[Scan]
initial_time=2015-12-22T18:41:18
final_time=2015-12-22T18:41:38
ip_count=19
run=1021
dataset=4
scan=139
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.79864E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-8.88896E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.48795E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.67628E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.60072E-8
mult1=-1.42556E-8
mult2=-2.74456E-9
rf_tmon=-5.67803E-3
rf_agc=3.2931E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=5.98776E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62528E0
bslens_imon=2.48728E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=1.98091E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05071E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53502E1
cs_ef1b_imon=2.83854E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05054E1
cs_ea1_imon=2.50975E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01913E0
lens1_imon=1.61849E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.95819E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03883E1
cs_ea2_imon=1.5083E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84616E1
cs_ef1a_imon=2.91386E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.31718E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11129E1
os_restr1_imon=4.29635E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15041E1
os_ea1_imon=2.36051E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26111E0
cs_ionrep_imon=1.20224E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91839E2
cs_nozzle_imon=1.93258E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.97585E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=4.00086E-8
tplens_vset=1.4E-1
tplens_vmon=1.58135E0
tplens_imon=-4.86804E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26549E1
iondef3_imon=1.51407E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27071E1
iondef2_imon=1.56345E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=1.03129E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23588E0
ionrepsh_imon=1.77975E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33802E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74381E1
cs_ef2b_imon=3.11821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48642E0
os_ea2_imon=-8.76138E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00385E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11239E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10763E1
os_restr2_imon=3.4213E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.30902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.26479E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73261E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68012E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=5.68295E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.79576E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-1.86988E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47024E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56015E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=1.27844E-1
window_imon=-1.10223E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86056E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.61353E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.62937E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.09802E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41359E0
defgridb_imon=6.02735E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33354E1
os_fil1_imon=9.41009E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07131E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63916E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.94125E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62294E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64397E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07371E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.74454E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37809E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22313E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.05543E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.421E3	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80019E1	-3.57628E-4	-8.80003E1	2.38419E-5	5.53131E-3	9.3317E-2	2.73045E1	-3.2641E1	-3.26266E1	2.68059E1	1.1929E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.99348E-1
2.0E0	1.08485E5	1.07E2	3.16E2	1.6E2	-7.37103E-2	-8.80016E1	-5.24521E-4	-8.80003E1	9.53674E-5	5.31673E-3	9.35555E-2	2.73297E1	-3.26723E1	-3.26392E1	2.67963E1	1.1929E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80018E1	-7.15256E-5	-8.80001E1	1.43051E-4	5.34058E-3	9.377E-2	2.73128E1	-3.26543E1	-3.26632E1	2.6814E1	1.1929E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.01742E-1
4.0E0	2.3411E4	1.6E1	6.55E2	3.98E2	-7.23964E-2	-8.80017E1	-3.57628E-4	-8.80002E1	-1.43051E-4	5.31673E-3	9.35793E-2	2.73252E1	-3.26738E1	-3.26419E1	2.68198E1	1.1929E-7	2.52363E-3	2.52363E-3	6.32609E-3	3.01163E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80019E1	-2.38419E-5	-8.80002E1	-2.38419E-5	5.19753E-3	9.38654E-2	2.73285E1	-3.26807E1	-3.26416E1	2.67932E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80021E1	2.38419E-5	-8.80005E1	2.38419E-4	5.05447E-3	9.34362E-2	2.72818E1	-3.26609E1	-3.26242E1	2.68331E1	1.1929E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.8002E1	-3.57628E-4	-8.80005E1	7.15256E-5	5.24521E-3	9.32693E-2	2.73039E1	-3.2662E1	-3.26248E1	2.67992E1	1.1929E-7	2.51804E-3	2.51804E-3	6.35223E-3	3.00676E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80018E1	-2.6226E-4	-8.80001E1	3.09944E-4	5.17368E-3	9.34362E-2	2.73015E1	-3.26296E1	-3.2617E1	2.68232E1	1.1929E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99175E-1
1.2E1	1.11E2	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80019E1	-6.67572E-4	-8.8E1	3.8147E-4	5.14984E-3	9.34362E-2	2.72733E1	-3.26603E1	-3.26176E1	2.67938E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.98481E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80018E1	-5.72205E-4	-8.79999E1	5.24521E-4	5.17368E-3	9.36747E-2	2.73321E1	-3.26669E1	-3.26152E1	2.68076E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02133E-1
1.4E1	3.59E3	4.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80021E1	-2.86102E-4	-8.80002E1	1.43051E-4	5.10216E-3	9.33886E-2	2.72979E1	-3.26543E1	-3.26254E1	2.67908E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9952E-1
1.5E1	1.01E2	1.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80021E1	-2.86102E-4	-8.80002E1	2.38419E-4	5.24521E-3	9.34362E-2	2.73075E1	-3.26885E1	-3.26032E1	2.67949E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00824E-1
1.6E1	5.9E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80024E1	-5.00679E-4	-8.80002E1	3.57628E-4	5.29289E-3	9.35555E-2	2.73045E1	-3.26461E1	-3.26472E1	2.67968E1	1.1929E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.9926E-1
1.7E1	1.286E3	1.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80021E1	-2.6226E-4	-8.80001E1	-1.66893E-4	5.26905E-3	9.31501E-2	2.73496E1	-3.26693E1	-3.26332E1	2.68412E1	1.1929E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.00966E-1
1.8E1	5.555E3	5.0E0	7.27E2	5.0E2	-7.23964E-2	-8.8002E1	-4.05312E-4	-8.79999E1	4.76837E-5	5.03063E-3	9.35316E-2	2.73111E1	-3.26963E1	-3.26326E1	2.68202E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02659E-1
1.9E1	2.498E3	3.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80019E1	-4.29153E-4	-8.80002E1	0.0E0	5.126E-3	9.33886E-2	2.72432E1	-3.25689E1	-3.26861E1	2.6798E1	1.1929E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9952E-1
2.0E1	2.5428E4	1.4E1	8.08E2	5.58E2	-7.19325E-2	-8.8002E1	-4.29153E-4	-8.80001E1	-2.14577E-4	5.126E-3	9.32932E-2	2.72823E1	-3.26855E1	-3.26398E1	2.68238E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
2.1E1	5.4E1	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80022E1	-1.66893E-4	-8.8E1	2.38419E-5	5.53131E-3	9.32932E-2	2.73511E1	-3.26596E1	-3.26396E1	2.68004E1	1.1929E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.01347E-1
2.2E1	1.849E3	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80019E1	-4.52995E-4	-8.80002E1	1.90735E-4	5.43594E-3	9.3174E-2	2.72901E1	-3.26609E1	-3.26488E1	2.6786E1	1.1929E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.8002E1	-7.62939E-4	-8.80002E1	1.19209E-4	4.93526E-3	9.34362E-2	2.73261E1	-3.27071E1	-3.26549E1	2.68012E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1