[Scan]
initial_time=2015-12-22T18:42:41
final_time=2015-12-22T18:43:01
ip_count=19
run=1021
dataset=4
scan=142
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.79724E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.96056E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=1.52001E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.73033E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.60308E-8
mult1=-2.02157E-8
mult2=-2.59086E-9
rf_tmon=-4.6386E-3
rf_agc=3.35138E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=6.35517E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62905E0
bslens_imon=2.50079E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20167E1
lens5a_imon=1.9858E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04838E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53884E1
cs_ef1b_imon=2.83842E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02004E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05242E1
cs_ea1_imon=2.51495E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97048E0
lens1_imon=1.40357E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64894E1
os_ef1alow_imon=2.9612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03431E1
cs_ea2_imon=1.5409E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84509E1
cs_ef1a_imon=2.93537E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.32155E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11377E1
os_restr1_imon=4.28953E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15465E1
os_ea1_imon=2.37656E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.08009E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.19404E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91836E2
cs_nozzle_imon=1.93317E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=2.94917E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.9964E-8
tplens_vset=1.4E-1
tplens_vmon=1.59837E0
tplens_imon=-1.75008E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26338E1
iondef3_imon=1.50161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.58231E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98356E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=1.03313E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26272E0
ionrepsh_imon=1.78795E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3331E1
lens5b_imon=2.15888E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74708E1
cs_ef2b_imon=3.1268E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48806E0
os_ea2_imon=-6.59907E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71175E1
cs_ef2a_imon=3.18448E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06075E0
os_ef2alow_imon=-2.63379E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19441E-1
os_ef2bup_imon=-5.35485E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10888E1
os_restr2_imon=3.41872E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30176E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01721E1
cs_anode2_imon=2.24325E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.08821E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67866E1
iondef4_imon=1.0922E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=5.68244E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=7.72245E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1154E0
cs_ionaccel_imon=-2.03579E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47159E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56269E1
einzel_imon=7.62061E-6
window_vset=0.0E0
window_vmon=1.61787E-1
window_imon=-1.07334E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.85831E1
mask2_imon=-6.09801E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.27191E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.70206E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=6.89319E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41441E0
defgridb_imon=6.08621E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33328E1
os_fil1_imon=9.41294E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06651E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63933E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30896E1
cs_fil1_imon=9.95615E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62272E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64389E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10396E-2
os_fil2_imon=-2.78555E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92647E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.63673E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37088E-1
cs_fil2_imon=-2.63222E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.76986E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22346E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.93748E-1
res40_imon=-2.55594E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=186
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.474E3	4.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80019E1	-4.05312E-4	-8.80002E1	0.0E0	5.60284E-3	9.34124E-2	2.72715E1	-3.26981E1	-3.26062E1	2.68184E1	1.1929E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.00966E-1
2.0E0	1.07653E5	1.13E2	3.16E2	1.6E2	-7.25507E-2	-8.80019E1	-4.52995E-4	-8.8E1	-1.66893E-4	5.17368E-3	9.34362E-2	2.72901E1	-3.26717E1	-3.26032E1	2.6789E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.01347E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80019E1	-5.24521E-4	-8.80001E1	7.15256E-5	5.29289E-3	9.3174E-2	2.72949E1	-3.26332E1	-3.26338E1	2.67752E1	1.1929E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.00824E-1
4.0E0	2.252E4	1.4E1	6.55E2	3.98E2	-7.24736E-2	-8.80019E1	-5.24521E-4	-8.8E1	1.43051E-4	5.50747E-3	9.31263E-2	2.72715E1	-3.26573E1	-3.26526E1	2.68186E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80018E1	-7.15256E-4	-8.8E1	3.57628E-4	5.26905E-3	9.32693E-2	2.73045E1	-3.26331E1	-3.26337E1	2.68118E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01223E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80019E1	-4.05312E-4	-8.8E1	9.53674E-5	5.19753E-3	9.30071E-2	2.7308E1	-3.26496E1	-3.26254E1	2.68382E1	1.1929E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.03286E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80018E1	-2.14577E-4	-8.79999E1	4.76837E-4	5.45979E-3	9.32217E-2	2.72925E1	-3.26597E1	-3.26218E1	2.67992E1	1.1929E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.8002E1	-4.05312E-4	-8.79997E1	5.72205E-4	5.43594E-3	9.33409E-2	2.73045E1	-3.26404E1	-3.26194E1	2.68004E1	1.1929E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9952E-1
1.2E1	1.14E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.8002E1	-3.09944E-4	-8.80004E1	-2.38419E-5	5.34058E-3	9.34362E-2	2.72973E1	-3.26669E1	-3.2647E1	2.6796E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9978E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80019E1	-1.43051E-4	-8.79998E1	7.15256E-5	5.38826E-3	9.3627E-2	2.73334E1	-3.26767E1	-3.26166E1	2.68004E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01609E-1
1.4E1	3.469E3	1.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80019E1	-3.8147E-4	-8.80001E1	2.38419E-4	5.36442E-3	9.32455E-2	2.72955E1	-3.26464E1	-3.26446E1	2.68304E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01347E-1
1.5E1	9.4E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.8002E1	-1.90735E-4	-8.8E1	2.86102E-4	5.53131E-3	9.29356E-2	2.72997E1	-3.26518E1	-3.2608E1	2.6822E1	1.19341E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.0071E-1
1.6E1	5.38E2	2.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80021E1	-4.29153E-4	-8.80003E1	3.33786E-4	5.76973E-3	9.3174E-2	2.73099E1	-3.26446E1	-3.26939E1	2.67782E1	1.1929E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00302E-1
1.7E1	1.332E3	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80021E1	-4.76837E-4	-8.80003E1	7.15256E-5	5.67436E-3	9.32693E-2	2.72937E1	-3.26777E1	-3.26056E1	2.68172E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02133E-1
1.8E1	5.557E3	3.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80021E1	-5.24521E-4	-8.79997E1	-3.09944E-4	5.57899E-3	9.31978E-2	2.73027E1	-3.26837E1	-3.26404E1	2.6813E1	1.1929E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.03185E-1
1.9E1	2.44E3	1.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80023E1	-5.48363E-4	-8.80001E1	2.86102E-4	5.31673E-3	9.32455E-2	2.72528E1	-3.26777E1	-3.27468E1	2.68286E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
2.0E1	2.543E4	1.6E1	8.08E2	5.58E2	-7.32464E-2	-8.80023E1	-1.0252E-3	-8.8E1	2.38419E-5	5.50747E-3	9.32217E-2	2.73315E1	-3.26639E1	-3.26248E1	2.6813E1	1.19342E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9926E-1
2.1E1	4.2E1	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80023E1	-6.19888E-4	-8.80003E1	1.90735E-4	5.43594E-3	9.32693E-2	2.73228E1	-3.2662E1	-3.26296E1	2.67992E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02133E-1
2.2E1	1.829E3	1.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80024E1	-5.72205E-4	-8.80003E1	-2.38419E-5	5.55515E-3	9.30309E-2	2.73021E1	-3.26325E1	-3.26431E1	2.67966E1	1.1929E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.02769E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80026E1	-5.24521E-4	-8.80002E1	1.43051E-4	5.34058E-3	9.31025E-2	2.73033E1	-3.26747E1	-3.26338E1	2.67866E1	1.1929E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.99941E-1