[Scan]
initial_time=2015-12-22T18:44:03
final_time=2015-12-22T18:44:22
ip_count=19
run=1021
dataset=4
scan=145
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.79021E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-8.36873E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.43406E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.48499E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.60227E-8
mult1=-2.28526E-8
mult2=-2.80644E-9
rf_tmon=-3.94164E-3
rf_agc=3.39164E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=6.00278E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66294E0
bslens_imon=2.58784E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20264E1
lens5a_imon=1.9722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53522E1
cs_ef1b_imon=2.79868E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.01964E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0459E1
cs_ea1_imon=2.52581E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99671E0
lens1_imon=1.27298E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6466E1
os_ef1alow_imon=2.97383E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.53813E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84191E1
cs_ef1a_imon=2.92483E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.3048E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=4.30207E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15368E1
os_ea1_imon=2.36632E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.07809E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2373E0
cs_ionrep_imon=1.21368E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93208E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01873E1
cs_anode1_imon=2.94707E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.99755E-8
tplens_vset=1.4E-1
tplens_vmon=1.59817E0
tplens_imon=-4.96101E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.50056E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.57706E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98213E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=9.90164E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30788E0
ionrepsh_imon=1.76524E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.336E1
lens5b_imon=2.20068E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74872E1
cs_ef2b_imon=3.12466E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42684E0
os_ea2_imon=-7.72733E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00636E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71379E1
cs_ef2a_imon=3.16671E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05514E0
os_ef2alow_imon=-2.67189E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14028E-1
os_ef2bup_imon=-5.47989E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=3.41554E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23124E2
cs_ionfoca_imon=6.29109E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01885E1
cs_anode2_imon=2.2416E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.10952E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6777E1
iondef4_imon=1.09546E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=5.60765E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.66301E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.88996E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.63224E-6
window_vset=0.0E0
window_vmon=1.42389E-1
window_imon=-1.12888E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39074E-4
mask2_vset=0.0E0
mask2_vmon=-1.85979E1
mask2_imon=-7.43124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.45453E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.22846E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.45453E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=5.7879E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.43173E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06252E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63441E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30841E1
cs_fil1_imon=9.95331E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62528E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63517E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17349E-2
os_fil2_imon=-2.70394E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97028E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.01495E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35145E-1
cs_fil2_imon=-2.48963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.92948E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22095E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.68474E-1
res40_imon=-2.446E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=191
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.532E3	4.0E0	1.47E2	4.1E1	-7.33239E-2	-8.8002E1	-6.91414E-4	-8.80003E1	5.48363E-4	5.50747E-3	9.34124E-2	2.73387E1	-3.26765E1	-3.26032E1	2.68209E1	1.1929E-7	2.52301E-3	2.52301E-3	6.3126E-3	3.01981E-1
2.0E0	1.06523E5	1.02E2	3.16E2	1.6E2	-7.21643E-2	-8.80018E1	-5.48363E-4	-8.79997E1	4.29153E-4	5.36442E-3	9.3174E-2	2.72892E1	-3.26523E1	-3.26432E1	2.68069E1	1.1929E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.00966E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.8002E1	-7.15256E-4	-8.8E1	4.05312E-4	5.26905E-3	9.31501E-2	2.73184E1	-3.26747E1	-3.2648E1	2.68285E1	1.1929E-7	2.52179E-3	2.52179E-3	6.3074E-3	2.98092E-1
4.0E0	2.2848E4	1.5E1	6.55E2	3.98E2	-7.25507E-2	-8.8002E1	-6.19888E-4	-8.80001E1	1.66893E-4	5.67436E-3	9.28879E-2	2.73271E1	-3.26689E1	-3.2582E1	2.68111E1	1.1929E-7	2.51498E-3	2.51498E-3	6.31269E-3	2.97843E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.8002E1	-4.05312E-4	-8.79997E1	7.15256E-5	5.4121E-3	9.31263E-2	2.73173E1	-3.26389E1	-3.26119E1	2.67968E1	1.1929E-7	2.51603E-3	2.51603E-3	6.3074E-3	3.006E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80023E1	-5.24521E-4	-8.80003E1	-7.15256E-5	5.55515E-3	9.31025E-2	2.72883E1	-3.26776E1	-3.26509E1	2.68142E1	1.1929E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80021E1	-2.38419E-4	-8.80003E1	-1.43051E-4	5.45979E-3	9.30309E-2	2.72901E1	-3.26753E1	-3.26182E1	2.68238E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.03027E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80021E1	-5.00679E-4	-8.80004E1	2.6226E-4	5.36442E-3	9.26971E-2	2.7301E1	-3.26278E1	-3.25912E1	2.6803E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01347E-1
1.2E1	1.22E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80024E1	-2.14577E-4	-8.80004E1	9.53674E-5	5.26905E-3	9.29832E-2	2.72696E1	-3.26482E1	-3.26062E1	2.67716E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.01995E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80023E1	-3.09944E-4	-8.80004E1	3.09944E-4	5.4121E-3	9.29117E-2	2.72456E1	-3.2614E1	-3.26326E1	2.68118E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.02133E-1
1.4E1	3.423E3	1.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80023E1	-3.09944E-4	-8.80002E1	9.53674E-5	5.17368E-3	9.31025E-2	2.72811E1	-3.26663E1	-3.26314E1	2.67896E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.02659E-1
1.5E1	1.03E2	1.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80022E1	-2.38419E-4	-8.80003E1	0.0E0	5.4121E-3	9.31978E-2	2.72559E1	-3.26545E1	-3.26092E1	2.6811E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.03804E-1
1.6E1	5.21E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80019E1	-7.15256E-4	-8.8E1	2.14577E-4	5.38826E-3	9.33647E-2	2.72895E1	-3.26604E1	-3.26481E1	2.68127E1	1.19386E-7	2.52058E-3	2.52058E-3	6.32784E-3	3.00149E-1
1.7E1	1.301E3	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80022E1	-5.48363E-4	-8.80001E1	2.38419E-4	5.45979E-3	9.3174E-2	2.72883E1	-3.26536E1	-3.26068E1	2.67896E1	1.19346E-7	2.51321E-3	2.51321E-3	6.30149E-3	2.99353E-1
1.8E1	5.51E3	3.0E0	7.27E2	5.0E2	-7.286E-2	-8.80022E1	-3.09944E-4	-8.80005E1	1.90735E-4	5.45979E-3	9.29594E-2	2.72684E1	-3.26368E1	-3.26488E1	2.67884E1	1.19421E-7	2.51622E-3	2.51622E-3	6.29635E-3	3.01278E-1
1.9E1	2.367E3	2.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80023E1	-2.86102E-4	-8.80005E1	-1.66893E-4	5.60284E-3	9.30548E-2	2.73117E1	-3.26543E1	-3.26236E1	2.67878E1					
2.0E1	2.501E4	1.1E1	8.08E2	5.58E2	-7.26282E-2	-8.80021E1	-3.33786E-4	-8.80002E1	1.43051E-4	5.48363E-3	9.30786E-2	2.73087E1	-3.26909E1	-3.26494E1	2.68064E1	1.1929E-7	2.50898E-3	2.50898E-3	6.31288E-3	3.00302E-1
2.1E1	6.1E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80021E1	-6.4373E-4	-8.80002E1	-9.53674E-5	5.55515E-3	9.30786E-2	2.73116E1	-3.26372E1	-3.26071E1	2.67943E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01085E-1
2.2E1	1.818E3	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80022E1	-3.57628E-4	-8.80003E1	-7.15256E-5	5.50747E-3	9.2864E-2	2.72732E1	-3.26567E1	-3.26455E1	2.68022E1	1.1929E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.01862E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80021E1	-7.86781E-4	-8.79999E1	4.76837E-5	5.22137E-3	9.31978E-2	2.73099E1	-3.26615E1	-3.26176E1	2.6777E1	1.1929E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01871E-1