[Scan]
initial_time=2015-12-22T18:40:51
final_time=2015-12-22T18:41:11
ip_count=19
run=1021
dataset=4
scan=138
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.86862E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-9.09019E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.5776E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.81813E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=1.60561E-8
mult1=-1.89274E-8
mult2=-2.66871E-9
rf_tmon=-3.35884E-3
rf_agc=3.49137E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=6.69181E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66636E0
bslens_imon=2.65956E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19843E1
lens5a_imon=1.98108E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04946E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53435E1
cs_ef1b_imon=2.81606E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02357E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04908E1
cs_ea1_imon=2.50327E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01264E0
lens1_imon=1.31055E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64736E1
os_ef1alow_imon=2.9714E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03998E1
cs_ea2_imon=1.53949E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84296E1
cs_ef1a_imon=2.9224E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.31715E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11349E1
os_restr1_imon=4.28783E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15311E1
os_ea1_imon=2.36597E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63687E1
os_ef1bup_imon=3.05793E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23104E0
cs_ionrep_imon=1.17099E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93362E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02076E1
cs_anode1_imon=2.97348E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.99524E-8
tplens_vset=1.4E-1
tplens_vmon=1.59077E0
tplens_imon=-4.0389E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.49919E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26687E1
iondef2_imon=1.57672E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98301E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=1.02578E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27145E0
ionrepsh_imon=1.7888E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3343E1
lens5b_imon=2.17984E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74744E1
cs_ef2b_imon=3.10207E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4923E0
os_ea2_imon=-4.72194E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00561E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71119E1
cs_ef2a_imon=3.21154E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06151E0
os_ef2alow_imon=-2.63019E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95493E-1
os_ef2bup_imon=-5.41039E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10944E1
os_restr2_imon=3.42492E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.29177E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0167E1
cs_anode2_imon=2.24229E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72985E1
iondef1_imon=1.0839E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68316E1
iondef4_imon=1.08712E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.7318E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.77678E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12319E0
cs_ionaccel_imon=-1.8413E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02041E2
cs_ionfocb_imon=1.47118E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56266E1
einzel_imon=7.61833E-6
window_vset=0.0E0
window_vmon=1.60923E-1
window_imon=-1.1532E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.85765E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.63895E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.2148E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.23254E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2906E0
defgridb_imon=6.27628E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33366E1
os_fil1_imon=9.4213E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07289E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64178E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30852E1
cs_fil1_imon=9.95284E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63183E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64143E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.06353E-2
os_fil2_imon=-2.8024E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91815E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.58633E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37642E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.13394E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22209E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.9874E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40053E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.20023E-1
res40_imon=-2.57806E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=190
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.494E3	1.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80013E1	-6.19888E-4	-8.8E1	4.76837E-5	5.76973E-3	9.36508E-2	2.73039E1	-3.27041E1	-3.26236E1	2.67854E1	1.1929E-7	2.51814E-3	2.51814E-3	6.3445E-3	3.01609E-1
2.0E0	1.08599E5	8.3E1	3.16E2	1.6E2	-7.35556E-2	-8.80017E1	-7.86781E-4	-8.80002E1	2.86102E-4	4.86374E-3	9.36985E-2	2.73161E1	-3.26585E1	-3.26156E1	2.67914E1	1.19239E-7	2.51417E-3	2.51417E-3	6.29128E-3	3.0071E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80014E1	-6.4373E-4	-8.80005E1	2.86102E-4	5.14984E-3	9.35793E-2	2.73097E1	-3.263E1	-3.2632E1	2.68075E1	1.1929E-7	2.51752E-3	2.51752E-3	6.32784E-3	3.00149E-1
4.0E0	2.324E4	1.4E1	6.55E2	3.98E2	-7.30918E-2	-8.80016E1	-6.91414E-4	-8.80004E1	1.90735E-4	5.17368E-3	9.32455E-2	2.73069E1	-3.26567E1	-3.2636E1	2.68001E1	1.1929E-7	2.51668E-3	2.51668E-3	6.31594E-3	3.02836E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80018E1	-5.00679E-4	-8.80003E1	2.14577E-4	5.65052E-3	9.33886E-2	2.72823E1	-3.26651E1	-3.26314E1	2.68268E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80017E1	-8.34465E-4	-8.80005E1	-9.53674E-5	5.48363E-3	9.32455E-2	2.73015E1	-3.26512E1	-3.26518E1	2.6816E1	1.19595E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80019E1	-5.24521E-4	-8.80003E1	2.38419E-5	5.36442E-3	9.32455E-2	2.72877E1	-3.26639E1	-3.26338E1	2.68268E1	1.19342E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.8002E1	-7.39098E-4	-8.80001E1	-2.14577E-4	5.50747E-3	9.3627E-2	2.72937E1	-3.26422E1	-3.2644E1	2.6822E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02922E-1
1.2E1	1.22E2	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80018E1	-5.48363E-4	-8.80001E1	-1.66893E-4	5.26905E-3	9.35793E-2	2.72696E1	-3.26621E1	-3.26014E1	2.68028E1	1.19342E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00824E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80021E1	-6.67572E-4	-8.79999E1	2.14577E-4	5.43594E-3	9.35078E-2	2.7301E1	-3.26213E1	-3.26773E1	2.6819E1	1.19497E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
1.4E1	3.472E3	4.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80019E1	-7.62939E-4	-8.80005E1	1.19209E-4	5.29289E-3	9.34362E-2	2.73261E1	-3.26188E1	-3.26074E1	2.68034E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
1.5E1	1.08E2	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80021E1	-5.24521E-4	-8.80006E1	-7.15256E-5	5.34058E-3	9.32693E-2	2.72943E1	-3.26903E1	-3.26344E1	2.68082E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01738E-1
1.6E1	5.7E2	0.0E0	6.47E2	4.41E2	-7.44831E-2	-8.80022E1	-6.19888E-4	-8.80004E1	1.43051E-4	5.38826E-3	9.34362E-2	2.73129E1	-3.26855E1	-3.2635E1	2.68157E1	1.19445E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01085E-1
1.7E1	1.298E3	1.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80018E1	-3.33786E-4	-8.80004E1	1.43051E-4	5.55515E-3	9.33886E-2	2.72955E1	-3.26518E1	-3.26032E1	2.6786E1	1.19394E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9978E-1
1.8E1	5.439E3	4.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80018E1	-5.72205E-4	-8.80001E1	1.43051E-4	5.36442E-3	9.35555E-2	2.73299E1	-3.27322E1	-3.26036E1	2.68142E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9978E-1
1.9E1	2.323E3	1.0E0	7.68E2	5.29E2	-7.286E-2	-8.80025E1	-4.76837E-4	-8.80002E1	1.43051E-4	5.62668E-3	9.34601E-2	2.7248E1	-3.26975E1	-3.26693E1	2.681E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99941E-1
2.0E1	2.578E4	2.2E1	8.08E2	5.58E2	-7.31692E-2	-8.80018E1	-3.57628E-4	-8.79999E1	-2.14577E-4	5.36442E-3	9.33647E-2	2.7321E1	-3.2639E1	-3.2606E1	2.68148E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02396E-1
2.1E1	5.6E1	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80017E1	-5.24521E-4	-8.79998E1	2.86102E-4	5.53131E-3	9.33886E-2	2.73069E1	-3.26602E1	-3.26319E1	2.68111E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01347E-1
2.2E1	1.881E3	0.0E0	8.89E2	6.17E2	-7.16233E-2	-8.80016E1	-5.24521E-4	-8.79996E1	2.14577E-4	5.57899E-3	9.37223E-2	2.72853E1	-3.26729E1	-3.26314E1	2.68142E1	1.1929E-7	2.52025E-3	2.52025E-3	6.3074E-3	2.99343E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80017E1	-4.76837E-4	-8.80003E1	3.8147E-4	5.53131E-3	9.35793E-2	2.72985E1	-3.26687E1	-3.26224E1	2.68316E1	1.1929E-7	2.52209E-3	2.52209E-3	6.34037E-3	2.9874E-1