-3	6.33819E-3	3.01075E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80011E1	-3.33786E-4	-8.80003E1	-4.76837E-5	5.65052E-3	9.3317E-2	2.73417E1	-3.27089E1	-3.2605E1	2.68268E1					
1.4E1	3.458E3	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80011E1	-4.05312E-4	-8.80002E1	-4.76837E-5	5.88894E-3	9.3317E-2	2.7308E1	-3.2706E1	-3.26231E1	2.68007E1	1.20278E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.00563E-1
1.5E1	9.6E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80012E1	-4.76837E-5	-8.80001E1	-4.76837E-5	5.67436E-3	9.32693E-2	2.73339E1	-3.26434E1	-3.2653E1	2.6768E1	1.1944E-7	2.51498E-3	2.51498E-3	6.32328E-3	3.00097E-1
1.6E1	5.65E2	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80012E1	-4.52995E-4	-8.80003E1	-2.14577E-4	5.53131E-3	9.30071E-2	2.73039E1	-3.26621E1	-3.25856E1	2.68208E1	1.1929E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00041E-1
1.7E1	1.367E3	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80013E1	-4.76837E-5	-8.80002E1	-4.76837E-5	5.76973E-3	9.31978E-2	2.7276E1	-3.26501E1	-3.26478E1	2.68146E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00563E-1
1.8E1	5.605E3	1.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80012E1	-3.57628E-4	-8.80004E1	2.38419E-5	5.4121E-3	9.27925E-2	2.72624E1	-3.26476E1	-3.26308E1	2.6813E1	1.1929E-7	2.52509E-3	2.52509E-3	6.29185E-3	3.01237E-1
1.9E1	2.552E3	0.0E0	7.68E2	5.29E2	-7.36328E-2	-8.80012E1	-2.6226E-4	-8.8E1	1.19209E-4	5.79357E-3	9.33886E-2	2.73706E1	-3.26783E1	-3.25743E1	2.68088E1	1.1929E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9952E-1
2.0E1	2.5598E4	9.0E0	8.08E2	5.58E2	-7.27828E-2	-8.8001E1	1.90735E-4	-8.79999E1	-9.53674E-5	5.26905E-3	9.30309E-2	2.72889E1	-3.26615E1	-3.26206E1	2.67992E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.99E-1
2.1E1	3.9E1	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80013E1	2.38419E-5	-8.80003E1	2.38419E-5	5.36442E-3	9.32217E-2	2.73021E1	-3.26437E1	-3.25947E1	2.68233E1	1.1929E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.99E-1
2.2E1	1.809E3	2.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80015E1	-2.38419E-5	-8.80002E1	-2.14577E-4	5.50747E-3	9.32932E-2	2.72916E1	-3.26811E1	-3.26138E1	2.68256E1	1.1929E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.0148E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80009E1	-1.90735E-4	-8.80004E1	7.15256E-5	5.29289E-3	9.31263E-2	2.73183E1	-3.26977E1	-3.26102E1	2.68024E1	1.1929E-7	2.5147E-3	2.5147E-3	6.34099E-3	3.03081E-1