[Scan]
initial_time=2015-12-22T18:40:23
final_time=2015-12-22T18:40:43
ip_count=19
run=1021
dataset=4
scan=137
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.79858E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-9.19008E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.46924E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.69132E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.60578E-8
mult1=-1.59533E-8
mult2=-2.61282E-9
rf_tmon=-5.20938E-3
rf_agc=3.25886E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=6.43706E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63095E0
bslens_imon=2.4269E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19504E1
lens5a_imon=1.97871E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04819E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=2.82857E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02253E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04866E1
cs_ea1_imon=2.52065E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01743E0
lens1_imon=1.36318E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64672E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03934E1
cs_ea2_imon=1.53827E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.92205E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.31593E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11222E1
os_restr1_imon=4.28504E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15108E1
os_ea1_imon=2.36422E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63421E1
os_ef1bup_imon=3.08052E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24572E0
cs_ionrep_imon=1.20768E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93257E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02012E1
cs_anode1_imon=2.96584E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=3.99552E-8
tplens_vset=1.4E-1
tplens_vmon=1.56843E0
tplens_imon=-3.99255E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.49204E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2638E1
iondef2_imon=1.58277E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98415E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=1.02462E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=1.77883E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33883E1
lens5b_imon=2.19041E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74744E1
cs_ef2b_imon=3.11458E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48153E0
os_ea2_imon=-8.58114E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00512E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71362E1
cs_ef2a_imon=3.18443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04761E0
os_ef2alow_imon=-2.61281E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98968E-1
os_ef2bup_imon=-5.36521E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10909E1
os_restr2_imon=3.4138E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.29859E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01896E1
cs_anode2_imon=2.26662E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72811E1
iondef1_imon=1.09193E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6803E1
iondef4_imon=1.06731E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.76184E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.76471E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11798E0
cs_ionaccel_imon=-1.88996E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02129E2
cs_ionfocb_imon=1.47209E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.56273E-6
window_vset=0.0E0
window_vmon=1.31384E-1
window_imon=-1.07675E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39053E-4
mask2_vset=0.0E0
mask2_vmon=-1.8595E1
mask2_imon=-7.91778E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.75245E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=7.0433E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.34225E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2847E0
defgridb_imon=6.04215E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33302E1
os_fil1_imon=9.39206E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07845E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64144E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30816E1
cs_fil1_imon=9.9463E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62378E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6448E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00876E-2
os_fil2_imon=-2.70973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79072E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.40724E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36519E-1
cs_fil2_imon=-2.26374E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0783E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2225E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.69632E-1
res40_imon=-2.5155E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.506E3	1.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80018E1	-4.76837E-4	-8.80003E1	3.09944E-4	5.60284E-3	9.31978E-2	2.7349E1	-3.26675E1	-3.26314E1	2.67561E1	1.1929E-7	2.52131E-3	2.52131E-3	6.29684E-3	3.006E-1
2.0E0	1.08272E5	9.5E1	3.16E2	1.6E2	-7.32464E-2	-8.80015E1	-5.96046E-4	-8.80003E1	1.66893E-4	5.60284E-3	9.31978E-2	2.73204E1	-3.26707E1	-3.26138E1	2.68294E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01085E-1
3.0E0	1.2E1	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80015E1	-5.24521E-4	-8.80002E1	-2.38419E-4	5.57899E-3	9.31025E-2	2.73242E1	-3.27019E1	-3.25936E1	2.67659E1	1.1929E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.01742E-1
4.0E0	2.345E4	1.6E1	6.55E2	3.98E2	-7.40967E-2	-8.80017E1	-7.15256E-4	-8.8E1	-2.38419E-5	5.67436E-3	9.32455E-2	2.73333E1	-3.26843E1	-3.26819E1	2.68016E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.47923E-2	-8.80018E1	-8.10623E-4	-8.80001E1	2.38419E-5	5.26905E-3	9.31501E-2	2.73195E1	-3.26543E1	-3.26482E1	2.68184E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00453E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.46377E-2	-8.80017E1	-6.67572E-4	-8.8E1	1.66893E-4	5.48363E-3	9.30071E-2	2.72781E1	-3.2635E1	-3.26428E1	2.67986E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.46377E-2	-8.80017E1	-1.00136E-3	-8.80001E1	1.90735E-4	5.17368E-3	9.29117E-2	2.72979E1	-3.26122E1	-3.26554E1	2.6819E1	1.1929E-7	2.51116E-3	2.51116E-3	6.30192E-3	2.9978E-1
8.0E0	0.0E0	1.0E0	1.332E3	8.73E2	-7.49466E-2	-8.80018E1	-7.62939E-4	-8.8E1	3.57628E-4	5.48363E-3	9.30548E-2	2.73051E1	-3.26874E1	-3.26024E1	2.68076E1	1.1929E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00563E-1
1.2E1	1.23E2	0.0E0	4.85E2	3.23E2	-7.51013E-2	-8.80018E1	-5.72205E-4	-8.80001E1	3.33786E-4	5.43594E-3	9.32932E-2	2.73159E1	-3.26735E1	-3.26146E1	2.68118E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.80016E1	-4.05312E-4	-8.80001E1	2.38419E-5	5.55515E-3	9.32932E-2	2.7346E1	-3.26915E1	-3.26134E1	2.68034E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
1.4E1	3.53E3	1.0E0	5.66E2	3.82E2	-7.39421E-2	-8.80017E1	-6.19888E-4	-8.80003E1	5.48363E-4	5.43594E-3	9.33647E-2	2.73027E1	-3.27053E1	-3.2617E1	2.68184E1	1.1929E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00563E-1
1.5E1	1.14E2	0.0E0	6.06E2	4.11E2	-7.41738E-2	-8.80019E1	-6.19888E-4	-8.80002E1	5.00679E-4	5.29289E-3	9.31978E-2	2.73207E1	-3.26591E1	-3.2653E1	2.6816E1	1.1929E-7	2.51136E-3	2.51136E-3	6.32418E-3	3.02545E-1
1.6E1	5.45E2	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80019E1	-5.48363E-4	-8.80002E1	1.90735E-4	5.60284E-3	9.3317E-2	2.73213E1	-3.26867E1	-3.262E1	2.68046E1	1.19342E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.02922E-1
1.7E1	1.316E3	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80019E1	-2.86102E-4	-8.80003E1	2.38419E-4	5.43594E-3	9.33647E-2	2.73045E1	-3.26657E1	-3.26482E1	2.68106E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.03286E-1
1.8E1	5.524E3	3.0E0	7.27E2	5.0E2	-7.27053E-2	-8.8002E1	-5.96046E-4	-8.80004E1	1.43051E-4	5.43594E-3	9.33409E-2	2.73297E1	-3.26909E1	-3.26302E1	2.68017E1	1.19342E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
1.9E1	2.425E3	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.8002E1	-6.67572E-4	-8.8E1	4.52995E-4	5.14984E-3	9.33409E-2	2.72576E1	-3.26176E1	-3.27702E1	2.68162E1	1.19913E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.01609E-1
2.0E1	2.5577E4	1.4E1	8.08E2	5.58E2	-7.32464E-2	-8.80017E1	-5.96046E-4	-8.80002E1	4.52995E-4	5.05447E-3	9.32455E-2	2.73147E1	-3.26675E1	-3.26284E1	2.67862E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01609E-1
2.1E1	5.1E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80016E1	-6.67572E-4	-8.8E1	1.66893E-4	5.38826E-3	9.32217E-2	2.73316E1	-3.26714E1	-3.26419E1	2.67734E1	1.20069E-7	2.50898E-3	2.50898E-3	6.32936E-3	3.00302E-1
2.2E1	1.811E3	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80017E1	-4.52995E-4	-8.80002E1	3.33786E-4	5.48363E-3	9.3317E-2	2.73051E1	-3.26744E1	-3.25936E1	2.68292E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00453E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80017E1	-6.91414E-4	-8.80002E1	5.24521E-4	5.36442E-3	9.35078E-2	2.72811E1	-3.2638E1	-3.26404E1	2.6803E1	1.19851E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.01223E-1