[Scan]
initial_time=2015-12-22T18:37:10
final_time=2015-12-22T18:37:30
ip_count=19
run=1021
dataset=4
scan=130
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.75363E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-9.98449E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.45736E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-3.1316E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.60702E-8
mult1=-2.00592E-8
mult2=-2.6707E-9
rf_tmon=-4.38024E-3
rf_agc=3.39945E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=6.17206E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.4981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20103E1
lens5a_imon=1.98019E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04938E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=2.8335E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02009E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0488E1
cs_ea1_imon=2.52129E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00951E0
lens1_imon=1.48871E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.95855E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0384E1
cs_ea2_imon=1.53858E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=2.92864E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.32459E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=4.29346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=2.3652E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27012E0
cs_ionrep_imon=1.20224E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93211E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.96504E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=4.0067E-8
tplens_vset=1.4E-1
tplens_vmon=1.58315E0
tplens_imon=-4.07495E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.49208E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.58292E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98256E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=1.02513E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26291E0
ionrepsh_imon=1.78624E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.11497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48282E0
os_ea2_imon=-7.64385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.0045E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71384E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.73483E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15444E-1
os_ef2bup_imon=-5.40537E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10739E1
os_restr2_imon=3.42166E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.3119E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.2511E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72841E1
iondef1_imon=1.10599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6822E1
iondef4_imon=1.078E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.77897E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.84737E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=1.50669E-1
window_imon=-1.08782E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86092E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.51259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.24725E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.42246E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27525E0
defgridb_imon=6.02014E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.44655E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06771E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64205E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30833E1
cs_fil1_imon=9.96498E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62582E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64397E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.32562E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.20346E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22278E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40017E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.05543E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.482E3	2.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80011E1	-5.00679E-4	-8.80001E1	2.38419E-4	5.126E-3	9.31025E-2	2.73045E1	-3.26644E1	-3.25906E1	2.68238E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00824E-1
2.0E0	1.08415E5	1.01E2	3.16E2	1.6E2	-7.27828E-2	-8.80012E1	-3.57628E-4	-8.80004E1	2.14577E-4	5.19753E-3	9.30548E-2	2.73235E1	-3.26725E1	-3.26168E1	2.68022E1	1.1929E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.0148E-1
3.0E0	3.4E1	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80013E1	-2.6226E-4	-8.80003E1	3.33786E-4	5.36442E-3	9.31263E-2	2.73254E1	-3.26399E1	-3.26556E1	2.68215E1	1.1929E-7	2.51804E-3	2.51804E-3	6.34099E-3	3.02277E-1
4.0E0	2.331E4	1.8E1	6.55E2	3.98E2	-7.37874E-2	-8.80013E1	-5.00679E-4	-8.80001E1	-4.76837E-5	5.34058E-3	9.31263E-2	2.73016E1	-3.26431E1	-3.26213E1	2.68105E1	1.1929E-7	2.51287E-3	2.51287E-3	6.31269E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80011E1	-4.52995E-4	-8.80001E1	-9.53674E-5	5.31673E-3	9.29832E-2	2.73117E1	-3.2638E1	-3.26416E1	2.68178E1	1.1929E-7	2.51709E-3	2.51709E-3	6.29684E-3	3.006E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80012E1	-6.4373E-4	-8.80002E1	9.53674E-5	5.38826E-3	9.34124E-2	2.73157E1	-3.26313E1	-3.26083E1	2.6798E1	1.1929E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80009E1	-3.8147E-4	-8.80001E1	1.19209E-4	4.86374E-3	9.31978E-2	2.73219E1	-3.26675E1	-3.2626E1	2.6804E1	1.1929E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80011E1	-7.39098E-4	-8.80001E1	-2.38419E-5	5.24521E-3	9.35316E-2	2.72763E1	-3.26615E1	-3.2599E1	2.68052E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00563E-1
1.2E1	1.08E2	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80012E1	-5.96046E-4	-8.8E1	1.19209E-4	5.48363E-3	9.3317E-2	2.72986E1	-3.26455E1	-3.26325E1	2.67881E1	1.1929E-7	2.52757E-3	2.52757E-3	6.30192E-3	3.00302E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80011E1	-4.29153E-4	-8.80002E1	1.43051E-4	5.05447E-3	9.33886E-2	2.72992E1	-3.26561E1	-3.26402E1	2.68123E1	1.1929E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00453E-1
1.4E1	3.435E3	1.0E0	5.66E2	3.82E2	-7.27053E-2	-8.8001E1	-5.96046E-4	-8.80001E1	7.15256E-5	5.14984E-3	9.32455E-2	2.73243E1	-3.26488E1	-3.26494E1	2.67824E1	1.1929E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00453E-1
1.5E1	8.8E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80011E1	-5.00679E-4	-8.79999E1	-7.15256E-5	5.29289E-3	9.32455E-2	2.73184E1	-3.26438E1	-3.26238E1	2.67974E1	1.1929E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.01347E-1
1.6E1	5.83E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80011E1	-5.72205E-4	-8.80004E1	2.14577E-4	5.48363E-3	9.32932E-2	2.72927E1	-3.26685E1	-3.2626E1	2.67746E1	1.1929E-7	2.51558E-3	2.51558E-3	6.2993E-3	3.01706E-1
1.7E1	1.392E3	1.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80013E1	-5.96046E-4	-8.80002E1	3.09944E-4	5.45979E-3	9.29356E-2	2.7321E1	-3.26572E1	-3.26334E1	2.67995E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00453E-1
1.8E1	5.369E3	4.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80016E1	-3.09944E-4	-8.80002E1	1.19209E-4	5.24521E-3	9.33647E-2	2.73193E1	-3.2688E1	-3.26313E1	2.68059E1	1.1929E-7	2.51581E-3	2.51581E-3	6.32978E-3	2.99879E-1
1.9E1	2.445E3	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80014E1	-4.76837E-4	-8.80001E1	1.19209E-4	5.24521E-3	9.31501E-2	2.73814E1	-3.26801E1	-3.25034E1	2.67758E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01223E-1
2.0E1	2.5523E4	1.0E1	8.08E2	5.58E2	-7.34782E-2	-8.80011E1	-4.29153E-4	-8.80005E1	4.76837E-4	5.34058E-3	9.30786E-2	2.72961E1	-3.26494E1	-3.26146E1	2.68058E1	1.1929E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01871E-1
2.1E1	4.8E1	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.80011E1	-6.91414E-4	-8.80007E1	3.57628E-4	5.26905E-3	9.32932E-2	2.73281E1	-3.26614E1	-3.26272E1	2.67649E1	1.1929E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.01347E-1
2.2E1	1.763E3	1.0E0	8.89E2	6.17E2	-7.30146E-2	-8.8001E1	-4.29153E-4	-8.80005E1	3.57628E-4	4.95911E-3	9.34124E-2	2.72709E1	-3.26747E1	-3.26536E1	2.6813E1	1.1929E-7	2.51096E-3	2.51096E-3	6.34518E-3	2.9892E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80012E1	-3.09944E-4	-8.80006E1	1.66893E-4	5.38826E-3	9.34124E-2	2.72841E1	-3.26717E1	-3.26284E1	2.6822E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9952E-1