[Scan]
initial_time=2015-12-22T18:43:09
final_time=2015-12-22T18:43:28
ip_count=19
run=1021
dataset=4
scan=143
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.80849E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-8.79395E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.46098E-9
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-2.61099E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.59817E-8
mult1=-1.65616E-8
mult2=-2.76716E-9
rf_tmon=-4.22691E-3
rf_agc=3.29546E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=6.1301E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.35213E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20184E1
lens5a_imon=1.98191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.04849E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53595E1
cs_ef1b_imon=2.81294E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04947E1
cs_ea1_imon=2.50327E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99054E0
lens1_imon=1.45312E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64505E1
os_ef1alow_imon=2.96262E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03791E1
cs_ea2_imon=1.55258E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84173E1
cs_ef1a_imon=2.93254E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.31515E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11507E1
os_restr1_imon=4.29378E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15129E1
os_ea1_imon=2.35461E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.07549E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=1.20784E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91854E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02022E1
cs_anode1_imon=2.95059E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.9889E-8
tplens_vset=1.4E-1
tplens_vmon=1.57123E0
tplens_imon=-2.2102E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26701E1
iondef3_imon=1.49241E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26312E1
iondef2_imon=1.58621E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98233E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=1.0075E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26862E0
ionrepsh_imon=1.76601E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74672E1
cs_ef2b_imon=3.11371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47036E0
os_ea2_imon=-6.52828E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0606E2
lens4b_imon=2.00694E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71323E1
cs_ef2a_imon=3.17528E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05898E0
os_ef2alow_imon=-2.7541E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05877E-1
os_ef2bup_imon=-5.40792E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10935E1
os_restr2_imon=3.41943E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.29503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0175E1
cs_anode2_imon=2.24714E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72649E1
iondef1_imon=1.08892E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68279E1
iondef4_imon=1.08123E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.69462E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=7.73139E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13545E0
cs_ionaccel_imon=-1.85887E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47145E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5621E1
einzel_imon=7.55338E-6
window_vset=0.0E0
window_vmon=1.63556E-1
window_imon=-1.08749E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.38989E-4
mask2_vset=0.0E0
mask2_vmon=-1.86267E1
mask2_imon=-7.44261E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.39225E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.27733E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.26837E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41146E0
defgridb_imon=5.93401E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33301E1
os_fil1_imon=9.40415E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07252E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6384E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30849E1
cs_fil1_imon=9.93946E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62307E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64131E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04064E-2
os_fil2_imon=-2.64402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96185E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.73038E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36707E-1
cs_fil2_imon=-2.74427E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.06218E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2219E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33297E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51854E-3
foreline_cvt_pmon=2.51854E-3
chamber_tmon=1.40015E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.58364E-1
res40_imon=-2.49933E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.469E3	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80017E1	-7.15256E-4	-8.80003E1	3.09944E-4	5.07832E-3	9.30071E-2	2.73016E1	-3.26921E1	-3.26312E1	2.68048E1	1.1929E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.01223E-1
2.0E0	1.0669E5	9.3E1	3.16E2	1.6E2	-7.3401E-2	-8.80019E1	-5.96046E-4	-8.8E1	2.38419E-5	5.17368E-3	9.31025E-2	2.73138E1	-3.2646E1	-3.26385E1	2.68309E1	1.1929E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.006E-1
3.0E0	9.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80023E1	-8.10623E-4	-8.80003E1	3.57628E-4	5.05447E-3	9.31025E-2	2.73346E1	-3.26509E1	-3.26173E1	2.68099E1	1.1929E-7	2.51611E-3	2.51611E-3	6.33021E-3	2.9944E-1
4.0E0	2.27E4	1.2E1	6.55E2	3.98E2	-7.29374E-2	-8.80023E1	-7.86781E-4	-8.80004E1	5.00679E-4	5.03063E-3	9.34839E-2	2.72986E1	-3.26756E1	-3.26313E1	2.68134E1	1.1929E-7	2.52342E-3	2.52342E-3	6.27052E-3	2.99093E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.8002E1	-1.09673E-3	-8.80001E1	2.14577E-4	5.26905E-3	9.3627E-2	2.73129E1	-3.26789E1	-3.26386E1	2.68142E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80022E1	-6.19888E-4	-8.80002E1	1.43051E-4	5.26905E-3	9.32693E-2	2.73104E1	-3.26278E1	-3.26461E1	2.68322E1	1.1929E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80022E1	-7.62939E-4	-8.80003E1	2.86102E-4	5.48363E-3	9.33886E-2	2.73069E1	-3.26518E1	-3.26482E1	2.68094E1	1.1929E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.44059E-2	-8.80023E1	-5.72205E-4	-8.80002E1	0.0E0	5.10216E-3	9.30786E-2	2.72847E1	-3.26681E1	-3.25978E1	2.68436E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
1.2E1	1.26E2	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.8002E1	-5.96046E-4	-8.80003E1	9.53674E-5	5.07832E-3	9.30071E-2	2.72959E1	-3.26713E1	-3.26523E1	2.68082E1	1.1929E-7	2.51552E-3	2.51552E-3	6.35692E-3	3.00041E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.42513E-2	-8.80023E1	-6.91414E-4	-8.8E1	2.14577E-4	5.48363E-3	9.32455E-2	2.73405E1	-3.27263E1	-3.2638E1	2.681E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01347E-1
1.4E1	3.473E3	4.0E0	5.66E2	3.82E2	-7.43285E-2	-8.80019E1	-7.62939E-4	-8.80003E1	1.90735E-4	5.45979E-3	9.31263E-2	2.73045E1	-3.26386E1	-3.2644E1	2.68016E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9978E-1
1.5E1	9.2E1	1.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80019E1	-5.96046E-4	-8.80001E1	2.14577E-4	5.24521E-3	9.32932E-2	2.73003E1	-3.26458E1	-3.26254E1	2.68178E1	1.1929E-7	2.51359E-3	2.51359E-3	6.29624E-3	3.0041E-1
1.6E1	5.41E2	1.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80018E1	-6.19888E-4	-8.80001E1	2.6226E-4	5.126E-3	9.31025E-2	2.73364E1	-3.26832E1	-3.2616E1	2.67986E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99941E-1
1.7E1	1.301E3	1.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80016E1	-3.33786E-4	-8.80002E1	-2.38419E-5	5.55515E-3	9.33886E-2	2.72833E1	-3.26561E1	-3.26354E1	2.68018E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9978E-1
1.8E1	5.682E3	4.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80018E1	-6.4373E-4	-8.79999E1	9.53674E-5	5.4121E-3	9.34124E-2	2.73146E1	-3.26892E1	-3.26204E1	2.67981E1	1.1929E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0071E-1
1.9E1	2.458E3	3.0E0	7.68E2	5.29E2	-7.29374E-2	-8.8002E1	-5.24521E-4	-8.79999E1	2.38419E-5	5.48363E-3	9.32932E-2	2.7333E1	-3.27337E1	-3.26792E1	2.68251E1	1.1929E-7	2.51956E-3	2.51956E-3	6.33297E-3	2.99421E-1
2.0E1	2.5466E4	1.7E1	8.08E2	5.58E2	-7.27828E-2	-8.8002E1	-5.72205E-4	-8.79997E1	-1.43051E-4	5.62668E-3	9.32932E-2	2.73127E1	-3.26731E1	-3.26092E1	2.68223E1	1.1929E-7	2.51411E-3	2.51411E-3	6.32483E-3	3.00087E-1
2.1E1	4.6E1	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80019E1	-5.72205E-4	-8.79997E1	1.19209E-4	5.38826E-3	9.34839E-2	2.72962E1	-3.26744E1	-3.26464E1	2.67952E1	1.1929E-7	2.51823E-3	2.51823E-3	6.33757E-3	3.0101E-1
2.2E1	1.777E3	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80019E1	-4.29153E-4	-8.79998E1	2.38419E-4	5.81741E-3	9.34362E-2	2.73443E1	-3.26562E1	-3.26092E1	2.67981E1	1.1929E-7	2.51874E-3	2.51874E-3	6.33065E-3	2.99535E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.8002E1	-6.67572E-4	-8.79998E1	-9.53674E-5	5.53131E-3	9.32455E-2	2.72649E1	-3.26312E1	-3.26701E1	2.68279E1	1.1929E-7	2.51854E-3	2.51854E-3	6.33297E-3	3.01609E-1