[Scan]
initial_time=2015-12-22T18:39:55
final_time=2015-12-22T18:40:16
ip_count=19
run=1021
dataset=4
scan=136
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.86629E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-9.23657E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.54961E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.84293E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.60536E-8
mult1=-1.63627E-8
mult2=-2.63078E-9
rf_tmon=-4.71671E-3
rf_agc=3.31413E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=6.48797E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62138E0
bslens_imon=2.46539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19925E1
lens5a_imon=1.98403E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53899E1
cs_ef1b_imon=2.82485E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02344E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04959E1
cs_ea1_imon=2.51778E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99821E0
lens1_imon=1.38941E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64488E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03997E1
cs_ea2_imon=1.53913E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.93369E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.31488E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.29635E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=2.36381E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=1.19475E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93487E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=2.95063E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20582E0
olens4_imon=4.00182E-8
tplens_vset=1.4E-1
tplens_vmon=1.57005E0
tplens_imon=-3.16584E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26158E1
iondef3_imon=1.47047E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.58302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98402E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=1.00501E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29752E0
ionrepsh_imon=1.75291E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3384E1
lens5b_imon=2.17906E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.11244E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49042E0
os_ea2_imon=-6.20973E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71348E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05876E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10997E1
os_restr2_imon=3.42238E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.30495E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.25794E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73285E1
iondef1_imon=1.09317E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68148E1
iondef4_imon=1.07296E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=5.73368E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.76281E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.98881E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.50669E-1
window_imon=-1.12746E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86182E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=7.325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93752E3
defgrida_imon=6.51447E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.38163E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34945E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33335E1
os_fil1_imon=9.4197E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06632E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64038E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30818E1
cs_fil1_imon=9.9517E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61609E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64159E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15461E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.49373E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42453E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22177E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19342E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.8452E-1
res40_imon=-2.60509E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.499E3	0.0E0	1.47E2	4.1E1	-7.45602E-2	-8.80015E1	-5.96046E-4	-8.79999E1	0.0E0	5.57899E-3	9.32693E-2	2.73157E1	-3.26608E1	-3.26119E1	2.68134E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01609E-1
2.0E0	1.07879E5	9.3E1	3.16E2	1.6E2	-7.44059E-2	-8.80017E1	-5.24521E-4	-8.8E1	-1.66893E-4	5.67436E-3	9.30309E-2	2.73167E1	-3.2667E1	-3.26266E1	2.68051E1	1.1929E-7	2.51203E-3	2.51203E-3	6.29128E-3	3.03286E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80017E1	-6.19888E-4	-8.80002E1	2.38419E-5	5.65052E-3	9.3174E-2	2.72883E1	-3.26741E1	-3.26248E1	2.68124E1	1.1929E-7	2.51248E-3	2.51248E-3	6.32418E-3	2.99879E-1
4.0E0	2.3326E4	9.0E0	6.55E2	3.98E2	-7.41738E-2	-8.80018E1	-4.29153E-4	-8.80004E1	2.14577E-4	5.6982E-3	9.32932E-2	2.72642E1	-3.26693E1	-3.26597E1	2.68134E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.47923E-2	-8.80018E1	-4.05312E-4	-8.80005E1	2.38419E-4	5.45979E-3	9.34124E-2	2.73262E1	-3.26528E1	-3.26237E1	2.67885E1	1.1929E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01871E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.43285E-2	-8.80018E1	-5.00679E-4	-8.80001E1	2.6226E-4	5.55515E-3	9.35078E-2	2.73443E1	-3.26603E1	-3.26425E1	2.68051E1	1.1929E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.03129E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.42513E-2	-8.80015E1	-1.90735E-4	-8.80001E1	-4.76837E-5	5.34058E-3	9.32455E-2	2.73157E1	-3.26561E1	-3.25942E1	2.6814E1	1.19394E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.47149E-2	-8.80014E1	-3.33786E-4	-8.80003E1	-2.14577E-4	5.48363E-3	9.33647E-2	2.72817E1	-3.26681E1	-3.2614E1	2.68082E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
1.2E1	1.18E2	0.0E0	4.85E2	3.23E2	-7.44059E-2	-8.80016E1	-7.15256E-5	-8.80003E1	0.0E0	5.45979E-3	9.31501E-2	2.73069E1	-3.26236E1	-3.25906E1	2.68154E1	1.19809E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9978E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.80019E1	-5.24521E-4	-8.80005E1	1.66893E-4	5.67436E-3	9.34601E-2	2.73033E1	-3.26344E1	-3.2641E1	2.68118E1	1.19493E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9943E-1
1.4E1	3.604E3	6.0E0	5.66E2	3.82E2	-7.47149E-2	-8.80016E1	-4.29153E-4	-8.80003E1	2.14577E-4	5.4121E-3	9.34601E-2	2.7308E1	-3.26449E1	-3.26319E1	2.68304E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01085E-1
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80016E1	-2.6226E-4	-8.80004E1	-2.38419E-5	5.57899E-3	9.34362E-2	2.72895E1	-3.26518E1	-3.26194E1	2.68244E1	1.1929E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.03449E-1
1.6E1	5.8E2	0.0E0	6.47E2	4.41E2	-7.40192E-2	-8.80018E1	-6.19888E-4	-8.80004E1	0.0E0	5.67436E-3	9.30786E-2	2.73057E1	-3.27005E1	-3.26428E1	2.67966E1	1.19549E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9952E-1
1.7E1	1.338E3	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80018E1	-4.05312E-4	-8.80006E1	1.66893E-4	5.43594E-3	9.31025E-2	2.73015E1	-3.2644E1	-3.26476E1	2.67939E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9943E-1
1.8E1	5.481E3	3.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80019E1	-2.38419E-4	-8.80001E1	2.38419E-5	5.76973E-3	9.32217E-2	2.72835E1	-3.26408E1	-3.26499E1	2.68043E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01347E-1
1.9E1	2.353E3	3.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80017E1	-5.96046E-4	-8.79999E1	0.0E0	5.72205E-3	9.30071E-2	2.7388E1	-3.27744E1	-3.262E1	2.67926E1	1.1929E-7	2.51603E-3	2.51603E-3	6.3074E-3	3.02115E-1
2.0E1	2.5737E4	2.3E1	8.08E2	5.58E2	-7.34782E-2	-8.80018E1	-3.57628E-4	-8.80002E1	2.38419E-5	5.38826E-3	9.30071E-2	2.72925E1	-3.26993E1	-3.26266E1	2.68148E1	1.19497E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01609E-1
2.1E1	5.1E1	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.80017E1	-5.72205E-4	-8.80001E1	9.53674E-5	5.55515E-3	9.31025E-2	2.72979E1	-3.26506E1	-3.26194E1	2.68292E1	1.1929E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.01085E-1
2.2E1	1.746E3	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80017E1	-4.76837E-4	-8.80002E1	-9.53674E-5	5.29289E-3	9.30071E-2	2.72715E1	-3.2636E1	-3.26396E1	2.68298E1	1.19443E-7	2.5131E-3	2.5131E-3	6.34518E-3	3.0071E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80017E1	-5.48363E-4	-8.80001E1	4.76837E-5	5.45979E-3	9.31978E-2	2.73285E1	-3.26711E1	-3.26158E1	2.68148E1	1.19342E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00041E-1