[Scan]
initial_time=2015-12-22T18:39:28
final_time=2015-12-22T18:39:48
ip_count=19
run=1021
dataset=4
scan=135
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.44059E-2
qbias_imon=-3.90817E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-9.0487E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=1.47822E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.87819E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.60836E-8
mult1=-2.3563E-8
mult2=-2.66671E-9
rf_tmon=-4.75876E-3
rf_agc=3.3658E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=6.40225E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68568E0
bslens_imon=2.61051E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20343E1
lens5a_imon=1.96705E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53737E1
cs_ef1b_imon=2.82891E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05029E1
cs_ea1_imon=2.51495E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00352E0
lens1_imon=1.3434E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64695E1
os_ef1alow_imon=2.96966E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.54479E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84267E1
cs_ef1a_imon=2.92448E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.32803E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11378E1
os_restr1_imon=4.28574E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=2.36346E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63884E1
os_ef1bup_imon=3.08747E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25859E0
cs_ionrep_imon=1.1951E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.9336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02035E1
cs_anode1_imon=2.96792E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=4.00174E-8
tplens_vset=1.4E-1
tplens_vmon=1.58126E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.50338E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.5724E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.9841E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=1.0123E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.281E0
ionrepsh_imon=1.77202E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33911E1
lens5b_imon=2.18083E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.12396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42848E0
os_ea2_imon=-6.24513E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00715E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71397E1
cs_ef2a_imon=3.17192E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05977E0
os_ef2alow_imon=-2.80395E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09394E-1
os_ef2bup_imon=-5.38954E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10753E1
os_restr2_imon=3.40859E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.31238E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.25028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72973E1
iondef1_imon=1.08149E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68322E1
iondef4_imon=1.08156E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=5.68451E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.76875E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11103E0
cs_ionaccel_imon=-1.87606E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.4716E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56475E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.5571E-1
window_imon=-1.13583E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39001E-4
mask2_vset=0.0E0
mask2_vmon=-1.85939E1
mask2_imon=-7.32698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.19404E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.41183E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.41702E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47643E0
defgridb_imon=5.83491E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33311E1
os_fil1_imon=9.39924E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07254E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64302E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30872E1
cs_fil1_imon=9.9452E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62308E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64765E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.01532E-2
os_fil2_imon=-2.65181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82547E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.23682E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36019E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08409E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22273E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40053E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.25815E-1
res40_imon=-2.57806E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.52E3	0.0E0	1.47E2	4.1E1	-7.47923E-2	-8.80017E1	-6.67572E-4	-8.80004E1	3.8147E-4	5.36442E-3	9.35555E-2	2.73358E1	-3.26405E1	-3.26527E1	2.68233E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99941E-1
2.0E0	1.07607E5	1.14E2	3.16E2	1.6E2	-7.45602E-2	-8.80015E1	-4.76837E-4	-8.79998E1	-2.38419E-5	5.14984E-3	9.36031E-2	2.73345E1	-3.26193E1	-3.26321E1	2.6792E1	1.1929E-7	2.51919E-3	2.51919E-3	6.3074E-3	3.01356E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.43285E-2	-8.80017E1	-5.72205E-4	-8.80002E1	3.57628E-4	5.14984E-3	9.31978E-2	2.73116E1	-3.26809E1	-3.26266E1	2.6803E1	1.1929E-7	2.51359E-3	2.51359E-3	6.31299E-3	2.99613E-1
4.0E0	2.3086E4	1.0E1	6.55E2	3.98E2	-7.36328E-2	-8.80017E1	-2.86102E-4	-8.80002E1	3.09944E-4	5.31673E-3	9.33409E-2	2.72703E1	-3.26549E1	-3.26124E1	2.68172E1	1.1929E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00563E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80019E1	-9.53674E-5	-8.8E1	4.05312E-4	5.36442E-3	9.32455E-2	2.73574E1	-3.2638E1	-3.2626E1	2.68004E1	1.1929E-7	2.51498E-3	2.51498E-3	6.32328E-3	3.02368E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80019E1	-3.33786E-4	-8.80001E1	6.67572E-4	5.29289E-3	9.32932E-2	2.73177E1	-3.26597E1	-3.26062E1	2.68241E1	1.1929E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80018E1	-5.00679E-4	-8.80002E1	4.05312E-4	5.29289E-3	9.34601E-2	2.72473E1	-3.26478E1	-3.25953E1	2.68035E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80018E1	-2.14577E-4	-8.80003E1	3.09944E-4	5.36442E-3	9.32217E-2	2.72561E1	-3.26474E1	-3.26529E1	2.68144E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3514E-3	3.00824E-1
1.2E1	1.29E2	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80018E1	-9.53674E-5	-8.80005E1	1.19209E-4	5.26905E-3	9.30548E-2	2.72787E1	-3.26561E1	-3.26128E1	2.6804E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80015E1	-2.6226E-4	-8.80001E1	-2.38419E-5	5.36442E-3	9.32217E-2	2.72985E1	-3.26392E1	-3.25882E1	2.67908E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00041E-1
1.4E1	3.514E3	1.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80016E1	-1.90735E-4	-8.8E1	4.76837E-5	5.38826E-3	9.3317E-2	2.72931E1	-3.26699E1	-3.26561E1	2.68018E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01347E-1
1.5E1	9.1E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80018E1	-2.38419E-4	-8.80003E1	9.53674E-5	5.24521E-3	9.30786E-2	2.73163E1	-3.2682E1	-3.25924E1	2.68034E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
1.6E1	5.38E2	0.0E0	6.47E2	4.41E2	-7.39421E-2	-8.80015E1	-2.6226E-4	-8.80002E1	7.15256E-5	5.74589E-3	9.33409E-2	2.72877E1	-3.26717E1	-3.26248E1	2.67794E1	1.1929E-7	2.52492E-3	2.52492E-3	6.33977E-3	3.00453E-1
1.7E1	1.317E3	2.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80013E1	-3.57628E-4	-8.80003E1	2.38419E-5	5.79357E-3	9.32217E-2	2.73411E1	-3.27363E1	-3.25788E1	2.68112E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9978E-1
1.8E1	5.632E3	1.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80017E1	-5.00679E-4	-8.80003E1	1.19209E-4	5.17368E-3	9.32932E-2	2.7251E1	-3.26759E1	-3.25605E1	2.67982E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.03286E-1
1.9E1	2.433E3	2.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80017E1	-3.57628E-4	-8.80001E1	1.66893E-4	5.19753E-3	9.35078E-2	2.71909E1	-3.2614E1	-3.26849E1	2.67978E1	1.1929E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.02396E-1
2.0E1	2.555E4	1.8E1	8.08E2	5.58E2	-7.30918E-2	-8.80014E1	-7.15256E-5	-8.8E1	1.90735E-4	5.50747E-3	9.34839E-2	2.7288E1	-3.26266E1	-3.26152E1	2.6816E1	1.1929E-7	2.5147E-3	2.5147E-3	6.34099E-3	3.02545E-1
2.1E1	5.7E1	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80016E1	-2.38419E-4	-8.80002E1	1.43051E-4	5.50747E-3	9.34124E-2	2.72826E1	-3.27084E1	-3.26466E1	2.68088E1	1.19634E-7	2.52093E-3	2.52093E-3	6.3282E-3	3.02479E-1
2.2E1	1.826E3	0.0E0	8.89E2	6.17E2	-7.43285E-2	-8.80015E1	-5.96046E-4	-8.80003E1	5.00679E-4	5.50747E-3	9.31025E-2	2.73611E1	-3.26844E1	-3.26313E1	2.6795E1	1.20191E-7	2.52473E-3	2.52473E-3	6.31299E-3	2.99879E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.44059E-2	-8.80015E1	-7.15256E-5	-8.80003E1	3.33786E-4	5.22137E-3	9.31978E-2	2.72973E1	-3.26669E1	-3.26272E1	2.68322E1	1.19757E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.02133E-1